High Vacuum Angle Valve

Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.

SY

System (16 outputs) S-Link System (8 outputs) J2 SUNX Corporation T Link Mini System K Fuji Electric Co., Ltd.

REA/REB

RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight

REA/REB

RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight

Series VQ Metal Seal/Rubber Seal Body Ported

(Sunx) 8 point S-LINK System (Sunx) T-LINK Mini System (Fuji Electric.)

MY1

Q 153 191 206 264 322 QW 30 36 42 51 59 Z 160 200 220 280 340 NW 37 45 53 64 75 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

Air Cylinder

40 6 38 M5 0.8 depth 8 5.5 10 M10 x 1.25 35.5 1/8 40 Up to 200 30 27 19 26 16 25 2 13 10 50 8 47 M6 1 depth 12 6 14 M14 x 1.5 44 1/8 Female Rod End (mm) Bore size TA TB TC 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st S ZZ S ZZ S ZZ S ZZ 20 11 11 M5 x 0.8 94 131 119 156 144 181 25 11 11 M6 x 0.75 94 136 119 161 144 186 169 211 32 11 10 M8 x 1.0 96 138 121 163 146 188 171 213 40

REA/REB

Compared with the previous type (series REA: 300mm/s), the tact time can be shortened by approximately 1/2. Smooth acceleration & deceleration at 5m/s Acceleration Stroke 15m/s (REB) 5m/s (REA) REB REA 1/2 T T Time Cushion ring The exterior of the cushion ring is provided with a variable throttle groove in its longitudinal direction.

0.4

VQC 4/5 VQZ SQ DIN rail mounting bracket [-D] VVQC2000-57A {For F/L/M/P/S (EX500) kit} VVQC2000-57A-S {For S (EX250) kit} VVQC2000-57A-T (For T kit) VFS It is used for mounting a manifold on a DIN rail. When ordering this option incorporated with a manifold, suffix -D to the end of the manifold part number.

5

/s or more 50 mm/s or more REC r r Piston speed Piston speed Control stroke Smooth Smooth Less than 500 mm/s Thrust control length less than 2 mm Less than 50 mm/s Less than the minimum operating pressure Without balancer or thrust control 100 mm/s or more Low Speed Low Speed qwe t t Follow-up speed Low pressure, low thrust Low sliding MQ The minimum operating pressure or more Less than 100

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

42

(For F, L, S, T kit) 1. D-side end plate assembly part no.

MGP

, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 15 10 19 53 37 10.5 M5 x 0.8 M5 x 0.8 Rc 1/8 12.5 10.5 25 53.5 37.5 11.5 M6 x 1.0 M6 x 1.0 Rc 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30st or less Over 30st to 100st Over 300st 30st or less Over 30st to 100st 23 24 28 34 Over 100st to 200st 200

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

ISO Cylinder

S Single acting, Spring return T Single acting, Spring extend Made to order For details, refer to page 71.

Battery-less

Select Nil, S, or T for DeviceNet or CC-Link.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

V7 S B 3 M2 LEFB 32 q w e r y t u i o !

CG5-S

nut SUS304 Rod end nut SUS304 Label protector PET CJ5SR CJ5SV NBR 8 Water resistant scraper FKM 3 Stainless Steel Cylinder Series CJ5-S Dimensions R V Basic type (B)/CJ5BS NDn8 GA GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 MM NN CA CB D F NA NB A With head cover port in axial position (R) BA BB H S + Stroke Z + Stroke (mm) Bore size (mm) A BA BB CA CB D F GA GB H MM NN NA NB NDn8 S Z