Vacuum Pad

(for Heavy-duty) Buffer assembly model Applicable pad model Series ZP Page ZP40H ZP50H ZP40HB ZP50HB P. 80 P. 81 ZPB-T1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 80 P. 81 ZPB-T2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB P. 80 P. 81 ZPB-T3 (J/JB/JF)01 ZP40H ZP50H ZP40HB ZP50HB P. 82 P. 83 ZPB-X1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 82 P. 83 ZPB-X2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB

Vacuum Pad

(for Heavy-duty) Buffer assembly model Applicable pad model Series ZP Page ZP40H ZP50H ZP40HB ZP50HB P. 80 P. 81 ZPB-T1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 80 P. 81 ZPB-T2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB P. 80 P. 81 ZPB-T3 (J/JB/JF)01 ZP40H ZP50H ZP40HB ZP50HB P. 82 P. 83 ZPB-X1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 82 P. 83 ZPB-X2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB

Vacuum Pad

(for Heavy-duty) Buffer assembly model Applicable pad model Series ZP Page ZP40H ZP50H ZP40HB ZP50HB P. 80 P. 81 ZPB-T1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 80 P. 81 ZPB-T2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB P. 80 P. 81 ZPB-T3 (J/JB/JF)01 ZP40H ZP50H ZP40HB ZP50HB P. 82 P. 83 ZPB-X1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 82 P. 83 ZPB-X2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

AC Servo Motor Driver (Pulse input type/Positioning type ）

PG 11 CN1 P S T 1.2 k Approx. 100 NP 35 4 5 6 7 8 9 LA Approx. 1.2 k NP2 38 LAR Differential line driver output (35 mA or less) NG 36 LB LBR LZ LZR Open-collector output OP LG 33 34 (Note 1) CN1 P S T (Note 1) CN3 P S T 2 VC VLA RS-422/RS-485 5 4 3 6 7 SDP SDN RDP RDN 27 TLA TLA TC 15 V DC 1 P15R LG 3 LG 28 LG (Note 1) 30 LG SD CN6 P S T Analog monitor Case 3 MO1 10 V DC MO2 2 10 V DC LG

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Dual Rod Cylinder Series CXSJ/CXS

P 6.3 G QQ 5 5 E F (Through-hole) N Z L V (Opposite side: Same) 2 x 2 x M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 8 R Q Z L I N U NN (mm) N U V A B C D E F G H I J L M NN P Q QQ R Model 2 x 3.4 through 2 x 6.5 counterbore depth 3.3 2 x 4.3 through 2 x 8 counterbore depth 4.4 2 x M3 x 0.5 thread depth 5 2 x M4 x 0.7 thread depth 7 4 x M3 x 0.5 thread depth 4.5 CXS10 46

Stopper Cylinder

-DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore Q F Z Stroke T 0 0.1 Width across flats K A + 2 stroke B + Stroke V H + Stroke D M E J E M 4 x N through 8 x O counterbore Width across flats K A + 2 stroke B + Stroke V H

Modular F.R.L. Unit

+ AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] 3-port valve for V residual pressure AC20B to 50B AF + AR + [V] release AC20C to 40C AF + AFM + AR + [V] Accessories AC20D to

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

wire 24 V Connector Diagnostic indication (2-color indication) 20B59W Grommet H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 G59W G5PW K59W 3-wire (NPN) 3-wire (PNP) IC circuit Data 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V 24 V 12 V Grommet 2-wire Water resistant (2-color indication)

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

Electric Slide Tables

Lead 5: LES16K 3 Work load [kg] T1 = V/a1 = 220/5000 = 0.04 [s], Lead 10: LES16J 2 T3 = V/a2 = 220/5000 = 0.04 [s] T = T1 + T2 + T3 + T4 [s] T2 = L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. 1 0 = 50 0.5 220 (0.04 + 0.04) 220 0 100 200 300 400 500 T1 = V/a1 [s] T3 = V/a2 [s] Speed [mm/s] = 0.19 [s]

Applicable Auto Switch Model

D-Y7NW(V)/Y7PW(V)/Y7BW(V) D-Y7BAL BU-1 BU-1 BU-1 BU-1 A B A B Reed switch D-A90(V)/A93(V)/A96(V) Solid state switch D-F9N(V)/F9P(V)/F9B(V)/F9NW(V)/ F9PW(V)/F9BW(V)/F9BAL How to mount and move the auto switch How to mount and move the auto switch Note) Use a watchmaker driver whose grip dia. is 5 to 6mm when tightening the auto switch mounting screw.

ZP3

ZP3 T 015 U N A3 With adapter From p. 137 p. 160 From p. 162 ZP3 T 015 U N J 3 B3 With buffer From p. 140 p. 161 p. 164 q w e r t y u Flat type q Vacuum inlet direction w Pad diameter e Material Nil Pad unit T Vertical Y Lateral 015 1.5 02 2 035 3.5 N NBR S Silicone rubber1 U Urethane rubber F FKM GN Conductive NBR GS Conductive silicone rubber r Buffer specification t Buffer stroke J Rotating

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

other than above For P kit For J kit For L kit For S kit Note) The !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

other than above For P kit For J kit For L kit For S kit Note) The !

Modular F.R.L. Units

Please contact SMC regarding the bowl assembly supply for psi and F unit specifications. 34 Series AF20-A to AF40-A Dimensions AF20-A T N M D J Bracket (Option) S U R C V Q OUT IN 2 x P (Port size) B Clearance for maintenance G Drain AF30-A to AF40-06-A A T N J M D Bracket (Option) U S R V Q IN OUT B C 2 x P (Port size) E Clearance for maintenance G Drain A Applicable model AF20-A AF30-A

Hygienic Design Cylinder Series HY

W V Port U U 2 x P (Rc, NPT, G) Width across flats KA 2 x 4 x J G G MM HA D E E T H1 MB Width across flats B1 K C MA FA AL B N A F N H S + Stroke FB ZZ + Stroke CJ5 CG5 (mm) Bore size A Stroke range AL B B1 C D Ee11 F FA FB G H H1 MA MB J K KA MM N P S T U V W HA ZZ HY 32 40 50 63 500 or less 22 24 32 32 18 20 27 27 50 58 70 84 17 19 24 24 32.5 38 46.5 56.5 12 16 20 20 30 35 40 45 16 18.5