VM

POM ADC Material Note r Description Material q Description Retainer Over travel spring Plunger Body Metallic plated t y w e Spring Spool valve Steel Zinc chromated Rubber lined Aluminum alloy, NBR Series VM800 Basic VM830-01-00 JIS Symbol Actuator mounting hole P .T. (Pre-Travel) 1 O.T. (Over Travel) 2 T.T.

VR4151/4152

N.C. common type (With VM430) X102 01 Port size Rc 1 8 NPT N01 1 8 G F01 1 8 Dimensions Bracket mounted Panel mounted 2-6.5 hole Mounting screw M6 x 1 x 12 Rc 1/4 Spare tank connecting port processing possible 4-M6 thread Bottom of bracket Bracket side 4-7 hole Knob side Bracket plate t = 2 Panel thickness t = 3 or less Rc 1/8 signal pressure port 2-M6 x 1.0 thread depth 8 Panel mounting

9.8

Note 3) Not available for piping specifications of 01 and N01.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M18 x 1.5 M22 x 1.5 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 Torque Related 63 63 Equipment Vacuum entry 80 80 100 100 B01 N01 T01 1 8 NPT 1 8 NPTF 1 8 Rc 125 125 Pad type H Heavy duty Buffer stroke (Rotating) Stroke 40 50 63 80 100 125 50 25 Material N S NBR 75 Silicon rubber Urethane rubber Fluororubber 100 U F E EPR 1193 Series ZPT ZPT HJ-01-A18 (With buffer) 40 50

2-Color Display

For vacuum/ compound pressure ZSE30A 01 N M Option 3 Operating manual Booklet Symbol Calibration certificate Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa Nil Y K T Piping Option 2 01 R1/8 (M5 female threaded) None Nil Bracket A N01 NPT1/8 (M5 female threaded) Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting

ZSE30A(F)/ISE30A

Pressure Momentary change Set-value P-1 H-1 t (ms) t (ms) Time Switch output operation in normal conditions ON OFF Time Switch output operation when anti-chattering function is on. ON OFF Time J Power-saving mode (F7) Power-saving mode can be selected. It shifts to the power-saving mode without button operation for 30 seconds.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 NAN110-N01 NAN110-N01 NAN200-N02 NAN200-N02 NAN110-N01 24 Q Q Q Technical Reference 35 19.4 Q Q Series VQZ100200300 Q 5 5

Precision Regulator

OUTPUT PRESS. 0.005 0.005 0.005 0.005 0.2MPa 0.2MPa 0.2MPa 0.2MPa IR2000 IR2000 IR2000 IR2000-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** Product code *** *** *** ***-*** *** *** *** Product number Max. supply pressure Set pressure range T T T To o o o G G G G MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN o Production lot no. Production lot no.

Precision Regulator

IR3000 : G43-2-01 G43-P2-N01-X30 IR3010 : G43-4-01 G43-P4-N01-X30 IR3020 : G43-10-01 G43-P10-N01-X30 Set pressure Thread type NIL:Rc F:G 0: 0.01~0.2MPa 1: 0.01~0.4MPa 2: 0.01~0.8MPa N:NPT (Note 3) The pressure gauge is not attached and becomes bundled shipment. 4. Marking on product Product name plate MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS.

Precision Regulator

OUTPUT PRESS. 0.005 0.005 0.005 0.005 0.2MPa 0.2MPa 0.2MPa 0.2MPa IR1000 IR1000 IR1000 IR1000-01BG 01BG 01BG 01BG *** *** *** ***-*** *** *** *** Product code *** *** *** ***-*** *** *** *** Product number Max. supply pressure Set pressure range T T T To o o o G G G G MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN o Production lot no.

REGULATOR

G36-4-N01 1 0.2MPa setting Z Imperial unit Name plate psi Pressure gauge MPa / psi G36-P10-N01-X30 NPT Imperial unit Name plate psi Pressure gauge MPa / psi 0.2MPa setting G36-P4-N01-X30 1Z G G36-10-01 G36-4-01 1 0.2MPa setting Rc G36-10-01-L Round type pressure gauge (with colour zone) G36-4-01-L 1 0.2MPa setting NPT G36-10-N01-L G36-4-N01-L 1 0.2MPa setting G G36-10-01-L

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

3 @5 q @3 t r u e o y @1 i !7 !1 Component Parts Material NBR NBR Stainless steel Stainless steel POM, Stainless steel (1) Note Description DY seal DY seal Spring Spring Cassette Seal Spacer O-ring O-ring O-ring O-ring Ring Description No. !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass Brass No. q w e r t y u i o !0 !1 !2 !

ASP

Model L5 T2 25.6 28.2 25.6 28.2 28.2 32.6 32.6 34.7 13.2 15.2 13.2 15.2 15.2 18.5 18.5 21.7 42.2 44.7 43.9 46.4 51.3 54.1 64.2 66.3 17 18.7 17 18.7 18.7 20.8 20.8 21.8 1/4" 5/16" 1/4" 5/16" 5/16" 3/8" 3/8" 1/2" ASP330F-N01-07S ASP330F-N01-09S ASP430F-N02-07S ASP430F-N02-09S ASP530F-N03-09S ASP530F-N03-11S ASP630F-N04-11S ASP630F-N04-13S 38.6 33.9 11.8 1/2" NPT 1/8 8 14.2 10-32 UNF 35.1 10.5

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

IR1000/2000/3000

B410T B310T B210T t Interface Y40 Y30 Y20 G y Interface with L-bracket (e + t) Y40L Y30L Y20L u Interface with T-bracket (r + t) Y40T Y30T Y20T PPA AL tInterface 97.5 133 172 eL-bracket rT-bracket 135 qAF2000 IR1000 wAFM2000 178 qAF3000 IR2000 wAFM3000 234 qAF4000 IR3000 wAFM4000 Accessory (Option)/Part No.

100

0 t y i !2 !3 !