ZL3-OM00601

. *3: 10 to 500Hz. 2 hours in directions of X, Y and Z respectively (not energized, initial value). *4: 3 times in directions of X, Y and Z respectively (not energized, initial value) ZL6 Model No.

s2 in X, Y, Z directions, 3 times each (De-energized)?

IS1000

0 IS1000 No. q w e r t y u i o !

ZSE20(F)_ISE20

Nil Without lead wire M5 female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 Symbol Operation manual1 Calibration certicate1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2 1 All texts

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

Process Pump

From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

25

From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

Precision Regulator Series IR1000/2000/3000

1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)