Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø1/4" One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø1/4" One-touch Fitting, Straight Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread)

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

2

Example) AC30-F03DM-KSTV-13NR-A r t y w V q Body size 10 20 25 30 40 Symbol Description V w Pipe thread type Nil Metric thread (M5) V Rc V V V V N Note 1) NPT V V V V F Note 2) G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + V e Port size Nil Without auto drain V V V V V C Note 4) N.C.

5-Port Solenoid Valve

X X 3(EB) 1(P) Port size (Metric/One-touch fittings) Symbol P, E port SY3000 SY5000 SY7000 L4 4 V V L6 6 V V V L8 8 V V L10 10 V L12 12 V 1(P) 2(B) (A)4 2(B) (A)4 2(B) (A)4 (A)4 2(B) (A)4 2(B) Connector Connecting Base Port size (Inch/One-touch fittings) Symbol P, E port SY3000 SY5000 SY7000 LN3 5/32" V LN7 1/4" V V LN9 5/16" V LN11 3/8" V D-sub, Flat Ribbon Port size (Metric

Compact Cylinder

P P Rc1/8 P P P P Rc1/8 P P Rc1/4 P P Rc1/4 P P Rc3/8 P P Rc3/8 P P P P Through-hole (Standard) Built-in magnet Pneumatic Air-hydro M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Piping Pipe thread NPT1/8 G1/8 P P P P NPT1/8 G1/8 P P P P NPT1/4 G1/4 P P P P NPT1/4 G1/4 P P P P NPT3/8 G3/8 P P P P NPT3/8 G3/8 P P P P 2.

NCQ2/CQ2

Built-in magnet Pneumatic Air-hydro M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Piping Pipe thread Rod end male thread With rubber bumper P P P P P P P P P P P P Mounting Through-hole (Std.)

Table of Contents

(Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C

V100

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

One-touch Fittings

2 3.2 4 6 8 10 12 16 V V V V V V How to Order P.174 Variations P.175 Dimensions P.176 Metric P.173 2 3.2 4 6 8 10 12 16 V V V V V V V How to Order P.186 Variations P.187 Dimensions P.188 Inch P.185 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V V V V V How to Order P.196 Variations P.197 Dimensions P.198 Inch P.195 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V V V V Gasket Seal (Uni Thread) Connection

Table of Contents

Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

5 Port Solenoid Valve Series SY3000/5000/7000/9000

50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal Closed center Exhaust center 6 V Grommet 4/25/3 (A/BEA/EB) Double 5 V Single { } 3 V SJ P.108 SY3 20 0.65 SY Body ported Base mounted Body ported Base mounted SY5 20 2.4 SV SY7 20 3.3 SYJ SY9 20 SZ 8.6 P

4/5 Port Solenoid Valve

+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 13 Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both

Table of Contents

Rated voltage S L Z For VX21: VVX21-3A-P For VX22: VVX22-3A-P For VX23: VVX23-3A-P Voltage With surge voltage suppressor With light and surge voltage suppressor AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 With light 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V Seal material: PTFE AC How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold

Air Cylinder

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CM3 v CJ2l-lA CG1 V v v v7 10-, 11CG3 v v v v v v v v v v v 25AJMB v v v v v v v v v XB6 MB MB1 v v v v v v v v XB7 CA2 v XB9 CS1 XB13 CS2 v v v v XC3 v v v v v v v XC8 v v v8 XC9 v v v v v v v v v XC10 v v v8 XC11 v v v v v v v v XC22 XC51 XC85 X446 X773 v v X2838 D-X Technical Data 45 A Air Cylinder