AC Servo Motor Driver (CC-Link Type)

Open battery cable warning MR (Note2) Display Name Power Configurator Alarm OFF ON 2TM reset A96 Home position setting error parameter (RES) A98 Software limit warning unit A10 Undervoltage A99 Stroke limit warning A12 Memory error 1 (RAM) A9D CC-Link warning 1 A13 Clock error A9E CC-Link warning 2 Warnings A15 Memory error 2 A9F Battery warning (EEP-ROM) AE0 Excessive regeneration warning A16

AC Servo Motor Driver (CC-Link Type)

Open battery cable warning MR (Note2) Display Name Power Configurator Alarm OFF ON 2TM reset A96 Home position setting error parameter (RES) A98 Software limit warning unit A10 Undervoltage A99 Stroke limit warning A12 Memory error 1 (RAM) A9D CC-Link warning 1 A13 Clock error A9E CC-Link warning 2 Warnings A15 Memory error 2 A9F Battery warning (EEP-ROM) AE0 Excessive regeneration warning A16

Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø80, Bowl Shape: RB (Bowl Bellow), Material: FS (FS61, Fluoro-based Rubber, Green), Connection Thread and Type: A16 (Direct Mounting, Male Thread, M16 x 1.5), Mesh Filter: MF (w/Mesh Filter)

Air Cylinder MGQ Series Compact Guide Cylinder

(Excepltot 612, Q16,42O, d25) _Bnd w'=+$t non-rotating accuracy mounting Mounting: Bottom and side mounting Bottom mounting ffi ,ru,_Jl$t Side mounting rffi tI aP #11t & tg ::, I Compact Guide CYlinder lseries MGQ I a12. a16, a20, s25, a32, s40, a50, s63, a80, s10O 4 compact guide cylinder -f-ol aulo srvitch Cylinder stroke (mm) r Fater to Mode|Standard stokeTabe Model/Standard Stroke Table

Compact Rotary Actuator Series CRQ2

Applicable shaft types: S, W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) Y 3 to 9 3 to10 L4 max Y Y L2 6 (9 Y) to Y 7 (10 Y) to Y L3 max X 2 X 2 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) X 8 to 18 10 to 20 Size 10 15 Size 10 15 Symbol: A14 Symbol: A15 Symbol: A16

ISO Cylinder

Acting, Single Rod Double Acting, Single Rod Double Acting, Double Rod Double Acting, Double Rod Standard Non-rotating Rod Non-rotating Rod Direct Mount Direct Mount C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Symbol: A15 Symbol: A14 Symbol: A13 Symbol: A12 Standard AL MM 30 DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Symbol: A0 Symbol: A1 Symbol: A2 Symbol: A3 Symbol: A4 C DA C0.5 30 RD 30 30 A H H H W1 H L T H Symbol: A8 Symbol: A9 Symbol: A5 Symbol: A6 Symbol: A7 WA C C0.5 file chamfer AL B RD B AL MM AL MM MM DC 30 30 H 30 30 L W H W1 T H H H Symbol: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16

Cylinder with Lock

A1 Symbol: A2 Symbol: A3 DA C0.5 C 30 30 H H W1 T H A H Symbol: A4 Symbol: A5 Symbol: A6 Symbol: A7 RD B RD AL MM AL MM 30 H L 30 30 30 H L W H H Symbol: A8 Symbol: A9 Symbol: A10 Symbol: A11 C0.5 file chamfer AL B MM WA C R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 R sphere C0.5 DA DA AL MM DA C C DA 30 30 30 H A A H H A H W1 T C Symbol: A16

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13 Symbol: A15 Note) Except flange style Symbol: A16

Rotary Actuator

L2 + (3 x P) Q2 = M L2 = [mm] Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 [mm] [mm] Size Q2 30 M3, M4 50 M4, M5, M6 63 M4, M5, M6 80 M4, M5, M6, M8 100 M5, M6, M8, M10 Size d1 30 2.5 50 4 to 7 63 4 to 8 80 6.8 to 11 100 6.8 to 13 Symbol: A15 Note) Except flange type Symbol: A16

Rotary Actuator/Vane Style Series CRB2

Symbol: A16 Applicable to single vane type only Shaft with through-hole Not available for size 10. Minimum machining diameter for d1 is 0.1 mm. A parallel key is used on the long shaft for size 40.

Rotary Actuator/Vane Type

L3 D1 10 6 to 14 X-4.5 L1 + 1.5 3 4 to 14 X-2.5 L1 + 1.5 3 15 7 to 18 X-5.5 L1 + 1.5 3 to 4 4.5 to 18 X-3 L1 + 1.5 3 to 4 20 8 to 20 X-6.5 L1 + 2 3 to 5 5 to 20 X-3.5 L1 + 2 3 to 5 30 10 to 22 X-8 L1 + 3 3 to 6 7 to 22 X-5 L1 + 3 3 to 6 40 8 to 15 Y-5.5 L2 + 5 [L2 + 3] Note) 3 to 6 Note) Values inside [ ] are for the CRBU2. 88 Simple Specials CRB2 Series Double Shaft Symbol: A13 Symbol: A16

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

standard chamfer may not be altered depending on the type of machining required. 20 3 to 5 5 to 10 Y 3.5 L2 + 2 3 to 4 15 4.5 to 18 X-3 L1 + 1.5 D2 = E2 = E4 = C2 = C 30 L3 = X = 3 to 6 7 to 13 Y 5 L2 + 3 3 to 5 20 5 to 20 X-3.5 L1 + 2 CRJ L1 = 40 3 to 6 8 to 15 Y 5.5 L2 + 3 3 to 6 30 7 to 22 X-5 L1 + 3 CRA1 CRQ2 Double Shaft MSQ Symbol: A13 Applicable to single vane type only Symbol: A16

Possible to transfer a workpiece at low-speed.

Applicable shaft types: S, W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) L4 max Y Y L2 6 (9 Y) to Y 7 (10 Y) to Y Y 3 to 9 3 to10 L3 max X 2 X 2 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) X 8 to 18 10 to 20 Size 10 15 Size 10 15 Symbol: A14 Symbol: A15 Symbol: A16

•

. ~ ,DA c Rball 1 \ B ~l , I ~ I H l i Symbot, A16 Symbol,A15 Symbol' A17 Symbol A1S Symbol A 19 .. ~ ~i >If? I ~ A H / ~ M 30' ! " A I H 30' MM .. Symbol A23 -j -j Symbok A21 Symbok A20 Symbol' A22 Symbol, A24 30' I Q " m "~ M , I 30' ~i m " o 0 " '-/! T T A A L : AL : A H , H H H Symbot, A26 Symbok A25 Symbol' A27 ~!'~~~ _ '_ 7) M A =~O=D=A=3 ~!

Process Valve

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T A B C NBR seals FKM seals EPR seals Nil B Note) None With bracket Refer to Table (1) for availability. 2 0 1 A VNA Air operated 15A 2 to 4 External pilot solenoid 2 VNA 1 1 A 15A 1 T CE-compliant Nil Q CE-compliant Note) CE-compliant: For D or DZ only Manual override Rated voltage Valve size Valve type Port size 3 Note

Process Valve

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Threaded port only Thread type Nil F N T Rc G NPT NPTF 2 to 4 2 0 1 A VNB 15A Air operated External pilot solenoid 2 VNB 15A 1 1 1 A T CE-compliant Nil Q CE-compliant Valve size Valve type Port size Rated voltage Electrical entry: D or DZ only Symbol Manual override Orifice dia.

Coolant Valve

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 2 to 4 2 0 1 A VNC 15A (Except valve size 8, 9) Air operated External pilot solenoid 2 VNC 15A 1 1 1 A T CE-compliant Nil Q CE-compliant Note) Electrical entry: D or DZ only Manual override Valve size Valve type Port size Rated voltage Nil: Non-locking push type Nil Air operated Symbol Orifice diameter (mm) Symbol Port size Rc

Steam Valve

Valve size 1: VN1-A16 (with thread) Valve size 2 to 4: VN-16 Valve size Port size Valve type 2 to 4 Port size Rc Orifice dia. (mm) Symbol Symbol Symbol 0 2 4 N.C. N.O.

NCA1

Rod End Shape Symbol: A1 Symbol: A2 Symbol: A3 Symbol: A4 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol: A29 Symbol: A30 41 Series NCA1 Medium Duty