Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

PE 20.3 29.4 P Exhaust part 8.4 17.7 0.8 107.5 Note 1) 10 (3.7) Circuit diagram 5 6 Q N 5 6 Q N Note 1) The above dimensions are for ZQ1 1U2 L-E G -00.

1

C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.

Mechanically Jointed Rodless Cylinder Series MY1

(Except 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 Side port Side port Front port Front port L L L L L L R R R R R R R L L R R R L L Bottom port Bottom port L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port cannot be used.

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Thermo-chiller/Rack Mount Type

or less Ionic state silica (SiO2) [mg/L] 50 or less Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Reference item 6.

•

L ,L (mm) .--tL (mm) Model .

MGP

+q -q 50 MGPS50 0.05 80 MGPS80 0.04 3.17-30 Compact Guide Cylinder Series MGPS Operating Range When Used as Stopper 2000 MGPS80 l @ 50mm l @ 50mm u u 1000 m m Transported object weight m (kg) MGPS50 CL 500 400 MLGC 300 CNA 200 *When requiring a bracket with a longer l dimension select a bore size large enough to accommodate the additional moment.

Rotary Actuator

Size 40 L L 2 K G1 0 0.030 F D B 4 K N V1 Body (B) T V2 M S Body (A) h Key dimensions L1 b C G2 J F h (h9) L1 b (h9) Model L 2 x R A CRB2B;40 4 0 0.030 4 0 20 E 0.030 CRB2B=10-=S CRB2B==-=SE/DE A port B port N W 2 x R 2 x M3 x 0.5 (Depth 4) Size 10 only (for mounting unit) Y X (mm) Q Model A B C D G1 G2 J K L M N P &Q1 E(g7) F(h9)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Terminal name Details 1 L+ +24 V 2 NC N/A 3 L 0 V 4 C/Q IO-Link signal 145 DIN rail mounting adapter LEC-3-D0 * With 2 mounting screws Conversion cable P5062-5 (Cable length: 300 mm) This should be used when a DIN rail mounting adapter is mounted onto a screw mounting type controller afterwards. 300 DIN rail AXT100-DR* For , enter a number from the No. line in the table on page 603-8.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

CZ S X CT CT Y V U FT CD Conveyor lower limit position T R H Stroke 2-Rc P G D A Q Rear pressure port Front pressure port B WB W (width across corners I) E (mm) Bore size (mm) N CD CT CZ D E FT FX FZ G H I L O P Q R B A Stroke 50 30 225.5 103.5 20 8 35.5 32 64 20 73 93 16 122 85 44 9 1/8 10 36 14 depth 5 63 246 106 20 10 44.5 40 77 25 90 114 24 140 103 53 11 1/4 12.5 43 30 18 depth 6 80

Thermo-chiller

Total hardness [mg/L] 200 or less Ammonium ion (NH4+) [mg/L] 0.1 or less Calcium hardness (CaCO3) [mg/L] 150 or less Residual chlorine (Cl) [mg/L] 0.3 or less Ionic state silica (SiO2) [mg/L] 50 or less Free carbon (CO2) [mg/L] 4.0 or less Iron (Fe) [mg/L] 1.0 or less Reference item In the case of [Mcm], it will be 0.003 to 0.01.

V

www.stevenengineering.com I 2.89 SOLENOID VALVES SERIES VQZ BODY PORTED TYPE M A N I F O L D O P T I O N S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 B L A N K P L A T E A S S E M B L Y BLANK PLATE ASSEMBLY VVQZ1000-10A-2 VVQZ2000-10A-2 VVQZ3000-10A-2 USED TO RESERVE A VALVE MOUNTING SPACE ON THE MANIFOLD FOR FUTURE USE M A N I F O L D O P T I O N S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3

24

without load, use a value no more than the values in the table as a guide. + T [N.m] Bore size [mm] Standard stroke [mm] Bore size [mm] Non-rotating accuracy q D25 50 75 100 125 150 175 200 50 0.05 50 15 12 16 15 13 12 11 9.8 -X 80 49 41 51 45 41 38 35 32 80 0.04 479 MGPS Series Model Selection Selection Conditions Vertical Horizontal L L L L m m Mounting orientation m m Maximum speed [mm

Air Cylinder Series MB

x 18 l 4 x 25 l 4 x 35 l CL1 MLGC Note) Cotter pins and flat washers are included.

Digital Flow Switches

Sensor 1 l/min 5 l/min 10 l/min 20 l/min 50 l/min 100 l/min 200 l/min 500 l/min Flow rate range 1 l/min 10 l/min PF2A510 0.5 l/min 10.5 l/min 5 l/min 50 l/min PF2A550 52.5 l/min 2.5 l/min 10 l/min 100 l/min PF2A511 105 l/min 5 l/min 20 l/min 200 l/min 210 l/min 10 l/min PF2A521 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Sensor Flow rate range 0.5 l/min 2

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

At this position, 2 mm at the end (size 25, 32) and 4 mm at the end (size 63). 745 AC Servo Motor Electric Actuator/Guide Rod Type LEYG Series Model Selection LEYG SeriessPage 752 Moment Load Graph Selection conditions Vertical Horizontal L L L m m L Mounting position m m Max. speed [mm/s] SpeedWork Load Graph 200 or less Over 200 Graph (Sliding bearing type) q, w t, y* u, i Graph (Ball bushing

VFR

0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10