Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors. 616 3 Port Pilot Solenoid Valve 10-SYJ500 Construction r w t q y e r w t q y e N.C. N.O.

Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Q Diode LED Coil Timer circuit How to Order Q SYJ 3 T Z 1 2 Black (--) Q 1: Starting current 2: Holding currect Q Applied voltage Q Rated voltage 24V 5 6 24VDC 12VDC 0V Q Standard Specify the same as standard 0.55W Q Power saving type 0.22W 0W Q 62ms Q Q Q Q Q Q Q Q Q Q Q Q Q 20 Q Q Q Q Drawings Series

SY

number L 44 16 8 Terminal no.

Hydraulic

Q: Required fluid volume for extension (l/min) Q: Required fluid volume for retraction (l/min) D: Bore size (cm) d: Piston rod diameter (cm) : Piston speed (mm/s) Q = D __ 4 6 _ 1000 Formula (1) Q = (D d) __ 4 6 _ 1000 ..

REA/REB

RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight

REA/REB

RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight

Electric Actuator/Slider Type

At this position, 2 mm at the end (size 25, 32) and 4 mm at the end (size 63). 81 Electric Actuator/Guide Rod Type Series LEYG Model Selection AC Servo Motor Moment Load Graph Selection conditions Vertical Horizontal L L L m m L Mounting position m m Max. speed [mm/s] SpeedWork Load Graph 200 or less Over 200 Graph (Sliding bearing type) q, w t, y u, i Graph (Ball bushing bearing type) e,

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Table of Contents

supply capacity Q Inlet air temperature35C 300 l/min (ANR) Therefore, corrected outlet air flow rate can be determined.

Air Slide Table

Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

Stability of suction position,

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Table of Contents

4-Z through b Keyway dimension l h Model b (h9) h (h9) l ***!

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

4-Z through b Keyway dimension l h Model b (h9) h (h9) l ***!

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

4-Z through b Keyway dimension l h Model b (h9) h (h9) l ***!

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 A L 12 08 u i e Combination of supply valve and release valve q Body/Exhaust type w Nominal nozzle size Symbol Body Exhaust type Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Supply valve Release valve N.C. Self-holding N.C.

7

Q CAC408 35 32A Flange L 230 VAC E N.O. Conduit terminal M 24 VDC With surge voltage suppressor 8 40A N.C. R CAC408 40 40A Flange N 100 VAC F N.O. P 110 VAC 9 50A N.C. S CAC408 50 50A Flange Q 200 VAC G N.O.

New

P2 + 0.1 When b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t P2 + 0.1 When > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 293 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 273 + t Q: Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are allowed to be described by L (liter). 1 dm3 = 1 L 28 Solenoid Valve Flow-rate Characteristics Series VXN/VX2 C : Sonic conductance

Thermo-chiller

Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon