Digital Flow Switches

Sensor 1 l/min 5 l/min 10 l/min 20 l/min 50 l/min 100 l/min 200 l/min 500 l/min Flow rate range 1 l/min 10 l/min PF2A510 0.5 l/min 10.5 l/min 5 l/min 50 l/min PF2A550 52.5 l/min 2.5 l/min 10 l/min 100 l/min PF2A511 105 l/min 5 l/min 20 l/min 200 l/min 210 l/min 10 l/min PF2A521 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Sensor Flow rate range 0.5 l/min 2

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

At this position, 2 mm at the end (size 25, 32) and 4 mm at the end (size 63). 745 AC Servo Motor Electric Actuator/Guide Rod Type LEYG Series Model Selection LEYG SeriessPage 752 Moment Load Graph Selection conditions Vertical Horizontal L L L m m L Mounting position m m Max. speed [mm/s] SpeedWork Load Graph 200 or less Over 200 Graph (Sliding bearing type) q, w t, y* u, i Graph (Ball bushing

VFR

0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 CY1H10 Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t Nm 4.4 1.37 2.65 13.2 Tightening torque Square nut l t 4.

90

M ZK2 ZS A E A G Supply valve, self-holding type (Linked to release valve) Supply valve only (Single) e Rated voltage r Lead wire entry direction C L LO q w e r t q Rated pressure range and function 5 6 24 VDC 12 VDC For plug-in (Manifold common wiring) L-type plug connector with lead wire (Individual wiring) L-type plug connector, without connector E F V 0 to 101 kPa 100 to 100 kPa 100 to

ZP

a ZQ sl or an l f ea te d ZF id wo pe rk ZP ty su nt ZCU oi rf ac l j AMJ al e s B Misc.

Electric Slide Tables

LES8R/L LESH8R/L LES8D LES16R/L LES16D LESH16R/L LESH16D LES25R/L LES25D LESH25R/L LESH25D M3 x 0.5 0.63 M4 x 0.7 1.5 When a cable duct or flexible moving tube is attached to the actuator, the sliding resistance of the table increases and may lead to operational failure of the product. L M5 x 0.8 3 16.

Proposals for Energy Saving

min or l).]

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type

Air Cylinder

Other mounting methods are the same as the above. 63-2 A Air Cylinder: Standard Type Double Acting, Double Rod RoHS CJ2W Series 6, 10, 16 How to Order A Z 60 16 B CJ2W M9BW B Z 60 16 A L CDJ2W With auto switch With auto switch (Built-in magnet) q w e r t y u i q Mounting e Cylinder standard stroke [mm] w Bore size r Cushion Refer to Standard Strokes on page 65.

New

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to be described by L (liter). 1 dm3 = 1 L 31 Series VXZ C : Sonic conductance [dm3/(sbar)] b : Critical pressure

LVQ

N.C. valve Q E (P) R Sensor (breathing) port Rc 1/8 (NPT 1/8) LQ3 integral fitting 1/8 ( 3, 4) Pilot port Rc 1/8 (NPT 1/8) Pilot port F K A B A B J G L (H) Threaded type Pilot port Rc 1/8 (NPT 1/8) N M C A B D (mm) LVQm0-Zmm Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-Zmm LVQ30-Zmm LVQ40-Zmm LVQ50-Zmm LVQ60-Zmm 25.5 46 31.5 58 33.6 56.5 12 75 21.8 37 5 7 15 53.5 21

F

Note: The dimensions in brackets are for Soft Nylon. 1/2 1/2 KQH13-37S 22.23 30 22 22 9.6 44 P R O D U C T S E L E C T O R M A L E E L B O W : K Q L ( K Q 2 L ) Applicable Thread Model H D1 D2 L1 L2 A M Effective Weight Tube OD R(PT) (Hex) 0rifice (mm2) (g) (mm) Nylon/Urethane 3.2 M5x0.8 KQL23-M5 8 9.6 8 17.5 15 16 15.5 3/2.5 6 3.2 1/8 KQL23-01S 10 9.6 10 17.5 21.5 22.5 15.5 3/2.5 8 3.2 1

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

Air Fittings & Tubing

L M Nylon Urethane M5 X 0.8 Tube O.D.

Booster Regulator/Air Tank

VBAT10S1 CE Certified Product VBAT 10 F A Q SV CE certified product (Self-declaration document attached) Tank internal capacity VBAT20S1 Internal capacity 5 L 10 L 20 L 38 L Symbol 05 10 20 38 Accessories Symbol Accessories Applicable model Safety valve (Set pressure: 1 MPa) Drain valve VBAT20A VBAT38A RV Safety valve (Set pressure: 2 MPa) Drain valve VBAT05A VBAT10A SV Material Symbol A

&snac

c D e w P o i n t : T V 0 e V w i t n i n f t r q T O I l U L l N 0 t e 2 N o t e 3 _ I D G 3 * M , I D G 5 X M t O e e x V , l D G 5 l ( V N / o d e t t O O e l , I D Q E l o . e : k s ( 1 t l i t h A u t o D r a i n r 0 . 9 k s ) 1 .