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AWM AWD EX: How to obtain the mist generating pressure differential if the flow rate obtained in q above is 35m3/min and the line pressure (primary pressure P1) is 0.7MPa : Extend horizontally from the point at which the flow rate is 35m3/min to obtain the point that intersects with P1 = 0.7MPa.

Note 3) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above). 20 For Air Digital Flow Switch Series PFA How to order PFW3 0 0 A Remote Type Display Unit Unit specification Flow rate range Nil M With unit switching function Fixed SI unit Note) 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 1 0

) (Clamp stroke) 10.5 65 40 A 10 0 -0.5 Lock at extended direction 15 3 2 (H) (L) (L) (H) 17 85 (Same measurement on 2 sides) (Same measurement on 2 sides) 3 LOCK 40 600.05 (t=1 x 1, t=0.5 x 2) Depth 15 4 x M10 x 1.5 2 sides x (Same measurement on 2 sides) 40 (when the shims are attached) 40 2 sides x 40 (M10) 400.05 (8) 2 x 8H7 Depth 13 (Same measurement on 2 sides) With shims 47 13 91 P1

(ANR) Orifice 3 (VXA3135 4)P1 0.1MPa Orifice 2.2 (VXA3125 4)P1 0.23MPa Orifice 1.5 (VXA311 5 4)P1 0.55MPa How to Calculate Flow/Air qEquation in the domain of subsonic flow P1+0.1013=(1 to 1.8941)(P2+0.1013) Calculation by Cv factor Q=4073.4Cv gP(P2+0.1013)l/min(ANR) Calculation by effective area Q=226.3S gP(P2+0.1013) l/min(ANR) wEquation in the domain of sonic flow P1+0.1013 1.8941

9.5 VQZ (47.5) 9.9 9.9 3-M5 x 0.8 P, R port VQD Foot bracket VZS 5 1 3 VFS 22.2 Die cast hole For manifold gasket positioning PE port VS VS7 L plug connector (L): VQZ112 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ112 wMwC3, C4, C6, M5 0 1 Cover diameter 1.5 Cross section 0.23mm2 34 <39> 300 (Lead wire length) 76 (Metal seal) <77> 73.5 (Rubber seal) <74.5> 300 82 (Metal seal) <83> 54

Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 48 (22) 51 (25) Body ported 5 port Base mounted (with sub-plate) 4 Port Base Mounted (For manifold) Note 1) 2 position 0.36 0.12 0.46 0.35 0.12 0.46 0.33 0.12 0.47 0.31 0.12 0.47 SYJA340-M5 M5 x 0.8 M3 x 0.5 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54

T Optlonal Nvs 4 Ll 1 4Type of acluallon E = 44" Elecrrical L6ads M = hlerla@ speed conlrol P = Di. quS-inConnecior P1 = Din Top $lh light lnor ailable clas 2-5) P5 = Din w/6ll. prewned cord P6 = Oln Top w^ighi and 6 tt. prewned cord +Fl : sPF0101 Si.gle InlerlEe R9.

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min(ANR)] S: Effective area (mm) P: Pressure drop (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Maintenance Correction for different air temperatures

> Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54

X X LS + Stroke Y Y LX ZZ + Stroke LZ (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I K 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 5 15.5 25 to 300 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 5.5 19.5 25 to 400 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54

Refer to "LECSC2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -26- LEFB25 LEFB25U LEFB32 LEFB32U LEFB40 LEFB40U Lead symbol S Series Lead 54 Parameter *1,*2 Para. Initial value Recommended value No.

(Total Travel) 60 Panel mounting hole VMG 2 x M20 x P1 Hexagon nut thick 6, across flats 27 VR Max. 10 VR51 Symbol (OUT) 2 VHK 10 12 3 (N.C.) 1 (N.O.) VH VHS 3 x 18 4 x 4.5 mounting hole T.T. 7 N F.O.F. VHS 60 Push button (Mushroom) VM430-01-30R/B/G/Y O.T. T.T.

Pmax Vacuum pressure P1 Qmax Q1 How to Read the Time to Reach Vacuum Suction flow rate The graph indicates the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 L sealed tank.

A Graph 1 Graph 2 120 60 110 B 100 50 C P1 63 63 90 80 40 70 Regulator Circuit C Load weight (kg) Load weight (kg) P2 60 30 50 50 A 50 Regulator valve 40 20 40 40 30 B 32 32 20 10 C P1 10 0 0 0.4 0.3 0.3 0.5 0.6 0.7 Operating pressure (MPa) 0.4 0.5 0.6 0.7 Operating pressure (MPa) Selection example Confirmation of allowable kinetic energy Selection conditions: Transfer direction: Vertical

A Graph 1 Graph 2 120 60 110 B 100 50 C P1 63 63 90 80 40 70 Regulator Circuit C Load weight (kg) Load weight (kg) P2 60 30 50 50 A 50 Regulator valve 40 20 40 40 30 B 32 32 20 10 C P1 10 0 0 0.4 0.3 0.3 0.5 0.6 0.7 Operating pressure (MPa) 0.4 0.5 0.6 0.7 Operating pressure (MPa) Selection example Confirmation of allowable kinetic energy Selection conditions: Transfer direction: Vertical

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm] P: Pressure drop rate (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting) 2-3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2-1 (Bleed port) 21 R2 P P1