VFR6000 Series In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 12 VFR6000-OMA0001-B Revision history A Renewal MZ B Safety Instructions PQ 1st printing: AZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation
As AP, SL, AZ, and AK series regulators for process gases are direct acting non-relief type regulators, relief cannot be performed even if the outlet pressure rises above the set pressure. By installing a BP1000 series regulator, the pressure can be kept stable by relieving pressure above the set pressure.
The BP1000 series catalog can be found
https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://smccatalog.partbuilder.smcpneumatics.com/support/faq/en-jp/?ca_id=process-gas-equipment&fa_id=10598
The MGP-AZ is a compact body actuator integrated with internal guide shafts to isolate the load bearing from the movement of the actuator's rod and seals. The air cushions allow the guided cylinder to absorb nearly three times as much kinetic energy as standard rubber bumpers while suppressing noise and vibration at the stroke end.
The MGP-AZ is a compact body actuator integrated with internal guide shafts to isolate the load bearing from the movement of the actuator's rod and seals. The air cushions allow the guided cylinder to absorb nearly three times as much kinetic energy as standard rubber bumpers while suppressing noise and vibration at the stroke end.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
The MGP-AZ is a compact body actuator integrated with internal guide shafts to isolate the load bearing from the movement of the actuator's rod and seals. The air cushions allow the guided cylinder to absorb nearly three times as much kinetic energy as standard rubber bumpers while suppressing noise and vibration at the stroke end.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in manually operated. Cleaned for high purity semiconductor applications; Cleanroom assembled and Helium leaked tested; Valve meets dimensional requirements of SEMI F36-0299, Option 1; User-friendly forged body; Compact and lightweight
Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in air operated.
The MGP-AZ is a compact body actuator integrated with internal guide shafts to isolate the load bearing from the movement of the actuator's rod and seals. The air cushions allow the guided cylinder to absorb nearly three times as much kinetic energy as standard rubber bumpers while suppressing noise and vibration at the stroke end.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Body Size: 40, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 04 (1/2), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: R (Right to Left), Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)