CV/MVGQ

Standard Stroke MVGQ Bore size (mm) Standard stroke Symbol Specifications CC 10 -XA Change of rod end shape 15, 30, 45, 60 16 15, 30, 45, 60 RB If types for more than the strokes indicated in the table above (61 strokes) are required, please ask SMC.

CV/MVGQ

Standard Stroke MVGQ Bore size (mm) Standard stroke Symbol Specifications CC 10 -XA Change of rod end shape 15, 30, 45, 60 16 15, 30, 45, 60 RB If types for more than the strokes indicated in the table above (61 strokes) are required, please ask SMC.

A

1 325 (3.25) 1 1/8 3.9 1/2 0 1.57 1.18 2.76 1 3/8 2.34 2.72 1 1/2 1 1/2 3/8-24 3 3/4 4 1/4 5 53/64 3/4-16 7/8 1/2 1 400 (4) 4.7 1/2 0 1.57 1.18 3.32 2.34 2.72 1 1/8 1 1/2 1 1/2 3/8-24 4 1/2 1 3/8 4 1/4 5 53/64 3/4-16 7/8 1/2 D I M E N S I O N S F O O T M O U N T I N G T Y P E NC A1L + = Stroke addition E Y LF EE MM AA AB AT BA EA ZA AO J S G WF P SA BORE (INCH) KK A AH AL B C D DD F AE XA

CRQ2

Combination of XA is possible for up to 2 types. Combination of -X6 (Shaft, parallel stainless spec) is available with all the types.

A-HEC-OM-J004

Note 4) An appropriate range is from 3 to 5L/min. To prevent damage to the radiating system, do not supply a flow over the maximum flow rate of 8L/min.

AC Servo Motor Driver (Pulse input type/Positioning type ）

PD03] for settings. x x _ _ For manufacturer setting 08h PD11 *DI5L Input device selection 5L Any input device can be assigned to the CN1-19 pin. _ _ x x Position control mode Device selection 03h Refer to table 5.10 in [Pr. PD03] for settings. x x _ _ Speed control mode Device selection 03h Refer to table 5.10 in [Pr. PD03] for settings.

PA3000/5000/PAX1000

Calculation of diaphragm life Example 1) Discharge rate 5l/min, when operating 8h/D (for PAX1000) 5 0.021 238 (cycles/min) = = Cycles per minute Discharge rate Discharge per cycle 1 60 = x x 1 8 (daily operating time) Reference life cycles Cycles per minute Service life 1 60 = 1 8 50,000,000 238 x x 437 days = Example 2) Discharge rate 5l/min, when operating 8h/D (for PA3000 automatically

Metal Seal/Rubber Seal Series VQ Body Ported

VQ2140-5L-C8-A Example) A port, Plug 2-4-64 Body Ported Series VQ0/1000/2000 Plug Lead Unit: Flip Type Manifold Option Double check block (Separated type) VQ2000-FPG- It is used on the outlet side piping.

IZT40/41/42

[mm] Bar length [mm] 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 4H/4L 4 6H/6L 6 8H/8L 8 AH/AL 10 5H/5L 3/16 7H/7L 1/4 9H/9L 5/16 BH/BL 3/8 : With piping on one side : With piping on both sides : Unrecommended piping Symbol High-voltage cable length [m] 1 1 2 2 3 3 The number of high-voltage cable holders differs depending on the high-voltage cable length.

Digital Pressure Switch

Description Part number Remarks Bracket A ZS-38-A1 Mounting screw (M3 x 5L, 2 pcs.) Bracket B ZS-38-A2 Mounting screw (M3 x 5L, 2 pcs.) Bracket C ZS-38-A3 Mounting screw (M3 x 5L, 2 pcs.) Panel mount adapter ZS-27-C Mounting screw (M3 x 8L, 2 pcs.) Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)

CY1

Construction/Dimensions 6, 10, 15 D 4-SS thread depth S (helical insert screw) HL Attached from bottom with CAP bolt XA FH L 4Counter bore dia.

39

XB XC 104.5 50 63 50 45 10 55 46 68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4 138.5 134 92 50 45 10 55 52 78 52 54 11 8 30 32 63.5 71.5 12 3.5 78 151 146.5 17 Series CKZ3T Dimensions Without switch XA (mm) Bore size (mm) XA 50 63 100.5 107.5 Metal cover type Leave sufficient space to open and close the metal cover when operating the manual release.

High Vacuum L Type Valve

-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Rotary Actuator/Vane Type

and XA combinations is available.

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 80, Flange Type: KF (NW), Valve Direction: M (w/o Indicator, Right Flange Surface, Std. Indicator, Right Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen.