Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: None
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: None, End Lock: None
45 -64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.
How to Order Type 41 (5 port / Base mounted) 10-SS5YJ7-4105 01 01 1/8 A, B port size Thread type Stations P port 1/4 Nil F N T Rc G NPT NPTF 02 2 stations Applicable individual EXH spacer assembly SYJ7000-17-2A Applicable individual SUP spacer assembly SYJ7000-16-2A : : 20 20 stations A, B port 1/8 R port 1/4 Note) For more than 8 stations, supply air to both sides of P port and exhaust air
VZ1000-11-1-l EX180-ll SJ3000-53-2A End block assembly 2 For U side Refer to the connector block assembly part no. shown below.
Protrusion COM (Red) 1B COM (Red) 1A Lead wire assembly Unused 2B Unused 2A Terminal no.
B (+) () 1B 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM SOL. A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM 10A 9A 8A 7A 6A 5A 4A 3A 2A 1A (+) () 2A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 2 SOL. B (+) () 2B SOL. A (+) () 3A Station 3 SOL. B (+) 3B () SOL. A (+) 4A () Station 4 SOL. B 4B (+) () SOL. A (+) () 5A Station 5 SOL. B (+) 5B () SOL. A (+) () 6A Station 6 SOL. B 6B (+) () SOL.