SMC Corporation of America
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L n Dimensions 9 288 477 8 263 452 L1 L2 10 313 502 7 238 427 11 338 527 6 213 402 12 363 552 5 188 377 13 388 577 4 163 352 14 413 602 3 138 327 15 438 627 2 113 302 16 463 652 2-5-29 Series VQ4000 Construction Plug-in Unit e q w e q w Metal seal type Rubber seal type (A) 4 (B) 2 42 (A)(B) VQ4101 VQ4100 1 (P) 5 (R1) (R2) 3 1 (P) 5 (R1) (R2) 3 e q w e q w (B) (A) 42 4 (B) 2 (A) VQ4200 VQ4201

specifications. 2-6-39 Series VQ5000 Construction Plug-in Unit Metal seal Rubber seal type e e q w q w VQ5100 VQ5101 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (

SC: 0.3A How to Order Manifold S 03 Q U VV5Q 5 1 Option 08 Series Symbol Nil CD1 CD2 CU1 CU2 K SD SU W Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc 11/2: D side exhaust Exhaust cleaner for Rc 1: U side exhaust Exhaust cleaner for Rc 11/2: U side exhaust Special wiring specifications (Except double wiring) Direct exhaust with silencer box: D side exhaust Direct

Double solenoid SJ3260N-5MOZ-l Connector assembly (for junction common) SJ3000-46-SC Single solenoid SJ3160N-5MOZ-l Connector assembly (for junction common SJ3000-46-DC Common wiring Connector assembly SJ3000-46-S Connector Assembly for Manifolds (for Junction Common) (Example) SS5J3-60-04U 1 set SJ3160N-5MOZ 2 sets SJ3260N-5MOZ 2 sets SJ3000-46-S 1 set (Connector assembly for single solenoid

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

A displayed value can be adjusted within 7% F .S. of the pressure when ex-factory. (ZSE10F (for compound pressure) 3.5% F .S.) Note) When the precision indicator setting function is used, the set pressure value may change 1 digit. 8 Digital Pressure Switch Series ZSE10(F)/ISE10 The Fl in ( ) shows the function code number.

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (5) IN-777-200TF-300F*-HL (6) IN-777-250TF-350F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6

4 w i !7 q y r !3 !2 t o w e !0 !5 !6 25, 32 Option @4 @1 @3 @0 !9 @2 Scraper Stroke adjuster u w !1 !8 (32 only) Description Material Note Component parts Description Material Note No. No.

] 4 Thermo-chiller Series HRS Heating Capacity 012 018 024 A W HRS -10 (Single-phase 100/115 VAC) 1000 1000 Ambient 20C Ambient 32C Heating capacity [W] Heating capacity [W] Heating capacity [W] Heating capacity [W] Ambient 40C Ambient 25C 800 800 Ambient 20C Ambient 25C Ambient 32C Ambient 40C 600 600 400 400 200 200 Ambient 5C Ambient 5C 0 5 10 15 20 25 30 35 40 45 0 5 10 15 20 25 30 35

note6) Max. power 222 Max. power 116 Max. power 126 Max. power 222 Type note7) Non-magnetizing lock specifications Lock unit Holding force [N] 29 59 47 78 157 72 108 216 75 113 245 Power consumption [W] note8) 5 5 2.9 5 Rated voltage [V] 24 VDC10% Check the Speed-Work Load Graph (Guide) in the WEB catalog.

() N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT

Fixed Throttle (No needle function) 4 X250 How to Order AS 2 2 0 1F 01 06 S 1 X250 Option Body size 1 2 M3, M5 standard 1/8, 1/4 standard Nil S None With seal M3 and M5 are not available with seals. Elbow Applicable tubing O.D.

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

(g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

(g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

(g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

(50 ms, 0.5 s, 2 s are selectable) Output protection Short circuit protection Output mode Hysteresis mode, window comparator mode, Accumulated output mode, Accumulated pulse output mode Hysteresis Variable Response time 1.5 s Voltage output Output voltage: 1 to 5 V Output impedance: 1 k Analogue output Output current: 4 to 20 mA Current output Max. load impedance: 600 (24 VDC) Min. load