CG5-S

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10 Formic

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

ribbon cable type 43P VV5Z3 43P 05 C4 Stations 1(P), 3/5(R) port thread type 4(A), 2(B) port size 4(A), 2(B) port 03 3 stations C4 For How to order applicable connector assemblies, refer to page 3-3-7.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P, R, A, B port thread type Clean series Valve stations Rc G NPT NPTF Nil F N T Symbol Station 3 stations : 8 stations 3 stations : 16 stations Note SI unit A B A B 03 A B NPN output (+ COM.) Nil A B Double wiring Note 1) : A, B port M5 x 0.8 A B 8 6 4 2 0 08 03 CE-compliant PNP output ( COM.)

4/5 Port Solenoid Valve

base model no. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 (Example) SS5YJA3-41-03-M5 1 pc.

Modular/F.R.L. Units Series AC

Octagon Port size T-interface C B Center of F.R.L. body D A C D E B A Model Port size Applicable model AC10, AC10B AC20, AC20B, AC20C AC25, AC25B, AC25C, AC30, AC30B, AC30C AC40, AC40B, AC40C Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 M5 x 0.8 12 14 8 19 11 1/8 32 28 19 42 15 1/4 1/8 39 30 19 53 15 1/4 1/4 44 36 24 62 19 Caution on Mounting 3/8

/

-03 VXE2320-03 VXE2230-03 VXE2330-03 VXE2240-03 VXE2340-03 VXE2250-03 VXE2350-03 VXE2260-03 VXE2360-03 VXE2260-04 VXE2360-04 Non-leak/ Medium vacuum 106 Pam3/sec or less Note) 1/8 (6A) Air 300 NBR, FKM 1 cm3/min or less Note) Value for V and M options (Non-leak/Medium vacuum) 470 620 300 470 620 470 620 560 700 560 700 470 620 470 620 470 620 560 700 560 700 560 700 3 0.45 0.33 3.0 4.5 2.3

Modular F.R.L. Units

Applicable model Portsize 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 D B A Model Note) E200-01-A E200-02-A E200-03-A E300-02-A E300-03-A E300-04-A E400-02-A E400-03-A E400-04-A E400-06-A AC20-A 28 23.5 29.8 Center of F.R.L. body B AC25-A, AC30-A 30 30 31.8 D A AC40-A 36 36 31.8 AC40-06-A E500-06-A 44 40 31.8 3/4 Piping adapter Note) in model numbers indicates a thread type.

A

, 63 0~0.003 28 -0.5 ~ -03 3/4 64 50 27 21 RCD-08 56 23 38 71 5/8-18UNF 80 0~0.003 28 -0.5 ~ -03 3/4 50 27 21 RCS-08 21 38 71 5/8-18UNF 80 0~0.003 32 -0.5 ~ -03 7/8 72 55 31 24 RCD-10 64 24 44 79 3/4-16UNF 100 0~0.003 32 -0.5 ~ -03 7/8 55 31 24 RCS-10 21 44 79 3/4-16UNF 100 A C C E S S O R I E S S E R I E S N C Q 2 / C Q 2 D O U B L E R O D C L E V I S P I N A C C E S S O R I E S S E R I

V100

B01 M3 female screw M5 female screw Stations Station 3 2 1 D side U side 02 03 2 stations 3 stations 20 20 stations Note) Maximum of 20 stations Electrical entry 3 1 Grommet/Plug lead C 2 How to Order Valves S070 B 5 B G Body type Electrical entry G C Grommet Plug lead with light/surge voltage suppressor Body type Base mounted with screws Symbol B Power consumption Pressure specification

Table of Contents

54.3 12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1

Air Fittings & Tubing

D1 Port B min. port size Weight (g) a b H (Hex.)

VQ5000

B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

5 Port Solenoid Valve Series SV1000/2000/3000/4000

assembly For A, B port SY9000 58A 02 03 B 2 For P, E port SY9000 58B 03 A 4 Clip Thread type SJ Nil F N T Rc G NPT NPTF SY SV P B B B B Note 1) Be careful to avoid damage or contamination of O-rings, as this can cause air leakage.

Series SV

Sub-plate D-sub Connector EX250 EX120 Circular Connector EX500 Valve Manifold Common Specifications 1/4, 3/8 threaded type port block assembly part numbers For A, B port SY9000 58A 02 03 B 2 For P, E port SY9000 58B 03 A 4 Clip Thread type Rc G NPT NPTF Nil F N T P B B B B Note 1) Be careful to avoid damage or contamination of O-rings, as this can cause air leakage.

A

-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24 41 Y54-04 1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

smcmaintenancepartslist

Contents Bore size (mm) Seal Kit List Description Material Note No. 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR Gasket A NBR Gasket B NBR Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4

Speed Controller with Indicator

, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.