Compact and Lightweight

Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.

Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 4 8 8 10

0.4

How to Order Manifold VV5Q 1 1 08 C6 FU1 CE-compliant Series Nil CE-compliant VQ1000 1 Q Note) For CE-compliant models, DC-type only.

5 Port Solenoid Valve Series VQZ1000/2000/3000

m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry Light/surge voltage suppressor Manual override VQZ1000 2 position

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

4 " 3 8 " 1 2 " 3 16 " 1 4 " 3 8 " 1 2 Inch size Note) Polyurethane only.

VFR

8 02 2 stations 1 2 1 2 U side mounting D U D side mounting 08 1 Side 2 Bottom 8 stations M Mixed Common Common Max: 8 stations For bottom ported: Rc 3/8 only.

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

Fieldbus System

Double wiring Note 1) 08 01 8 stations 1 station Specified layout Note 2) (Available up to 16 solenoids) Note 1) Indicate the sizes on the manifold specification sheet in the case of CM.

CA2

1 !2 !3 !4 !5 !6 !7 !8 !

Series VQ Metal Seal/Rubber Seal Body Ported

How to Order Manifold 1 4 08 N VV5Q C Option Series None 0 1 2 VQ0 VQ1000 VQ2000 D N S DIN rail mounting With name plate Built-in silencer (Direct exhaust) Manifold Note 1) When specifying more than one option, please list alphabetically.

IIIIIII

in Parentheses .Series NVM MECHANICALLY ACTUATED/PI LOT OPERATED DIMENSIONS NVZM4sO NVZil450-N010 ,^. fl cP 1 ll\_/ tl i i M A X P Panel lvlounting 9 F 4.63 lbs. (2.1 Ko) j. l 0 17 in. (4.4 mm) O T 0 08 in. (2.0 mm) 0.25 in (6 4 mm) '75 PSIG (5 Kgf/cmz1 A E (.; u E G H K M N P 5.66 143 9 4.39 r 1 1 4 ) 1 '18 't 28 32 5) ) 0 6 1 s ) 012 (3) 080 204 1 5 4 (39) o 7 1 (18) 1 2 6 (321 1 4 2 (

Mechanical Valves Series NVM, NVFM, NVZNI

in Parentheses .Series NVM MECHANICALLY ACTUATED/PI LOT OPERATED DIMENSIONS NVZM4sO NVZil450-N010 ,^. fl cP 1 ll\_/ tl i i M A X P Panel lvlounting 9 F 4.63 lbs. (2.1 Ko) j. l 0 17 in. (4.4 mm) O T 0 08 in. (2.0 mm) 0.25 in (6 4 mm) '75 PSIG (5 Kgf/cmz1 A E (.; u E G H K M N P 5.66 143 9 4.39 r 1 1 4 ) 1 '18 't 28 32 5) ) 0 6 1 s ) 012 (3) 080 204 1 5 4 (39) o 7 1 (18) 1 2 6 (321 1 4 2

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Note1) Metric size Inch size Note 3) 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Stainless steel type (Stainless steel 303) 04 4 06 6 08 8 10 10 12 12 16 16 Note 1) The material can be visually identified by color of the release button. Stainless steel type: White Note 2) White is also used for inch size.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

KB

KBE1-04 KBE1-06 KBE2-06 KBE2-08 KBE2-10 KBE3-08 KBE3-10 KBE3-12 KBE4-12 15.0 15.5 17.0 15.5 15.5 19.5 31.5 32.0 33.5 35.5 38.0 39.5 41.0 42.0 41.5 14 14 34.5 35.5 37.5 39.0 41.5 43.5 45.0 46.0 44.0 17.9 27.0 26.0 29.5 57.5 51.6 63.0 83.4 66.6 M12 X 1 16.0 4 13.6 17 6 M14 X 1 17.0 17 17.6 M16 X 1 M20 X 1 M16 X 1 M20 X 1 19 24 19 24 18.5 21.0 18.5 21.0 8 10 8 10 22 25.2 18.5 22.0 12 M22 X 1

REC

0 1 1 Carbon tooling steel Nickel plated Aluminum alloy Hard anodized Cylinder tube Retaining ring e !1 2 1 Urethane Aluminum alloy Chromated Piston Bumper r !2 1 1 Resin Hard chromate plated Stainless steel Piston rod Magnet t !3 1 1 Carbon steel Zinc chromated Hexagon socket head screw Bushing Sintered oil-impregnated beaning y !

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

CL

4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 8 11 11 13 16 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 X 1.75 30 35 35 40 40 MXP MG With rod boot e 43 52 52 65 65 Without rod boot H 51 58 58 71 72 Bore (mm) MGP KA LZ M MM N P PG PH PL PW S W K h 59 66 66 80 81 ZZ 223 245 262 305 324 ZZ 215 237 254 296 315 f 11.2 11.2 11.2 12.5 14 l l 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 40 50