1

L X0.02 R T 4-NN through 4-MM depth ML Z WA Section XX C85 MA DB D HA: VB VA X U H RB2725 M36 x 1.5 PW C95 CP95 HA: T -slot for hexagon bolt VB VA 2-P 2-P MT GC GA GB FB FA XAH7 depth XL X0.02 R T NCM DA DB G J K PB (Plug) PA + Stroke H MA U X S Q C + Stroke B + Stroke NCA MC (RA) E+ Stroke A+ Stroke x 2 PW DSlide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM MT

Table of Contents

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

JIS Standard Hydraulic Cylinder

), 1 85 100 90 110 15 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9 Note 2) 85 + 40 15 + 40 100 + 40 90 + 40 110 + 40 n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 60 75 65 85 15 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 60 + 30 D-A9V Note 2) 15 + 30

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

2, !3, !4 t y u i o !0 !1 !2 !3 !4 Collar Snap ring Bushing Oil-impregnated sintered alloy Alloy steel Alloy steel Alloy steel NBR NBR NBR Hexagon socket head cap screw Seal kit includes !2 !3 !4. Order the seal kit, based on each bore size.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

LEC-OM07605CN

(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D

Electric Actuator with Integrated Guide

Matsushita Electric Industrial Co., Ltd. 4-C Yasukawa Electric Corporation M3 x 0.5 6 4 45 C (Thread size) M4 x 0.7 8 2 46 When mounting a coupling on the motor, mount it within the dimensional range shown on the left.

42

at the Number of Manifold Stations (Operated individually) VP4 Model Passage/Stations Station 1 Station 5 Station 10 Station 15 1 4/2 (P A/B) C [dm3/(sbar)] 5.9 5.9 5.9 5.9 b 0.23 0.23 0.23 0.23 Cv 1.5 1.5 1.5 1.5 VQ 1/2 2-position metal seal VQ4 1 250 VQ 4/5 VQ 4/5 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] 6.2 6.2 6.2 6.2 b 0.19 0.19 0.19 0.19 Cv 1.5 1.5 1.5 1.5 VQC 1/2 1 4/2 (P A/B) C [dm3

SX

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

JXCx-OMT0001CN

(14.2) (b) (8) 2 1 (a) (14) (18) B1 A1 (17.7) 6 5 (c) 2 1 A6 B6 15 16 L (11) (30.7) 12.4 [820m] (a) (b) L E C P -* A B-1 2 L A A-1 1 B B-2 6 ) 8 8m B A-2 5 COM-A/COM B-3 3 ) A 10m COM-B/ A-3 4 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 7 ) A A-5 6 () B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B1 A1 5 (17.7) 6 (c) 2 1 (18) A6 B6 (6.3) 16 15 L (11) (30.7) -82No.JXC-OMT0001CN-C

7

4 !4 u u VX2 i i VXK !0 !2 !0 !2 VXD VXD !1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

2/3 Port Valve

(/) VX VNl VQ 4.1-7 VX21/22/23 Dimensions (Orifice size 2mm, 3mm, 4.5mm, 6mm) Energized Open/VX21 0, 22 0, 23 0, Energized Closed/VX21 2, 22 2, 23 2 1 2 3 2 3 4 2 3 4 2 3 4 2 3 4 1 2 3 Option (Bracket) Grommet: G Conduit: C Min. pitch for bracket is H mm.

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

Proposals for Energy Saving

Model VP3145 VPA3145 IN, OUT Port size Rc VP3165 VPA3165 VP3185 VPA3185 1 2 1 1/4 1 1/4 1 1/4 1 1/2 3/8 1/2 3/4 3/4 3/4 Easy conversion to N.C. or N.O.

CA2

n = 4, 8, 12, 16 85 + 40 (n 4) 2 n = 4, 8, 12, 16 90 + 40 (n 4) 2 n = 4, 8, 12, 16 105 + 40 (n 4) 2 95 + 40 (n 4) 2 n = 4, 8, 12, 16 n n = 4, 8, 12, 16 2 (Different sides and same side) 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV n 90 + 30 (n 4) 2 80 + 30 (n 4) 2 n = 4, 8, 12, 16 10 + 30 (n 2) 2 n = 2, 4, 6, 8 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12

CV/MVGQ

n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 Different sides CE2 D-A44 n Same side ML2B 10 20 100 75 80 90 100 100 100 100 100 100 1 Different sides C J G5-S 2 Same side D-A3C D-G39C D-K39C 20 + 35 (n 2) n = 2, 3, 4 100 + 35 (n 2) n = 2

CV/MVGQ

, 8, 12, 16 90 + 55 (n 4) 2 15 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2 (Different sides, Same side) 100 110 120 90 20 n = 2, 4, 6, 8 n = 4, 8, 12, 16 90 + 55 (n 4) 2 20 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

SV

With External Pilot Specifications 46.5 (Pitch) Ground terminal 2-M12 15.8 9.5 16.5 20.5 17.5 P = 16 11.9 9.2 17.7 25.2 30.6 3 3 4 A 4 A 4 A 4 A 4 A 3 3 T 3/5 E PWR 49.9 42.7 4 A 4 A 4 A 4 A 4 A T E 3/5 3/5 E PWR 2 2 E 3/5 63.5 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 1 1 1 P 1 1 P BUS 4632 P 1 1 P BUS 4632 4632 4632 PE PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D

HEC_W-E

HEC006 HEC012 HEC006 HEC012 Model No. label Model No. label Fig.4-1 Position of Model No. label Fig.4-2 Legend of Model No. label 4-2 Unit Overview 4.4 Appearance 4.4.1 HEC006 (C) 4xG D E A B F A B C D E F G HEC006 240 390 497 214 458 482 7 Unit: mm Fig.4-3 Outside drawings of HEC006 4-3 Unit Overview 4.4.2 HEC012 (C) 4xG D E A B F A B C D E F G HEC012 300 448 565 190 526 550 7 Unit: mm Fig