LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1, LQ2 2 LQ1 LQ2 Body class Symbol 2 3 4 5 6 LQ1 LQ2 Applicable fitting Body

AC Servo Motor Driver (Pulse input type/Positioning type ）

When the positioning operation is executed in accordance with the point table or program set by setup software (MR Configurator2TM), the diagnosis display changes to "d-06" during single-step feed. For other control mode, the display does not change to "d-06". Refer to section 3.1.9 for details. The status will be displayed with the "MODE" button.

Base Mounted Metal Seal/Rubber Seal Series VQ

When the blanking plate with connector is mounted, it automatically will be VVQ1000-NC-n with an option symbol [-N] Note) ( ): For VVQ1000-NC-n Dimensions Blanking plug (For One-touch fittings) 23 04 06 08 A L D Model Applicable fittings size d KQ2PKQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 3.2 6 8 10 3.2 4 6 8 31.5 32 35 39 16 16 18 20.5 It is inserted into an unused cylinder port and SUP/EXH ports

Modular F.R.L. Unit

, AC40A-06 AC40B-06, AC40C-06 AC40D-06 40 72 62 62 Note 1) in the model numbers indicates a thread type.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

LEC-OM071xx

When either 0002H or 0003H is selected for the Speed Unit (parameter 41), set the Speed Base Unit (parameter 42) to a number between -3 and 0. 5. When 0004H is selected for the Speed Unit (parameter 41), set the Speed Base Unit (parameter 42) to 0. 8-130 8 MECHATROLINK-III Commands Parameter Name Setting Units Factory Enabled Size Category No.

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

KR

(mm) (1) L D Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

NCG/CG1

42 D-H7NF D-H7C Bore size (mm) Hs 24.5 27 30.5 35 40.5 47.5 A 27.5 27.5 28.5 33 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 26 26 27 30 38 38 A 29 29 30 34.5 42 42 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 Operating Range Bore size (mm) Auto switch model 20 D-C7/C80/C73C/C80C D-B5/B64 50 63 25 32 40 9 10 10 11 8 10 D-B59W

ZP

M10 x 1.5 B 42 ZF (mm) B 42 50 ZPT50H-A14 52 Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

AS

Model Meter-out type Rod and applicable tubing O.D. 4 6 ) ) 8 ) 10 ) Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 ) ) The lock nut provides identification.

0.4

SUP/EXH block SSQ1000-PR-3-C8(-S) SUP block plate SSQ1000-B-P Blanking plug KQ2P-23/04/06/08 Dual flow fitting SSQ1000-52AC8 N9 P.44 P.45 P.46 P.42 P R D side U side Silencer (For EXH port) Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R Port plug VVQZ100-CP C6 L6 P.42 P.44 P.45 P.46 P R D side U side Individual EXH spacer SSQ1000-R-3Back pressure check valve (-B) SSQ1000-BP

5 Port Solenoid Valve Series SV1000/2000/3000/4000

AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details regarding different conditions

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Modular/F.R.L. Units Series AC

F 28 30 36 44 54 E 33 42 44 50 61 D 45 55 58 65 76 C 20 29 39 42 53 B 59 78 107 110 134 AA 34 46 63 67 78 A 40 53 70 75 90 H 45 55 63 69 81 G 22 21 26 Model VHS20 VHS30 VHS40 VHS40-06 VHS50 Caution on Mounting 1.

MB

42 53 53 73 73 90 9 9 10.5 10.5 12.5 12.5 13 MB-B03 MB-B05 MB-B08 MB-B12 Rotating Angle Mounting plate Model without air cushion is designed to include rubber bumpers.