Dual Rod Cylinder Series CXSJ/CXS

side: Same) 3 8 6 22.5 22.5 2 x 2 x M5 x 0.8 thread depth 4.5 (mm) (Piping port) (Opposite side: Same) W Z ZZ SS S Model CXSW6-10 CXSW6-20 CXSW6-30 CXSW6-40 CXSW6-50 (13) (Z) (13) 66 103 46 40 10 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50 Only the CXSW6-10 and the CXSW6-20 have a groove cut out for installing auto switches.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(201.5) 6 0 0.030 11 CRA1BSU63 10 76 17 1/8 20 M20 x 1.5 54.5 19.5 30 13 18 117 19 57 14 60 2.5 41 5 30 186 (230) 6 0 0.030 13 CRA1BSU80 12 92 1/4 20 23.5 M24 x 1.5 62.5 22.5 16 35 22 142 22 70 19 72 3 50 5 40 245 (311) 8 0 0.036 13 CRA1BSU100 12.5 112 25 3/8 25 M24 x 1.5 73.5 28 40 16 22 172 22 85 19 85 4 60 5 45 ( ) are the dimensions for rotation of 180 and 190. 11-7-27 28 Series CRA1U

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(mm) 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry 32 32 40 B5 40 M5 x 0.8 50 50 Pad material N NBR Pad type S Silicon rubber F Ball joint U Urethane rubber F Fluoro rubber GN Conductive NBR GS Conductive silicon rubber 20 and larger are manufactured upon receipt of order.

0.4

Positive COM spec. 576 VQC Series Plug-in Unit Base Mounted T IP67 compliant VQC1000/2000 Series Kit (Terminal block box) VV5QC11 (L4) (L3) (5.25) L2 L1 103 Manual override 7 1 1.5 P = 10.5 28 13 (12) SV (5.5) 1.5 Indicator light D side U side SYJ A B A B A B A B A B A B A SZ 2 93.5 126 80 75 66 (35) VF (59) 4 x M4 mounting hole (40) VP4 n 1 2 3 4 5 6 7 8 2 x M5 mounting hole Stations U

Rotary Actuator/Vane Style Series CRB2

25 14 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 58 Series CRB2 Rotary Actuator Vane Style Dimensions: 40 Single vane type/Double vane type M5 x 0.8 depth 10 CRB2BW40-S/D 3 x M5

Parallel Style Air Gripper Series MHZ

MHC l MHT Model MHZ26 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 Max. screw-in depth ( l mm) Model Applicable bolts Max. tightening torque (Nm) Max. screw-in depth ( l mm) MHY 5 MHZ2-6 Note) M2 x 0.4 0.15 4 MHW 8 MHZ2-10 M3 x 0.5 0.9 6 10 MHZ2-16 4.5 M4 x 0.7 1.6 -X 12 MHZ2-20 3.3 8 M5 x 0.8 13 MHZ2-25 M6 x 1 5.9 10 MRHQ 16 MHZ2-32 M6 x 1 5.9 10 MHZ2-40 13 M8 x 1.25 13.7 MA Note) Except

SQ1000/2000

2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (A, B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 threads L n Formulas: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (maximum 24 stations) Dimensions 24 331.5 349 375 385.5 23 320 337.5 362.5 373 22 308.5 326 350 360.5 21 297 314.5 337.5 348 20 285.5 303 325 335.5 19 274 291.5 312.5 323

CY1

14 20 13 8 15 39.5 76 26 17.5 CY1R15 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 84 18 17 25 16 7 18 54.5 94 32 19 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 1/4 CY1R20 11 62 5.6 5 M4 x 0.7 7 95 17 20 40 19 7 22 64 107 38 20.5 CY1R25 15 70 5.6 6 M5 x 0.8 6.5 105 20 22.5 40 21.5 7 28 72 117 43 21.5 CY1R32 13 76 7 7 M6 x 1 8.5 116 26 28 50 27 7 35 79 130 54 24 CY1R40 15 90 7 8 M6 x 1

Vacuum Pad: Ball Joint Type

Connection 10 40, 50 20 to 32 10 to 16 10 13 13 B5 M5 x 0.8 16 16 B8 M8 x 1.25 Female thread 20 20 B01 Rc 1/8 25 25 N01 NPT 1/8 32 32 T01 NPTF 1/8 40 40 50 50 Material N NBR S Silicone rubber Pad type U Urethane rubber F Ball joint type F FKM GN Conductive NBR GS Conductive silicone rubber Note) Pads are exclusively ball joint type and are not interchangeable with other pads.

24

MGC MGF MGZ MGPM, MGPL, MGPA Common Dimensions [mm] Bore size [mm] Standard stroke [mm] B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P Nil TN TF 12 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 42 29 6 7 6 26 10 7 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 16 46 33 8 7 6 30 10.5 7.5 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 20 20, 30, 40, 50, 75, 100

Air Slide Table

11 13 13 14 Average speed Va (mm/s) Collision speed V (mm/s) 13 13 13 13 18 42 41 42 41 23 31 31 31 31 41 36 19 19 19 19 27 84 75 84 75 84 75 36 47 47 47 47 66 57 Note) Use the average speed when calculating static moment.

Valve Single Unit

(Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (Pilot EXH port) (External pilot port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 3 4 5 3 4 5 L plug connector (L): SX3 40(R)-L-01 M plug connector (M): SX3 40(R)-M-01 Manual override (Press and turn for the locking type.)

Rotary Actuator

4.5 1.5 7 10 0.5 20 13 36 M5 24.5 10.5 50.5 59 22 14 21 11 6 14 (13.5) (7.5) M5 M5 0.005 0.020 0 0.043 50 40 13 22 5 2 8 12 1.0 26 14 43 M5 34.5 14 64 75 24 15.5 25 16.5 8 16 (18) (10) M5 M5 0.005 0.020 0 0.052 63 45 15 30 6.5 4.5 9 20 1.5 31 20 56 M5 39.8 17 79.5 90 30 21 31.6 17.5 10 25 (16) (10) 10 Rotary Actuator Series CRB2 Vane Type Dimensions: 10 Double vane # Following figures show

5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 26 or less 26 or less 18 or less 13 or less 30 or less 30 or less 30 or less 22 or less 13 or less 33 or less 33 or less 33 or less 0.20 0.40 0.20 0.40 0.29 0.38 0.28 0.38 0.41 0.21 0.39 0.21 0.39 0.21 0.33 0.23 0.33 0.28 0.34 0.23 0.34 0.23 0.34 0.19 0.30 0.19 0.30 0.25 0.38 29 or less 34 or less 13 or less 13 or less 40 or less 47 or less 40 or less 47 or less 47

SYJ3000/5000/7000

5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector (WO): SYJ3 40(R)-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5 [115.9] R1 P R2 R1 P R2 R1 P R2 91.9 [96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5

Vacuum Pad

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

Vacuum Pad

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

Vacuum Pad

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.