Process Pump

40 50 5 0 10 15 20 25 Discharge rate (L/min) Discharge rate (L/min) PAF3410 Air Consumption PAF5410 Air Consumption 200 SUP = 0.5 MPa 300 SUP = 0.5 MPa Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 0 10 15 20 25 5 0 20 30 40 50 10 0 Discharge rate (L/min) Discharge rate

Table of Contents

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

Table of Contents

assembly 9 10 19 25 25 19 10 9 Auto switch unit + 2 switches 30 46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

assembly 9 10 19 25 9 10 19 25 Auto switch unit + 2 switches 30 46.5 30 50 60 46.5 30 30 50 60 Angle adjuster 30 203 47 90 150 203 30 47 90 150 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

assembly 9 10 19 25 25 19 10 9 Auto switch unit + 2 switches 30 46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Table of Contents

to 30 5 to 7 11 to 13 14 to 16 20 to 22 VMG Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand Recommended tightening torque (Nm) Nominal size of Uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Table of Contents

BG F 1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature Body size Body size For high pressure 25 30 40 50 60 20 25 30 40 50 60 X430 X440 Low temperature High temperature Thread type Thread type Rc NPT G Rc NPT G Nil N F Nil N F Port size Port size Body size Port size Body size Symbol Port size Symbol 25 30 40 50 60 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04

LJ1H

Limit switch 10 20 30 None B contact specification 2 pcs.

smcmaintenancepartslist

-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS-A0804 MIS8-PS MIS-A1204 MIS12-PS MH-G01 (contents quantity

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Auto Switch Proper Mounting Height [mm] Auto switch model D-B5l D-B64 D-B59W D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-Z7l D-Z80 D-Y59l D-Y7P D-Y7BA D-Y7lW D-M9l D-M9lW D-M9lA D-A9l D-A3l D-G39 D-K39 D-A44 D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-M9lV D-M9lWV D-M9lAV D-A9lV Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs Hs Hs Ht 40 30 30 34 30 31 30 30 30

MXS Series Air Slide Table

F A F Lr 6 6 6 Lr=24mm 0.020 0.04 0.04 0.015 0.03 0.03 Table deflection mm Table deflection mm Table deflection mm MXS6-10 MXS6-20 MXS6-30 MXS6-30 MXS6-20 MXS6-10 MXS6-40 MXS6-50 0.010 0.02 0.02 MXS6-20 MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 0 10 20 30 40 0 0 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 8 8 8 Lr=50mm 0.020

C95

50 (n 2) 75+ 50 (n 2) 75+ 50 (n 2) 80 + 50 (n 2) 80 + 50 (n 2) 85 + 50 (n 2) n (Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 35 + 30 (n 2) 35 + 30 (n 2) 70 + 30 (n 2) 75 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n (Different sides) n = 2, 4, 6, 8 n = 2,

CNA

(n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30

CNA

(n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30

Brake mechanism added

30 30 30.5 30 38 72.5 80.5 40 31 38.5 31 73 69 81 69 30 32 30 35 30 34 34 34 35 34 43.5 78 86 43.5 35 42.5 35 78.5 77 86.5 77 34 36.5 34 39 34 41 41 41 42.5 41 50.5 85 93 49 42 48 42 85.5 91 93.5 91 41 43.5 41 46 41 49.5 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 107 49 51.5 49 54 49 57 58.5 56 59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and

Applicable Auto Switch Model

(Tolerance 30%) Dimensions Bore size (mm) Z Auto switch part number H H' HW C T T' D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 40 50 63 80 100 57 58 60.5 64 67 69 77 91 107 121 44 52 64 78 92 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 6.5 6.5 7.5 9.5 9.5 M5 X 0.8 X 16 M5 X 0.8 X 20 M5 X 0.8 X 25 5.3-38 Solid State Switch/Direct Mounting

Compact Guide Cylinder

The MGPKFM16-30 should be selected.

XM, XY

temperature XLA16A-30-1H XLA25A-30-1H XLA40A-30-1H XLA50A-30-1H XLA63A-30-1H XLA80A-30-1H XMC XYC General use XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1 XLC63-30-1 XLC80-30-1 High temperature XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H XLC63-30-1H XLC80-30-1H XMD XYD XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD63-30-1 XLD80-30-1 General use : Standard High temperature XLD25-30-1H XLD40-30-1H

Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377