High Vacuum Angle Valve -30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1
46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).
30 31 30 34 30 30 38 37 71.5 81.5 38.5 38 73 69 81 69 30 30 31.5 31.5 30 30 42.5 33 34 34 38 34 34 42 42 76.5 86.5 42 42 78.5 77 86.5 77 34 34 35.5 35.5 34 34 46.5 37.5 41.5 41 41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5
500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work
4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).
Mass m X-axis Y-axis Z-axis 20 Z W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.
C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications
A3 A4 A5 30 30 30 D D D d d 30 30 Width across flats F Width across flats F F H H H Note) Female thread effective depth should be no more than twice the thread diameter. Note) Male thread effective length should be no more than 100 mm. A6 A7 Note 1) Dimensions indicated with an asterisk () in the patterns A1, A3, A4 and A5 are provided in the table below.
, 45, 60 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CG3 JMB : Manufacture of intermediate strokes in 1 mm increments is possible.
179 3.3 5 48.5 48.5 56 57 68 69 80 81 87 111 129 141 M5 x 0.8 12.5 23.5 T-bracket Dimensions ZZ Bore size (mm) Bore size (mm) 10 16 TX TC TH TV TW TY 126 to 150 st 193 10 16 5 to 15 st 95.5 100.5 16 to 30 st 103 109 31 to 45 st 115 121 46 to 60 st 127 133 61 to 75 st 139 76 to 100 st 163 101 to 125 st 181 4.5 5.5 29 35 40 48 22 28 32 38 12 16 6-3-30 31 31 Series CJ2 Air Cylinder:
201 241 OUT 402 281 MXS 8 10, 20, 30, 40, 50, 75 16 8 MGG 60 91 121 151 181 211 IN 302 MXS12 10, 20, 30, 40, 50, 75, 100 OUT 628 126 188 251 314 377 440 20 10 MXS16 MGC 10, 20, 30, 40, 50, 75, 100, 125 IN 471 94 141 188 236 283 330 MXS20 10, 20, 30, 40, 50, 75, 100, 125, 150 OUT 982 196 295 393 491 589 687 25 12 MGF MXS25 10, 20, 30, 40, 50, 75, 100, 125, 150 IN 756 151 227 302 378 454 529
20, 30, 40, 50 MXS6 119 102 85 68 51 34 170 281 241 201 161 121 80 OUT IN 402 10, 20, 30, 40, 50, 75 MXS8 16 8 211 181 151 121 91 60 302 628 10, 20, 30, 40, 50, 75, 100 MXS12 OUT IN 440 377 314 251 188 126 10, 20, 30, 40, 50, 75, 100, 125 MXS16 20 10 471 330 283 236 188 141 94 10, 20, 30, 40, 50, 75, 100, 125, 150 MXS20 982 OUT IN 687 589 491 393 295 196 25 10, 20, 30, 40, 50, 75, 100, 125
B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 Part no.
None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use
-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS-A0804 MIS8-PS MIS-A1204 MIS12-PS MH-G01 (contents quantity
LES8-30 0.002 0.02 0.10 LES8-50/75 LES8-50 LES8-50 0.001 0.05 0.01 LES8-30 0 10 20 30 0.00 0 10 20 30 0.000 0.00 0 5 10 15 Load [N] Load [N] Load [N] LES16 LES16 LES16 Lr = 60 mm 0.10 0.40 0.012 LES16-100 LES16-30 LES16-100 0.08 0.30 LES16-75 0.008 LES16-50 0.06 LES16-75 0.20 LES16-50 0.04 LES16-50 0.004 LES16-30 0.10 LES16-75/100 0.02 LES16-30 0.00 0 10 20 30 40 0.00 0 10 20 30 40 0.000
Auto Switch Proper Mounting Height [mm] Auto switch model D-B5l D-B64 D-B59W D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-Z7l D-Z80 D-Y59l D-Y7P D-Y7BA D-Y7lW D-M9l D-M9lW D-M9lA D-A9l D-A3l D-G39 D-K39 D-A44 D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-M9lV D-M9lWV D-M9lAV D-A9lV Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs Hs Hs Ht 40 30 30 34 30 31 30 30 30
(assuming approximately 30% dispersion.)
, 45, 60 6 10 16 3.72 1.77 10 15, 30, 45, 60 CS1 6.86 3.53 Precautions 16 15, 30, 45, 60, 75, 100, 125, 150 14.2 6.86 Minimum Strokes for Auto Switch Mounting Be sure to read before handling.
D 30 6 30 M9BW CDU With auto switch D Made to order Built-in magnet Refer to page 484 for the Made to Order specifications.