Series: 1 (VFA1000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 05, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Passage: 30 (Common SUP, Common EXH), Stations: 2 Stations, Component: 1 (Common EXH), Thread: 00N (NPT)

Passage: 30 (Common SUP, Common EXH), Stations: 5 Stations, Component: 1 (Common EXH), Thread: 00N (NPT)

Passage: 30 (Common SUP, Common EXH), Stations: 4 Stations, Component: 1 (Common EXH), Thread: 00N (NPT)

Passage: 30 (Common SUP, Common EXH), Stations: 3 Stations, Component: 1 (Common EXH), Thread: 00N (NPT)

Air Cylinder Series CA2

30 30 30 30 34 30 31 31.5 31.5 30 30 37 71.5 81.5 38.5 38 73 69 81 69 37.5 46.5 34 34 34 34 34 38 34 35 35.5 35.5 34 34 42 76.5 86.5 42 42 78.5 77 86.5 77 43 52 41 41 41 41 41 44 41 41.5 43 43 41 41 49 83.5 93.5 46.5 47 85.5 91 93.5 91 51.5 58.5 49 49.5 49 49.5 49 52.5 49 50 51 51 49.5 49 57.5 92 102 53.5 53.5 94 107 102 107 58.5 66 55.5 57.5 55.5 56.5 56 61 56 58.5 57.5 57.5 56.5 56 68

A_HEC-OM-K001

ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data. Host SOH UT ENQ 32H Check sum CR (H) (L) Chemical Thermo-con SOH UT STX 32H Internal sensor temp.

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: (1) 8 A or less (including shorts), and (2) When controlled by a circuit protector (fuse, etc.) with the following rating Max. current rating No-load voltage (V peak) 5.0 0 to 20 [V] 100 Over 20 [V] to 30 [V] Peak voltage value 2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply

NCG/CG1

LS + Stroke ZZ + Stroke 30 8.5 54.5 4 16.5 54 71 40 11 70.5 5 22 66 86 45 13 82.5 5 22 82 106 55 14 101 5 28.5 Rod side flange style: CG1FQ 100 125 65 16 121 7 30 120 150 Other dimensions are the same as basic style.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

LS + Stroke ZZ + Stroke CJ1 82.5 45 5 22 13 82 106 101 55 5 28.5 14 100 125 121 65 7 30 16 120 150 CJP Other dimensions are the same as basic style.

A_HEC-OM-J017

) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

Cylinder with Lock

: A12 Symbol: A13 Symbol: A14 Symbol: A15 R sphere C0.5 DA DA AL MM DA C C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 46 CP96N/C96N Series Symbol Change of Rod End Shape 1 -XA0 to XA30 Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol

Table of Contents

or less 40 or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

Vacuum Unit

details Page 30 Port Layout System depends on vacuum source (vacuum pump/ejector).

MNB

(Assuming approximately 30% dispersion.)

MNB

(Assuming approximately 30% dispersion.)

Refrigerated Air Dryers Series IDF/IDU

, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 (mm) Dimensions 30 mA B D C A E F Model 10 A IDF22E-20 IDF37E-20 IDF22E-30 IDF37E-30 IDF55E-30 IDF75E-30 IDU22E-30 IDU37E-30 IDU55E-30 IDU75E-30 200 V type 59 40 46 25 125 IDF75E-30, IDU75E-30 IDF120D IDF150D IDF190D IDF240D IDF370B 15 A 39 60 30 A 60 81 148 45 A 36 50 73 133 60 A 74 151 75 A 46 122 146 50 80 A 60 60 55 148 36 73 166

5 Port Solenoid Valve

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

MNB

14 102 73 64 45 86 30 111 12.5 11 10 65 359 14 22 + 0.084 0 22 MB-B08 80, 100 55 30 175 116 73 64 45 86 30 111 12.5 11 10 65 379 + 0.084 0 14 22 22 10 Series MNB Dimensions of Accessories Dimensions of Accessories Knuckle joint pin Clevis pin Rod end nut (standard equipment) 30 d Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.