Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 147 147 149 152 152 153 153 154 155 158 158 159 160 161 166 166 170 174 174 175 175 175 176 177 178 179 180 181 181 182 183 184 184 -X10: Both Sides Angle Adjustable Type. -X11: One Side Angle Adjustable, One Side Cushion Type .

7

9 G VXD2 50A 32 77.5 69.5 40 180 57.5 24.5 59 155 14 120 52 ( ): Denotes the Normally Open (N.O.) dimensions. 153 For Heated water/High temperature oil VXD Series 7 E 8 F 9 G Dimensions/VXD2 /2 /2 Body Material: CAC408 Conduit terminal (U2) E C (V2) 32 T B 25 G1/2 R A IN OUT N SMC F D Q 8 x 18 S Conduit U E 280 C (42) 45 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier

Proposals for Energy Saving

42 52 10 14 14 18 18 18 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 to 1000 to 1000 to 1000 39 42 52 208 228 254 10 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Non-rotating Double Power Cylinder Series MGZ Dimensions with Mounting Brackets Transaxial foot type (L) 4LD through LT LH LY Actuators X/2 X X Y ZZ + Stroke LS + Stroke LZ LX (mm) Stroke range Bore size (mm)

Free Mount Cylinder Series CU

(g) Stroke (mm) CQS Model 5 10 15 34 (44) 55 (65) 81 (111) 153 (193) 271 (330) 422 (500) 28 (33) 43 (48) 60 (85) 113 (147) 212 (266) 331 (404) 31 (41) 47 (57) 66 (90) 124 (164) 229 (288) 357 (435) S T S T S T S T S T S T C(D)UK6CQ2 C(D)UK10RQ C(D)UK16CQM C(D)UK20MU C(D)UK25C(D)UK32For the auto switch mass, refer to page 1263.

CXS

+ ST 6.7 5 + ST 12 0.3 31.4 4-M1.6 x 0.35 x 6 16 2-M3 x 0.5 with depth 3 (Piping port) OUT IN Steel balls ST 5 + ST 9 + ST 32 + ST 42 + ST (49 + ST) Part no.

Base Mounted Metal Seal/Rubber Seal Series VQ

mA), 1.5 W DC (63 mA) (3), 0.5 W DC (21 mA) (4) VQ5 24 VDC 3 position pressure center 1 W DC (83 mA), 1.5 W DC (125 mA) (3), 0.5 W DC (42 mA) (4) 12 VDC VQZ Power consumption (Current) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Inrush 1.3 VA (12 mA), Holding 1.3 VA (12 mA) 110 VAC VQD Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC Inrush 2.6 VA (12 mA), Holding 2.6 VA (

Compressed Air Cleaning Filter Series

136 Drain cock: Black 4.5 34 160 10 one-touch fitting Option J: Drain guide 1/4 female threaded 160 150 85 20 15 40 11 (Accessory) Bracket 32 IN OUT 20 253 334 1/4 female threaded 311 20 Drain 10 M5 Maintenance space 8 Series AMG Dimensions AMG850 Auto drain D: With auto drain (N.O.) for AMG850 220 110 6 18 184 220 23 3/8 female threaded (Accessory) Bracket 220 180 24 120 15 30 348 464 13 42

Dual Rod Cylinder Series CXSJ/CXS

Dimensions/Mass CXS Reverse Height (CXS) CXSJ Height (CXSJ) Width (CXSJ) Full length (CXSJ) Full length (CXS) Width (CXS) Symmetric mounting Note) Dimensions (mm) Bore size (mm) Series Height Width Full length Mass (kg) CXSJ6 0.057 13.4 32 42 + Stroke 6 CXS6 0.095 16 37 58.5 + Stroke CXSJ10 0.114 15 42 56 + Stroke 10 CXS10 Reverse mounting mechanism 0.170 17 46 72 + Stroke CXSJ15 0.219 Reversible

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 U 114 136 165 190 N 15 17 20 25 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 H 39 45 55 60 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 H 30 33 43 44 N 15 17 20 25 U 105 124 153 174 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 N 15 17 20 25 U 114 136 165 190 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 N 15 17 20 25 U 105 124 153 174 H 39 45 55 60 H 30 33 43 44 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

2/3 Port Valve

Teflon is a registered trademark of DuPont. 4.2-42

Process Valve Series VNA

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 75 125.5 52 63 72.5 80.5 80 84.5 124 144.5 26 24.3 2.3 55 42 4.5 25 28 34 14 60.5 73 1 84 100 92 108 135.5 137 153 156 172 84 90 62 72 80 90 89 95 93.5 99.5 31 36 28.3 33.3 2.3 2.3 50 60 5.5 6.5 30 35 35 40 43 49 17.5 20 151.5 Port

ZP

M10 x 1.5 B 42 ZF (mm) B 42 50 ZPT50H-A14 52 Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

Guide Cylinder/Compact Type Series MGC

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Mounting and Adjustment Warning Caution 1. Installing a protective cover (In the case of rear plate) During mounting, handling and operation, the rear plate makes reciprocating movements.

Air Cylinder Series MB

42 53 53 73 73 90 9 9 10.5 10.5 12.5 12.5 13 MB-B03 MB-B05 MB-B08 MB-B12 Rotating angle Mounting plate Model without air cushion is designed to include rubber bumpers.

CM2

x 2 22 8 46.5 42.5 21.5 0 0.039 32 With Rod Boot h Symbol P RR S U Z ZZ Bore size (mm) B3 f e Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 9 62 11.5 115 124 1/8 20 17 36 30 68 81 93 106 131 156 181 25 9 62 11.5 119 128 1/8 25 17 36 32 72 85 97 110 135 160 185 32 12 64 14.5 124 136 1/8 32 17 36 32 72 85 97 110 135 160 185 40 12 88 14.5 153

3 Port Solenoid Valve Series VQ100 1

175 185.5 132 143 163 187.5 198 142 153 173 200 210.5 152 163 183 212.5 223 162 173 193 212.5 223 172 183 203 225 235.5 182 193 213 237.5 248 192 203 223 250 260.5 202 213 233 262.5 273 212 223 243 262.5 273 4-12-13 14 Series VQ100 How to Order Manifold How to Order Manifold Assembly Specify the part numbers for valves and options together beneath the manifold base part number.

Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

3 Port Solenoid Valve Series VQ100

175 185.5 132 143 163 187.5 198 142 153 173 200 210.5 152 163 183 212.5 223 162 173 193 212.5 223 172 183 203 225 235.5 182 193 213 237.5 248 192 203 223 250 260.5 202 213 233 262.5 273 212 223 243 262.5 273 4-12-13 Series VQ100 How to Order Manifold How to Order Manifold Assembly Specify the part numbers for valves and options together beneath the manifold base part number.

3 Port Solenoid Valve Series VQ100 1

175 185.5 132 143 163 187.5 198 142 153 173 200 210.5 152 163 183 212.5 223 162 173 193 212.5 223 172 183 203 225 235.5 182 193 213 237.5 248 192 203 223 250 260.5 202 213 233 262.5 273 212 223 243 262.5 273 4-12-13 14 Series VQ100 How to Order Manifold How to Order Manifold Assembly Specify the part numbers for valves and options together beneath the manifold base part number.