High Vacuum Angle Valve

Dimensions XLA-100/160-X152: Air operated (b) C E D E C E Fn (KF flange) Fd (K flange) (a) Heater (Option) (c) H [mm] B A Model A B C D E1 Fn Fd G H XLA-100-X152 108 300 154 3 11 134 130 102 131 XLA-160-X152 138 315 200 3 11 190 180 153 112 1 The E dimension applies when the heater option is included.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

66 104 128 224 35 89 19 40 145 23 400 st or more 100 100 100 350 to 1300 410 131 66 128 143 262 40 110 19 40 145 23 500 st or more 8-21-25 25 Guide Cylinder With End Lock Series MGG 20, 25, 32, 40, 50, 63, 80, 100 How to Order MGG L B H N 32 100 H7BW Number of auto switches Bearing type Nil S n 2 pcs. 1 pc. n pcs.

Made to Order

[mm] Bore size Stroke range Without magnet for auto switch Built-in magnet for auto switch CD CT CU CW CX CY CZ D E F J A B A B XC26A XC26B XC26C 32 50 or less 121 33 131 43 10 5 14 20 12.5 52.5 36 16 45 7.5 4.5 75, 100 131 43 40 50 or less 129.5 39.5 139.5 49.5 10 6 14 22 16.5 19.5 12.5 52.5 36 16 52 7.5 5 75, 100 139.5 49.5 50 50 or less 157.5 40.5 167.5 50.5 14 7 20 28 16.5 19.5 12.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Applicable cable O.D. 3.5 to 7 131 Base Mounted 10-SY9000 Type 43 C9, N9 C10, N11 C12 02, 03, [ ]: AC 10-SY9000: 10-SS5Y9-43Stations U (-D) Grommet (G) When P, R port outlets are indicated on the U side, the P, R ports on the opposite side are plugged. Directional Control Valves Air Grippers Modular F. R.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

(Refer to page 131 for the clear method). Output ON/OFF counter clear 7 1: Could be incorrectly recognized as short circuit depending on used load (ex.: lamp load).

LEKF-OMZ0035

255 131 197 385 220 330 660 Power [W] at20 5.5 6 6 Power supply voltage [V] 24VDC(0/-10%) Note1) For details, refer to "Speed-Work Load Graph (Guide)" on catalog.

Table of Contents

Series MHC2-6/MHCA2-6 Angular Style Air Gripper Standard Type 128 129 129 131 132 137 138 139 139 140 141 147 152 153 154 155 157 157 158 158 161 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 164 164 165 165 169 174 174 174 175 179 181 181 182 183 189 196 196 197

MGG

66 104 128 224 35 89 19 40 145 23 400mm or more 350 to 1300 410 131 66 128 143 262 40 110 19 40 145 23 500mm or more 20 Guide Cylinder/End Lock Type 20, 25, 32, 40, 50, 63, 80, 100 Series MGG How to Order MGG L B H N 32 100 C73 Guide cylinder Number of auto switches 2 pcs. 1 pc.

VFR

Bottom ported: VV5FR2-01 Station 2Port size FD1 FU1 C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) For wiring specifications, refer to page 3-5-8. n: Stations Stations L L1 L2 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 3-5-21 22 Series VFR2000 Non

VQZ1000/2000/3000

rubber seal) 69.5 (Single metal seal) 95 (Double) 46 (For M5) 10.5 (For C3, C4, C6) 300 103.5 (3 position) 300 (Lead wire length) Cover diameter 1.6 Cross section 0.34 mm2 1 P (20) 13 R1 5 R2 3 PE port 8.5 16.5 16.5 4-Rc 1/8 3(R2), 5(R1) port 2-Rc 1/8 1(P) port (23.5) 47 L plug connector (L) M plug connector (M) 119 (3 position) (Lead wire length) 110 (Double) 300 (Lead wire length) 131

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

141.5 196 25 34.5 89 128 169 196 20 21 62 89 153 46 149 42 50 50 144.5 156 199 25 29.5 41 84 131 152 172 199 20 16 37 57 84 63 63 Note) Intermediate strokes other than standard strokes are produced by installing spacers. 5

Guide Cylinder Series MGG

66 104 128 224 35 89 19 40 145 23 400mm or more 350 to 1300 410 131 66 128 143 262 40 110 19 40 145 23 500mm or more 20

Table of Contents

Series ISG General Purpose Pressure Switch . 88 88 89 90 90 90 91 92 95 95 96 96 96 97 98 98 99 101 103 105 108 108 109 110 111 114 116 116 117 117 118 118 119 120 122 123 123 124 125 127 130 131 131 131 133 134 135 137 137 138 139 140 144 146 152 155 155 156 157 157 158 159 159 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

ZP

fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 26 27 24 22 22 24 26 27 22 10 to 16 10 ZPT 29 30 26 25 27 29 30 25 27 30 31 26 10 ZPT 20 25 31 33 29 27 30 32 33 28 31 34 35 30 ZPT 32 40 50 ZPT ZPT 10 33 34 57 129 135 132 138 133 139 30 129 131

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 5 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: T (NPTF)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 12 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: T (NPTF)

Series: 5 (VP500), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 12 Stations, Symbol: 3, Port Size: 03 (3/8), Thread Type: T (NPTF)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 20 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: T (NPTF)

Series: 5 (VP500), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 20 Stations, Symbol: 3, Port Size: 03 (3/8), Thread Type: T (NPTF)

Series: 5 (VP500), Exhaust Type: 42 (Individual Exhaust), Pilot Type: R (External Pilot), Stations: 3 Stations, Symbol: 3, Port Size: 03 (3/8), Thread Type: T (NPTF)