Compact Cylinder with Air Cushion

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 2 Series RQ Weights Basic weights Additional weights Unit: g Unit: g Bore size (mm) Magnet Double end tapped Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 40 13 6 27 17 155 214 198 196 20 5 6 4 159 143 137 92 50 14 6 53 32 243 373 348 393

CJ5-S

NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16

RQ

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 7-7-5 5 Series RQ Weight Basic Weight Additional Weight (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196 50 14 6 53 32 243 373 348 393

Modular F.R.L. Unit

ES100-42) for detailed information and specifications on the digital pressure switch.

Compact Cylinder with Air Cushion Series RQ

Double clevis: Clevis pins, type C retaining ring for axis, and Body mounting bolts. 63 D80 -X 100 Individual -X Technical data 775 Series RQ Mass Basic Mass Additional Mass (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196

3 Port Solenoid Valve Series VQ100 1

mA) 24 VDC 1 W (42 mA) 0.7 W (29 mA) (3) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 W (83 mA) 12 VDC 1 W (83 mA) 0.7 W (58 mA) (3) Power consumption (Current) 0.6 VA (6 mA) 100 VAC 0.5 VA (5 mA) 0.65 VA (5.9 mA) 110 VAC 0.55 VA (5 mA) 1.2 VA (6 mA) 200

3 Port Solenoid Valve Series VQ100

Manual override VP Unrestricted Mounting orientation Shock/Vibration resistance (4) 150/30 m/s2 VG Dustproof Enclosure 12.6 g (L/M plug connector, Without sub-plate) Weight VP JIS Symbol Normally closed 24 V, 12 V Coil rated voltage DC S070 10% of rated voltage Allowable voltage fluctuation (A) 2 Class B or equivalent Coil insulation type VQ Power consumption (Current) 0.5 W (21 mA) 1 W (42

3 Port Solenoid Valve Series VQ100 1

Manual override VP Unrestricted Mounting orientation Shock/Vibration resistance (4) 150/30 m/s2 VG Dustproof Enclosure 12.6 g (L/M plug connector, Without sub-plate) Weight VP JIS Symbol Normally closed 24 V, 12 V Coil rated voltage DC S070 10% of rated voltage Allowable voltage fluctuation (A) 2 Class B or equivalent Coil insulation type VQ Power consumption (Current) 0.5 W (21 mA) 1 W (42

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Max. 3.5 6 x Rc 3/8 6 x Rc 3/8 6 x Rc 3/8 3 position (229) 3 position (229) 3 position (193) Double (219) Single (143) Double (219) Double (182) Single (143.5) Single (125) (With light/surge voltage suppressor: 91.5) (With light/surge voltage suppressor: 108.5 (110.5)) (With light/surge voltage suppressor: 96) (With light/surge voltage suppressor: 101) (With light/surge voltage suppressor

Modular/F.R.L. Units Series AC

F 28 30 36 44 54 E 33 42 44 50 61 D 45 55 58 65 76 C 20 29 39 42 53 B 59 78 107 110 134 AA 34 46 63 67 78 A 40 53 70 75 90 H 45 55 63 69 81 G 22 21 26 Model VHS20 VHS30 VHS40 VHS40-06 VHS50 Caution on Mounting 1.

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42

smcmaintenancepartslist

Contents Bore size (mm) 40 50 63 80 100 MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS #9 $0 41 Piston seal NBR Rod seal A NBR Set of left nos. #9, $0, $3, $5 Rod seal B NBR 42 $3 44 $5 46 Release piston seal NBR 41, 42, 44 and 46 to 49 are non-replaceable parts, so they are not included in the seal kit.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 15 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Terminal Block Box Kit) T 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R1 5 R2 3 P 1 SMC 6-3/4 Ports P (SUP), R (EXH) 2-G3/4 Conduit port 144.5 143 112.5 83.5 179 46.8 59.2 106 9 9 U side 55.5 M5 ground screw 19 34.5 34 n 12 X 2n-3

Hygienic Design Cylinder Series HY

Note 3) For piping, refer to Specific Product Precautions. 882 Hygienic Design Cylinder Series HY Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height HYB D-H7BA 16 16 SMC SMC SMC SMC Hs B 29 A B Hs 29 A 20, 25 32 to 63 D-G5BA 24.5 A 33 B Hs 80, 100 (mm) D-H7BA D-G5BA A Bore size B Hs A B Hs 20 25 32 40 50 63 80 100 29 29 30 34.5 42 42 19.5 19.5 20.5 22.5

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

16 16 226 200 326 300 30 32 M14 x 2 depth 30 280 Long Stroke Bracket Mounting Stroke Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q Y R 63 63 63 350 to 1100 308 107 54 86 108 192 30 72 14 29 119 16 300 st or more 80 80 80 350 to 1200 355 131 66 104 128 224 35 89 19 40 145 23 400 st or more 100 100 100 350 to 1300 410 131 66 128 143

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

VQ5000

mA), 0.5 W DC (21 mA) (3) 24 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Note (3) 12 VDC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Power consumption (Current) 3 position pressure center 2 position double (Metal) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42