MK

40 50 63 10 20 50 70 100 250 280 500 595 87 123 290 320 525 640 1100 1520 1350 1805 Availability of Body Options Additional Weight 12 Unit: g 16 20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm 13 32 100 100 200 200 350 350 Rear flange 133

JIS Standard Hydraulic Cylinder

15 40 19 11 43 35 1/2 46 155 13 14 50 8 58 37 35 15 220 225 55 52 15 15 25 to 1400 63 M12 x 1.5 90 98 63 15 42 19 14 43 35 1/2 52 163 15 18 60 10 65 45 42 18 240 247 65 55 15 20 25 to 1500 80 M16 x 1.5 110 118 80 17 40 22 16 44 44 3/4 65 184 18 18 72 12 87 50 50 20 269 284 65 17 20 80 25 to 1800 1/4 stroke 100 M18 x 1.5 135 150 102 19 42 22 18 44 44 3/4 75 192 20 22 85 12 109 55 55 23 287

Table of Contents

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

Electric Actuators

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

L plug connector (L): 10-SYJ54M-L-01 M plug connector (M): 10-SYJ54M-M-01 DIN terminal (D): 10-SYJ54M-D-01 M8 connector (WO): 10-SYJ54M-WO-01 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 MAX.10 74.6 74.9 49.6[56.6] 63.6 34.2 M8 x 1 48.5 54.1 36.6 60.7[67.7] Approx. 300 (Lead wire length) Pg7 6 6 6 6 65.5[67.7] 75.5 55.7[57.9] 64.6 57.2 50.7 42 42 42 42 34.7 17 9 17

C85

' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

-01 Type 10-SS3YJ7-42-C6 1/4 Type 10-SS3YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.

LEC-OM07605CN

PE_ _ ]). 5-42 5.2.6 3([Pr. PF_ _ ]). 5-43 5.2.7 4([Pr.

CRB2/CRBU2/CRB1

A B C D G E (g6) F (h9) S2 S1 R N M T U V W X Y L K H Model CRBU2WU15-D 5 0.004 0.012 0 0.043 M3 x 0.5 3.5 21 3 M5 x 0.8 29 10.5 34 10.5 36 0.5 48 25 3.2 21.2 10 18 15.5 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 M4 x 0.7 4.5 26 M5 x 0.8 4 11 36 44 42 11.5 59 34.5 0.5 25 10 4 17 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 M5 x 0.8 5.5 29 M5 x 0.8 4.5 13 42 12 52 50 69 47.5 1 4.5 29 12 22 17.5

Table of Contents

(mm) A B C D E (g6) F (h9) G H K L M N R S1 S2 T U V W X Y Z Model 1 1 3 3 5 0.004 0.012 6 0.004 0.012 8 0.005 0.014 12 0 0.043 14 0 0.043 16 0 0.043 CDRBU2W15-D 48 36 29 3 21 10.5 10.5 0.5 10 15.5 1.5 18 34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22

Gun Type Ionizer

When the external switch signal is not used, cut back the semi-strip wire to prevent any contact with the conductor. 187 Gun Type Ionizer IZG10 Series Dimensions IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment (157) For the bypass nozzle 33 133 24 5 8 147 138 For the bypass nozzle 36 Power supply connector One-touch fitting Applicable tubing

•

20 23 14 ZPY25l' 2$; 2&~ 14' 24 24 2<5 42 4 1.7 ZPY02U 2 2.~ 1.2 G.8 N4(::,"') 13.5 5 1.8 .Z!'Yo4l!; ZPY06U N4(~ 1 42 5 6 8 II 1 ,ll!: 145 5 1.8 4 4.8 is j ,. , 42.5 4.5 2.3 811(:t"' < 7 ;.8/4 , 1 1 6.5 M ' (mm) 6 7 2.5 r9# 1 < Ns(",,:"...) oe.4 1 5.5 7 2.5 ZJri'Otl 8 ,1\ ZPY32~ 32 35 14.5 Deep type I r.sXI 1., . "" , 1: t.i5 XQ! 'I U4!"'

Table of Contents

How to Order AS500 AS420 JIS Symbol AS 42 0 02 Option Body size Nil None Caution 42 50 60 80 90 1/2 standard 3/4 standard 1 standard 1 1/4 standard 1 1/2 standard H (1) High temperature (5 to 80C) Low temperature (30 to 60C) Bore size L (2) Be sure to read before handling.

Compact Cylinder with Air Cushion

O M J E D B K ( across flats) 11.5 depth 7.5 34 9 25 7 12 YB-03 32, 40 H (With locking) 14.5 depth 8.5 42 11 32 9 12 YB-05 50, 63 18 depth 12 52 13 38 11 16 YB-08 80 d1 d2 21 depth 14 62 17 50 14 19 YB-10 100 L UT Weight (g) Bore size (mm) Part no. RS W T1 T2 V C UA Material: Chrome molybdenum steel (nickel plated) 9 50 80 18 6.5 10 YB-03 32, 40 Part no.

RQ

RQ Applicable air cylinder bore YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 YA-08 80 62 10 25 11 26 8.5 16 03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket DYA-10 100 76 12 30 14 31 10.5 18 Type A mounting bracket YA YB YU Bore size (mm) Type B mounting bracket Joint W V U Weight (g) Part no.

MTS

31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5 47.5 47.5 20 15 17 37 43.5 33 43.5 33 16 23 19 24.5 24.5 19 27 27 27 27 63.5 63.5 63.5 63.5 22.5 17 23 43 59.5 39 59.5 39 20 26 22 25.5 25.5 22 30 30 30 30 67 67 67 67 23.5 20 26 46 63 42 63 42 25 32 25 28.5 28.5 25 36 36 36 36 88.5 88.5 88.5 88.5 26.5 23 32 52 84.5 48 84.5 48 32 32.5 30 30 30 30 36.5 36.5 36.5 36.5 102.5 102.5 102.5 102.5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

60<61> Indicator light VS7 54<59> 49<52.5> R1 R2 R1 R2 P P 81<82> 75<76> Cover diameter 1.5 Cross section 0.23mm2 < >: AC < >: AC 1.12-37 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ1000 Grommet(G): VQZ125 (R)lGl01 2 position double 0 1 23.4Mounting holes 300 95 (Lead wire length) 47.5 18 7.2 7.2 3 R3 4 2 22 10 SMC SMC B A 3 1 5 Cover diameter 1.6 Cross section 0.34mm2 Manual override 42

CM2

Please delete the unnecessary part. 1.4-14 Series CM2 Double Clevis (D) CM2D Bore size Stroke (mm) Bore Stroke range CX L NA NN RR U B1 N E A CD I CZ K P 1/8 1/8 1/8 1/4 S Z AL CI D MM ZZ CL F G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 15.5 13 5 133 142 10 30 24 M20 X 1.5 9 14 15 18 9 28 19 5 62 24 8 M8 X 1.25 25 13 8 41 20 20 33.5 M10 X 1.25 1 to 300 19.5 17 6 137 146 10 30 30 M26 X

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P Port) (42.9 ) (20.0) (15) (5) (7.5) 5.0 n-M5x0.8 P=10 15.0 *Dimensions 9 122 171 191 225 235.5

VQ

162.5 173 6 92 103 123 150 160.5 15 182 193 213 237.5 248 8 112 123 143 162.5 173 16 192 203 223 250 260.5 9 122 133 153 175 185.5 17 202 213 233 262.5 273 10 132 143 163 187.5 198 18 212 223 243 262.5 273 L1 L2 (L3) (L4) (L5) 2.9-11 Series VQ100 How to Order Manifold How to Order Manifold Assembly Suffix valve and option numbers for the manifold base No.