Dual Rod Cylinder Series CXSJ/CXS

50.0 40.0 30.0 IN 20.0 100 10.0 247 212 177 141 106 OUT 70.6 353 35.3 CXSJ15 8 176 151 126 101 75.6 IN 50.4 252 25.2 Deflection X (mm) 440 377 314 251 188 OUT 126 628 62.8 CXSJ20 10 330 283 236 188 141 IN 94.2 471 47.1 687 589 491 393 295 OUT 196 982 98.2 CXSJ25 12 529 454 378 302 227 IN 151 756 75.6 1126 965 804 643 482 OUT 322 1608 161 CXSJ32 16 844 724 603 482 362 IN 241 1206 121

AC Servo Motor Driver (Network card type ）

PN_ _] group : : : : : : 25A0h VAR PN32 I32 rw 18 121 18EtherCAT COMMUNICATION 18.6.5.2 Enabling parameters The parameters whose symbols are preceded by "*" are enabled by the following operations. Refer to chapter 5 in "_ Driver Instruction Manual" for the parameters with "*".

51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 117 117 118 118 119 119 120 120 121 121 122 122 123 125 126 127 127 128 128 129 130 131 131 132 133 135 135 136 137 138 138 139 140 141 141 142 143 144 145 147 150 150 151 Construction. Dimensions .

CA2

68 61.5 121 112 102.5 57.5 112.5 61 57.5 104 6-8-15 16 Series CA2 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Proper Auto Switch Mounting Position D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL Auto switch model D-P5DWL Hs Bore size (mm) A B A B A 40 3 3.5 1 1.5 Ht 50 3.5

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

N11T) (02T) 2-M2.5 x 0.45 Thread length 6 13 9 31.5 24.5 16.5 3 2.5 4 36 23.4 Mounting holes 9 6.5 6.5 47.5 10.5 Foot bracket 49.7 15.4 16.7 PE port P 1 3 R 1.5 A 1/8 NPTF R port 1/4 NPTF P port 23 Die cast hole For manifold gasket positioning L type plug connector (L): VQZ3 2(R)L -N7T, N9T, N11T, 02T DIN connector (Y): VQZ3 2(R)Y -N7T, N9T, N11T, 02T 88.5 300 (Lead wire length) Indicator

Piping: 41R (Base Mounted), Stations: 13 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41R (Base Mounted), Stations: 12 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 7 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 5 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 8 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 4 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 2 Stations, A, B Port: M5T (M5X0.8 NPTF)

Piping: 41R (Base Mounted), Stations: 4 Stations, A, B Port: N3T (5/32" One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 4 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41R (Base Mounted), Stations: 7 Stations, A, B Port: M5T (M5X0.8 NPTF)

Piping: 41R (Base Mounted), Stations: 14 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 20 Stations, A, B Port: M5T (M5X0.8 NPTF)

Piping: 41R (Base Mounted), Stations: 16 Stations, A, B Port: N3T (5/32" One-touch Fitting)