Stations: 4 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Stations: 6 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Stations: 11 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Stations: 16 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Warning(8) on p.16 8 Alarm for Stroke limit /code: 1-052 is generated. The actuator goes out the stroke limit specified by the basic parameters, Stroke (+) and Stroke (-) if it performs the requested operation.

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

Warning(8) on p.13 8 Alarm for Stroke limit /code: 1-052 is generated. The actuator goes out the stroke limit specified by the basic parameters, Stroke (+) and Stroke (-) if it performs the requested operation.

3 Port Solenoid Valve Series VQ100 1

How to Order Valves VQ1 1 0 5 F Manual override Nil B Non-locking push type (Tool required) Locking type (Tool required) Series VQ Compact 3 port valve Option Type of actuation Electrical entry 1 2 Note) Normally closed Normally open Plug-in With light/surge voltage suppressor (Only for plug-in manifold) F Note) Normally open type is available only with standard type. (1 W) Function Coil

3 Port Solenoid Valve Series VQ100

How to Order Valves VQ1 1 0 5 F Manual override Nil B Non-locking push type (Tool required) Locking type (Tool required) Series VQ Compact 3 port valve Option Type of actuation Electrical entry 1 2 Note) Normally closed Normally open Plug-in With light/surge voltage suppressor (Only for plug-in manifold) F Note) Normally open type is available only with standard type. (1 W) Function Coil

3 Port Solenoid Valve Series VQ100 1

How to Order Valves VQ1 1 0 5 F Manual override Nil B Non-locking push type (Tool required) Locking type (Tool required) Series VQ Compact 3 port valve Option Type of actuation Electrical entry 1 2 Note) Normally closed Normally open Plug-in With light/surge voltage suppressor (Only for plug-in manifold) F Note) Normally open type is available only with standard type. (1 W) Function Coil

VQ

How to Order Valve VQ1 1 0 5 F Manual override Series VQ Compact 3 port valve Non-locking push flush style Locking slotted style B : Option Actuation 1 2 Normally closed Normally open Electrical entry Plug-in style With indicator light and surge voltage suppressor (Only for plug-in manifold) F Functions Standard (1W) High pressure (1.5W) Low wattage (0.5W) Large flow capacity H Y U Coil

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

MHL2

F = one finger thrust.

JXCx-OMU0026

Set stroke is outside stroke limit. (052) B RESET is ON Caution If the step data operation method is a relative movement, note the location where the operation starts and the distance moved. If the location is outside the stroke range when power is supplied, this alarm will be generated. Move the table to within the stroke range, and supply power.

JXCx-OMT0002

Set stroke is outside stroke limit. (1-052) B RESET is ON Caution If the step data operation method is a relative movement, note the location where the operation starts and the distance moved. If the location is outside the stroke range when power is supplied, this alarm will be generated. Move the table to within the stroke range, and supply power. -88No.

SFOD-OMT0010

Set stroke is outside stroke limit. (1-052) B Input RESET Caution If the step data operation method is a relative movement, note the location where the operation starts and the distance moved. If the location is outside the stroke range when power is supplied, this alarm will be generated.

SFOD-OMT0012

Step data writing to the controller will begin. 34 No.SFOD-OMT0012-A f) Completion Writing is completed when the progress bar disappeared.

SFOD-OMT0011CN

OFF RUN : USB USB : USB ALM : LED PWR PWR (2) /SMC/JXC Controller PC 6 No.SFOD-OMT0011CN-A (Y) (N) OK PC a) b) USB c) USB 7 No.SFOD-OMT0011CN-A PC communication status Offline (Online) (3) Alarm 4.8(3) 8 No.SFOD-OMT0011CN-A 4. 4.1 (1) ON/OFF (1-1)(1-8) (1-1) (1-5) (1-4) (1-3) ON/OFF (1-2) (1-6) (1-7) No. (1-8) (1-1) FileViewWindowHelp (1-1-1) File (F)

IDX-OM-W038

N.C 3 N.O 1 2 7 6 5 4 N.O PE L N TB PLC GFCI ILS M C TC M C PLC THS M C OLR PTC CM PLC PTC C01 CM IDH6-10 TC IDH6 / IDHA6 TS M C F H SSR FM PRS P FM 1 IDH6/IDHA6 IDH6 / IDHA6 IDH6/IDHA6 IDH6 / IDHA6 CM FM OLR PRS ILS PTC PTC() MC THS TB TC TS SSR H F GFCI PLC 64 IDH Series IDX-OM-W038 . 6.4 6.3 IDH6 / IDHA6 1 65 IDH Series 6.4 IDX-OM-W038 7 7 7-1 / IDH Series 7-17-

SFOD-OMT0009CN

(INx) (b)DRIVE ONNo.1(OUTx ) (c)BUSY ONINP OFF() (d)No.1 AREA ON(150mm ) (e)BUSY OFFINP ON(No.1 ) (f)No.2(INx) (g)DRIVEONNo.2((OUTx ) (h)AREA OFFBUSY ONINP OFF() (i)No.2 AREA ON(170mm ) (j)No.2 AREA OFF(130mm ) (k)BUSY OFFINP ON(No.2 ) -50mm No.1 ( 200mm1 150mm2 250mm) No.2 ( 100mm1 130mm2 170mm) No.1 No.2 No.

Step Motor Driver （ Pulse input type ）

RESET Stroke limit (1-052) B SVON input Make sure that the basic parameter, Stroke (+) and Stroke (-) are consistent with the distance of electric actuator movement specified in the step data. 1. Return to origin is not completed within the set time. 2. Return to origin parameter has the conditions shown below.