VKF300

Do not use valves in atmospheres of corrosive gases, chemicals, salt water, water or steam, or where there is direct contact with same. 2. Do not use in an explosive atmosphere. 3. Do not use in locations subject to vibration or impact. 4. A protective cover, etc. should be used to shield valves from direct sunlight. 5.

CA2

DF 4-DT DH DS DA DL 4-DL B 90 DU DU DO DO DC Rotation DE Bore size (mm) A B A + B + 90 A 40 to 100 12 60 162 Note) This assembly drawing is provided as a reference.

Vacuum System Peripherals:

When using both types, specify C4 and C6 specifically; do not just use X marking.

VM

JIS Symbol 2 port Panel mounting hole Straight plunger VM120-01-05 VM130-01-05 Hexagon nut thick 5, across flats 17 3 port R port (3 port only) 0.5 MPa supply 2.0 mm P.T. 23 N F.O.F. 1.5 mm O.T. 2-4.6 mounting hole 3.5 mm T.T.

MNB

B Z + Stroke DB DX DD 90 B 4-DT A DS DH 4-DR DL DU DO DO DC DE DU DA Rotating Angle Bore size (mm) Part no.

MNB

B Z + Stroke DB DX DD 90 B 4-DT A DS DH 4-DR DL DU DO DO DC DE DU DA Rotating Angle Bore size (mm) Part no.

TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

Suction cups with flange

Nylon tube Within 0.1mm Soft nylon tube Within 0.1mm Polyurethane tube Within+0.15mm, Within -0.2mm Do not use tube which do not meet these outside diameter tolerances.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

This is suitable for vacuum (up to -100kPa) and low pressure 0.15MPa applications. 20R Type Applicable solenoid valve SYJ312R-l SYJ322R-l How to Order SS3YJ3--20R-05 A port M3 X 0.5 Applicable blank plate ass'y SYJ300-10-1A Stations 2 stations 02 ... ...

Fieldbus System

Failure to do so may cause damage or malfunction.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Do not use in a location having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. 3. Do not use in locations where radiated heat will be received from nearby heat sources.

MNB

B Z + Stroke DB DX DD 90 B 4DT A DS DH 4DR DB DU DO DO DC DE DU DL Rotation (mm) No.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

CRJB 1-90 54 CRJB 1-100 1 CRJB 1-180 67 CRJB 1-190 CRJU05-90 47 05 CRJU05-180 53 With external stopper CRJU 1-90 70 1 CRJU 1-180 81 Note) Above values do not include auto switch weights. 2 Mini-Rotary Actuator Series CRJ Rotating Direction and Rotation Angle The shaft turns clockwise when the A port is pressurized, and counterclockwise when the B port is pressurized.

LVQ

Do not use in a location having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. 3. Do not use in locations where radiated heat will be received from nearby heat sources. 1. Operate within the ranges of the maximum operating pressure and back pressure. VDW Caution VQ 1.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

1 Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MRQ D20PAT.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

to 0.5 Basic type CRJB1 0.40 1 With external stopper CRJU1 2.0 Weight Weight (g) Note) Type Model CRJB05-90 32 CRJB05-100 05 CRJB05-180 39 CRJB05-190 Basic type CRJB1-90 54 CRJB1-100 1 CRJB1-180 67 CRJB1-190 CRJU05-90 47 05 CRJU05-180 53 With external stopper CRJU1-90 70 1 CRJU1-180 81 Note) Values above do not include auto switch weights. 11-6-6 7 Mini-rotary Actuator Series CRJ Rotating

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

When there are stations which do not require wiring (e.g. individual SUP spacer), specify the wiring specification in the manifold specification so that the number of solenoids is the maximum number of solenoids or less.

Cylinder with Lock

DC DE DO 4 x DR DU DL DA DU With Rubber Bumper [mm] [mm] Bore size Z Part no.

Vacuum

Failure to do fiis will mean that th swiich will turn ON even when adsorption is unsteady. @ -...-.

Vacuum

Failure to do fiis will mean that th swiich will turn ON even when adsorption is unsteady. @ -...-.