A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

F

4.5 3.5 4 R(PT)1/8 KJL04-01S 10 8.9 17.5 15.5 16 14.5 3.5 6.8 4 R(PT)1/8 KJT04-01S 10 8.9 17 16 16.5 14.5 4.5 7.6 6 M5x0.8 KJL06-M5 7 11 17.5 14.5 17 15.5 3.5 3.1 6 M5x0.8 KJT06-M5 7 11 17.5 15 17.5 15.5 4.5 4.2 6 R(PT)1/8 KJL06-01S 10 11 19.5 16.5 18 15.5 9 6.1 6 R(PT)1/8 KJT06-01S 10 11 19 17.5 19 15.5 11 7.1 Applicable Thread Model H D L1 L2 A M Minimum Weight Tube O.D T (Hex) Hole (g)

1

20, 25 5 5 6.5 6.5 6.5 9 9 10 15 18 8 10 13 13 19 27 30 36 41 46 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M8 x 1.25 M12 x 1.5 M12 x 1.5 M16 x 1.5 M20 x 1.5 M24 x 1.5 12.5 14 17.5 17.5 21 30 34 40 46 52 19 19 27 26.5 26.5 33 32.5 37 53.5 57.5 5 to 50 63.5 (73.5) 29 (39) 5 29.5 M8 x 1.25 Note 1) ( ): Denotes the dimensions with auto switch.

Proposals for Energy Saving

VM-33A Push button (Flush) VM130-01-33 VM132-M5-33 VM-34AR Red VM130-01-34R VM130-01-34B VM130-01-34G VM130-01-34Y VM132-M5-34R VM132-M5-34B VM132-M5-34G VM132-M5-34Y Selector (2 position) VM-34AB Black VM-34AG Green VM-34AY Yellow VM-36A Key selector (2 position) VM130-01-36 VM132-M5-36 Red VM151-01-35R VM151-01-35B VM151-01-35G VM151-01-35Y VM153-M5-35R VM153-M5-35B VM153-M5-35G VM153-M5

Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16

Modular F.R.L. Units

19 19 19 19 19 19 14 Without a valve function 15 The combination of metal bowl: 2 and 8 is not available. 16 For pipe thread type: NPT.

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

Smooth Cylinder/Low Speed Cylinder

22 16 16 19 23 27 15 20 26 32 40 11 14 16 20 24 24 32 40 50 62 18 25 30 38 48 4 6 8 10 12 5 6 8 10 7 7 9 10 11 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 Note) 16.5 19 21.5 23 R T With auto switch Note) 5 stroke (CUX16-5D): 14.5 mm Without auto switch

KR

(mm) <M5> Weight (g) (1) D Applicable tubing KGH04-M5 KGH04-01 4 M5 x 0.8 4 2.4 9 16 4 1 4 KGH04-02 19.5 13.5 14 4 8 17 22 8 14 13 4 1 8 10 16 18 5.6 M5 x 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 4 10 12 14 18.5 22.5 23 10 15 18.5 17 1 8 1 4 6 13.1 10.4 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 Connection thread 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 28

MY1

C 3.5 4.5 5.5 6.5 8.5 10.5 12.5 G 8.5 10.5 16 19 23 25 27.5 GB 16.2 20 24.5 30 36.5 37.5 39.5 H 40 46 54 68 84 107 130 J M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M14 x 2 M16 x 2 K 10 12 9.5 16 15 28 32 L 80 100 102 132 162 200 230 LD 3.6 4.8 5.6 6.8 8.6 11 13.5 LH 22.5 23 27 35 38 29 32.5 HG 13.5 17 22 27 34.5 45 59 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 (LL) 40

C85

x 0.8 M12 x 1.25 86 7 9.5 11.5 15 19 46 28 10 12 16 16.7 7 5 12 4.2 6 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 86 7 9.5 4 11.5 15 19 46 28 10.5 12 16 16.7 7 5 12 4.2 6 12 12 M6 x 1 M5 x 0.8 M16 x 1.5 105 10 10.5 6 12.5 18.3 24 5 50 38 14 17 22 19.7 8 6 16 6.2 8 16 16 M6 x 1 M5 x 0.8 M16 x 1.5 111 10 10.5 6 12.5 18.3 24 5 56 38 14 17 22 19.7 8 6 16 6.2 8 16 20 M8 x 1.25 G 1/8 M22 x 1.5 126 13

ZX

41 1 trimmer Pressure sensor 51 Filter unit (F) M5 x 0.8 External release port 3.6 (Mounting hole) Vacuum switch 1 10 19 13.6 2-R1.8 (Mounting hole) Vacuum switch Supply valve Air operated Release valve External release Release flow rate adjusting needle Interface plate (63.5) 18 15.5 4 2-3.3 Mounting hole M5 (or M6) (PE port) M5 (or M6) (PV port) Vacuum supply pressure port (V port) Vacuum

ZP

Form w 1 Material e Width across flats K A Connection thread 10 13 A5 38 17 2.5 M5 x 0.8 M3 x 0.5 3.5 21 8 4 8 16 38.5 17.5 10 13 43 17 2.5 M6 x 1 M3 x 0.5 3.5 26 8 4 8 16 43.5 17.5 20 25 45 19 C2 N S U F GN GS A6 ZP T U Construction p. 117 32 45.5 19.5 40 50.5 24.5 12 50 51.5 25.5 20 25 A8 Adapter Assembly p. 121 40 24 4 M8 x 1 M5 x 0.8 5 16 12 4 12 32 40.5 24.5 40 4.2 50 41.5 25.5 1 N:

SX

G) 2-M5 x 0.8 (External pilot port) Manual override (Press and turn for the locking type.)

Speed Controller with Indicator

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8

MXQ

(L) MXQ-BT20(L) M14 x 1.5 M5 x 14 11 67.3 25 26 12 46 19 35 43 13 MXQ25(L) MXQ-BT25(L) M14 x 1.5 M6 x 18 12 67.3 28 31 12 53.5 19 35 49 15 1) Size of hexagon socket head cap screw 2) It is also available in the symmetric type.

Electric Actuators

BIT 2 5 Program designation Pro-no. bit2 5 <1> BIT 3 18 STP-NO BIT 1 Pro-no. bit3 18 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 Stp-no. bit3 7 20 The terminal that designates the step to be executed. Used when executing steps (position movement). (Set by the binary system.)

Title not found

(800) 526-7661 M5 x 0.8 Series Fibre Gasket Supplied 1/4 Hex Typ 35/64 35/64 29/64 29/64 .085 29/64 83 M5-B2 1/2 M5-B1 M5-B2 M5-B3 M5-B4 15/32 1/2 11 32 11 32 11 32 9/32 13/64 9/32 13/64 13/64 3 5/16 Hex Typ 84 M5-LB4 M5-LB1 M5-LB2 M5-LB3 M5-LB2 1/2 1 15/16 11/16 11/16 11/16 3 3 1/4 Hex Typ 5/16 Hex Typ 85 M5-T1 M5-T2 M5-T3 M5-T4 M5-T2 1/2 See complete selection of adapters on pages

5

(mm) Bore size A B C D F FB FC FT FX FY FZ GA GB H MM NA NB NN S Z 10 15 12 14 4 8 13 4.5 1.6 24 14 32 8 5 28 M4 x 0.7 12.5 9.5 M8 x 1.0 46 82 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 8 5 28 M5 x 0.8 12.5 9.5 M10 x 1.0 47 83 Double clevis (D) CJ2YD Bore size Stroke Z CDH9 +0.030 0 GB NB Piping port 2 x M5 x 0.8 0.030 0.060 Clevis pin (cdd9 ) GA Rod end nut C C MM D CZ 0 0.3 B 0 0.3 CX +0.2

VS 8-2/VS 8-4

20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A) 2 (B) IP65 enclosure compliant