VSA4

(Manifold base) VVSA430-05N1 1 (2 position single) VSA4134-00 3 (2 position double) VSA4234-00 1 (Blank plate) XTO16-5A 1 5-3-38

OMU0023

0 0 0 0 0 0 0 0 0 1 0 0 1 0 1 35 2nd shift 0 1 1 0 0 0 0 0 0 0 0 0 1 0 0 1 0 Value 36 3rd shift, ExOR A001h 1 0 0 1 0 0 0 0 0 0 0 0 0 1 0 1 1 of 4th 37 4th shift, ExOR A001h 1 1 1 0 1 0 0 0 0 0 0 0 0 0 1 1 1 byte: "00h" 38 5th shift, ExOR A001h 1 1 0 1 0 1 0 0 0 0 0 0 0 0 0 0 1 39 6th shift 6 0 1 1 0 1 0 1 0 0 0 0 0 0 0 0 0 0 40 7th shift 7 0 0 1 1 0 1 0 1 0 0 0 0 0 0 0 0 0 41 8th shift

Quick Exhaust Valve Series AQ 1

0 02 2 0 ASF Standard size Option 1 8 1 2 3 5 H L High temperature (5 to 80C) Low temperature (30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only

VP4

/470 Specifications Fluid Air 0.2 to 0.9 0 to 60 (No freezing.

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa

HRX-OM-M090

HRS018-W-0 HRS024-W-20) HRS Series 9.3 Flow Chart 9-7 HRX-OM-M090 Chapter 9 Documents 9.4 Cooling capacity 9.4.1 HRS012--10-(BJMT) 2500 2500 Ambient Ambient temperature temperature 2000 2000 or or Cooling capacity[W] Cooling capacity[W] facility water facility water temperature temperature 1500 1500 25 32 40 25 32 40 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid

JXCx-OMT0005CN

INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) 2DRIVEON No.1 (2)(5)(10)(13) DRIVE No.

Series H, DL, L, LL Self-align Fittings

M L 8 6 4 DT04-00 32 DT06-00 10 10 10 12 15 16 5.7 14 23.5 23.5 36 DT08-00 47 12 14 25 16 24.5 10 12 DT10-00 26.5 70 DT12-00 28.5 14 17 70 17 19 49 55 17 17 Female union: DHF Applicable tube O.D. (mm) Effective orifice (mm 2) Weight (g) H2 (Hex.) Part No. H1 (Hex.)

HRX-OM-R005

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060

Prevents Micro-Bubbles

(C) 0 to 100 Ambient temperature (C) 0 to 60 Stainless steel (SUS) 0.12 0.18 0.44 1.67 1.96 0.86 Weight (kg) PPS 0.05 0.08 0.18 0.73 0.32 PFA 0.09 0.20 0.90 0.78 0.35 Note 1) 0 to 60C when the diaphragm is NBR or EPR.

HRX-OM-R016

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T and MT are selected.

HRX-OM-W038

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and MT are selected.

HRX-OM-O021

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Title not found

to 1 00 Double rcd o12, a16/5 b 30 o2O, a25/5 b 50 o32,a4ol51o IOC) o50 to 61 00/1 0 to 1 0O Singleacting Spring return/extend s 1 2 1 0 6 4 U 5 , 1 0 o50h0.20 Ion.rotating rod Double acting Singl rod o12, @16/5 lD 30 o20, @295to 50 o32, o4ol510 1OO o50, 0631 0 to 1 00 Double rod s12, s1615 lo 30 o20 lo o40l5 to 50 o50, a6310lo 50 @Actuation Doude acting Srngle acting spnng refurn Single

VQ7-6/7-8

ARB250-00-P ARB250-00-A ARB250-00-B P reduced pressure A reduced pressure B reduced pressure A B A B 12 Series VQ7-6 Control Units Control equipment (filters, regulators, pressure switches, air release valves) has been made into standardized units which can be mounted on manifolds without any modifications.

V

0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy of Steven Engineering, Inc. !

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

A

NAR1000 NAW1000 K10 1/8NPT 0 ~ 160PSI NAR2000 2500 NAW2000 3000 K12 1/4NPT 0 ~ 160PSI NAR4000 NAW4000 K13 1/4NPT 0 ~ 30PSI NAR4000 NAW4000 K20 1/8NPT 0 ~ 30PSI NAR2000 2500 NAW2000 3000 G27-10-R1 116 Connection D I M E N S I O N S 5K8-10P/4P/2.5P D I M E N S I O N S 4K8-10P/4P/2.5P D I M E N S I O N S G27-10-R1 VACUUM GAUGES H O W T O O R D E R V A C U U M G A U G E S Scale in mmHg