SV

0 V 0 V 24 V G D G D SI unit SI unit Master unit D 0 V24 V G D 0 V24 V G D 0V 24V G D 0V 24V L2 L1 G LINE1 LINE2 SHIELD L1 L2 Power supply 24 V 0 V 0 V 24 V SHIELD SHIELD Transmission line L1 L2 FG 24 V 0 V L1 L2 FG 24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Crimped connector SL-J1A Power supply 24 V 0 V 0 V 24 V Type 3 ground Type 3 ground

2/3 Port Valve

Note 2) Value on option "V" (Non-leak, Vacuum).

CLQ

2-wire A93 A93V 12 V 24 V A73C A79W Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) M9N M9NV F79 F7NV IC circuit 5 V, 12 V Grommet M9P M9PV F7PV F7P M9B M9BV F7BV J79C J79 12 V 2-wire Connector Solid state switch 3-wire (NPN) 3-wire (PNP) F9NW F9NWV F7NWV F79W 24 V IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V F9PW F9PWV

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

VM

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

JIS Standard Hydraulic Cylinder

wire 12 V F5BA1 F59F 4-wire (NPN) IC circuit IC circuit IC circuit 5 V, 12 V Diagnostic output (2-color indicator) A96 A93 A90 100 V 100 V or less 100 V, 200 V 200 V or less 3-wire (NPN equiv.) 5 V Yes Grommet Relay PLC No Yes No A54 A64 A59W 12 V 2-wire 24 V A33 A34 A44 Terminal conduit PLC Relay PLC Yes 100 V, 200 V Grommet DIN terminal Diagnostic indication (2-color indicator) B59W

VQ4000

DIN type 5 pins Number Description Function Description Function 2 SW+ Number 1 Sensor power supply + Open 2 3 4 For solenoid valve +24 V 1 SV24V N.C. 2 1 VQC 3 For solenoid valve 0 V 2 SV0V SW 3 Sensor power supply Protective ground 3 PE SIGNAL 4 Sensor input signal 4 1 5 5 SQ For input block + 24 V, For input unit and SI unit + 24 V 4 SW24V PE 5 Protective

Speed Controller with

Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002F V V V V V V AS2002F V V V V AS2052F V V V V AS3002F V V V V V V V AS4002F V V V V 1 Use caution at the max. operating pressure when using soft nylon or polyurethane tubing. (Refer to the Web Catalog for details.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 08 C6 XP 1 V S 10 CE compliant CE compliant Nil Q Enclosure Note) Refer to SI Unit Part No. when ordering the CE-compliant SI unit.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 08 C6 XP 1 V S 10 CE compliant CE compliant Nil Q Enclosure Note) Refer to SI Unit Part No. when ordering the CE-compliant SI unit.

Compact Manifold Regulator

(With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3 selections) Yes 1% F.S.

Compact manifold regulator ARM5 Series

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

•

x @ 0 1 N V : Capacity 2 0 : T ube I.D cm L : Tube length em V= 1000X4D2X L .Burst'prdof 0 x @ 0 Wat"'-o..wt(Wat..) 0 0 x @ 1 = 1 000 X"4 (O.6) 2X100 =O.02BR @ . llnte or no Influence o .

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Model Uni thread size Metric size Inch size Elbow type 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Gasket AS22l1FSl-U01 1/8 V V V V V V V V V AS22l1FSl-U02 1/4 V V V V V V V V V V Female thread AS32l1FSl-U02 1/4 V V V V V V V Rc, G NPT, NPTF Uni thread AS32l1FSl-U03 3/8 V V V V V V V AS42l1FSl-U04 1/2 V V V V V Shape of Uni thread ridge Use of the chamfered surface of the female thread

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.

ARM10/11

ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate /min(ANR) Flow rate /min(ANR) Pressure Characteristics ARM10F-06 ARM10

ARM10/11

ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate /min(ANR) Flow rate /min(ANR) Pressure Characteristics ARM10F-06 ARM10

0.4

How to Order Manifold VV5Q 1 1 08 C6 FU1 CE-compliant Series Nil CE-compliant VQ1000 1 Q Note) For CE-compliant models, DC-type only.

Table of Contents

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.