Modular Design with Uniform Body Style

V V V V V D*5 N.O. (Normally open) Drain port is open when pressure is not applied.

ZP

> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -

ZP

> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -

reduces flow setting time

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method AS 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSl-M5l M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSl-U10/32l 10-32UNF VNote 4) V V V V V V AS-FE KE AS2ll1FSl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSl-l02 1/4 VNote 4) V V V V VNote 4) V V V V AS-FG R NPT Note 1) Sealant AS3ll1FSl-l02

Modular F.R.L. Unit

(The SI unit type is provided for use in Japan.) 01 02 03 04 06 10 1/8 V 1/4 V V V 3/8 V V 1/2 V 3/4 V V 1 V 17 Series AC Spacers and Brackets Accessories Spacer (X) D Center of F.R.L. body C 1 X-X B X RELEASE 2 Y200 Y400 X Applicable model A 6 3 4 5 5 B 27 35.5 47 57 61 C 15 18.5 26 31 33 D 33 48 59 65 70 Model Y100 Y200 Y300 Y400 Y500 Seal AC10, AC10A, AC10B AC20 AC25, AC30 AC40 AC40-

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method AS 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSGl-M5 M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSGl-U10/32 10-32UNF VNote 4) V V V V V V AS-FE KE AS2ll1FSGl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSGl-l02 1/4 VNote 4) V V V V VNote 4) V V V V AS-FG AS-FG R NPT Note 1) Sealant

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Kit Manifold C Connector 2 Body ported Stations 2 stations 02 20 stations 20 How to Order Valve C6 VQZ 1 2 1 1 5 M Port size {4(A), 2(B) port} VQZ2000 VQZ1000 Symbol Port size VQZ3000 Series v v v v v v v C3 C4 C6 C8 C10 M5 02 One-touch fitting for 3.2 v v v v VQZ1000 Body width 10mm VQZ2000 Body width 15mm VQZ3000 Body width 18mm 1 2 3 One-touch fitting for 4 One-touch fitting for

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Sensors A B A B 29.6 12.2 53.4 6.2 Manual override Press and turn for the locking type. ( ) 4(A) port side: Orange 2(B) port side: Green DIN rail holding screw (For DIN rail mounting) L2 5 (Rail mounting hole pitch: 12.5) L1 (Station n) (Station 1) With option Light/surge voltage suppressor 4 A 4 A 4 A 4 A 78.5 42.5 3/5 3/5 E E 63.5 61.9 52.5 2 B 2 B 2 B 2 B V 5 V 5 P 1 1 P V 1 P 3 E V 1

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

R2 P Manual override 8.5 34 63.8 13.8 (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 57.5 [64.5] + 42.1 25.5 20 12 22 22 11.5 18 1/4 (R1, R2 port) 31.5 34 63 L plug connector (L): 10-SYJ7 43-L3 4 5 01 02 M plug connector (M): 10-SYJ7 43-M3 4 5 01 02 DIN terminal (D, Y): 10-SYJ7 43D Y3 4 5 01 02 M8 connector (WO): 10-SYJ7 43-WO3 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2

Series SV

No. 1 2 3 2 Sensor power supply + Drain/Shield 1 1 5 Open N.C (SIGNAL) V+ Circuit power supply + 2 2 4 3 4 1 Sensor power supply SW V Circuit power supply 3 3 5 Sensor input signal SIGNAL CAN_H Signal H 4 4 Sensor ground E CAN_L Signal L 5 5 In the case of a 4 input block (EX250-IE2), this is the sensor input signal. 0 0 0 0 BUS 1 1 1 P 1 2 B 1 2 B 2 B 2 B 2 B 2 2 PWR E 3/5 3 3 4 A 4 A

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(L): 10-SYJ7 43-L3 4 5 01 02 M plug connector (M): 10-SYJ7 43-M3 4 5 01 02 DIN Terminal (D): 10-SYJ7 43-D3 4 5 01 02 M8 connector (WO): 10-SYJ7 43-WO3 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8[146.2] Approx. 300 (Lead wire length) 91 57.5[64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) 44.5 68.6[75.6] Approx. 300 20 20 20 20 87.6 37.6 122.2[126.6] 81.1 31.1 22 22 22 22 65.1

A

<28 V DC 50 mA 10-28V DC 0.4V max ON: Red LED Fixing bolt maximum torque NPN 16 & 20 D-F9PL 3 wire Solid State <28 V DC 50mA 10-28V DC 1.5V max ON: Red LED Part Number Torque N:m PNP 25 100 D-Z73L Reed 24 V DC 5-40mA 2.4V max ON: Red LED MY-J16 1.5 MY-J20 1.5 100 V AC 5-20mA 25 100 D-Z80L Reed 24V AC/DC 50mA None MY-J25 3 MY-J32 5 100 V AC/DC 20mA 25 100 D-Y7NWL 3 wire Solid State <28 V DC

SYJ3000/5000/7000

01 02 M plug connector (M): SYJ7 40-M3 4 5 01 02 DIN terminal (D): SYJ7 40-D3 4 5 01 02 M8 connector (WO): SYJ7 40-WO3 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2] Approx. 300 (Lead wire length) 91 57.5 [64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) Approx. 300 44.5 68.6 [75.6] 20 20 20 20 87.6 37.6 122.2 [126.6] 81.1 31.1 22 22 22 22 65.1 15.1 161.8 63 63 63 63 160

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Table of Contents

EXH port M5 x 0.8 EVS 1 8 ( ): Rc VFN 3 position double check: VFS2600-F-01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor

SYJ300/500/700

6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC With light/surge voltage suppressor With surge voltage suppressor (Non-polar type) DOZ is not available.

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44