Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

Vacuum Pad

D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Vacuum Pad

D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Vacuum Pad

D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Vacuum Pad

D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Symbol Nil 1 Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5 Size 1 2 3 4 5 6 7 Packaging K Symbol 1 Type Male M Applicable tubing size H Metric Size Inch Size Applicable tubing size Applicable tubing size 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22 Size Size Symbol Symbol KK 03 07 11 13 19 25 32 03 04 06 08 10 12 19 25 1/8" x 0.086" 1/4" x

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

SYJ3000/5000/7000

Example: SS5YJ3-20-03 1 set (Manifold base) SYJ3120-5G-M3 2 sets (Valve) SYJ3000-21-1A 1 set (Blanking plate assembly) SS5YJ3-S41-03-C4 1 set (Manifold base) SYJ3140-5LZ 2 sets (Valve) SYJ3000-21-2A 1 set (Balnking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Compact Manifold Regulator Series ARM5

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

Modular F.R.L. Units

-03-A (04)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve 6 VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter 6 E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06-A 10-A 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter 6 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer 6 Y14

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C95 Rod Side Trunnion Style 126 to 200 st ZZ Z Bore size (mm) CP95 1 to 50 st 51 to 100 st 101 to 125 st 20 25 32 40 46 131 156 181 NCM 51 136 161 186 211 TV TV ZZ + Stroke 51 138 163 188 213 62 155 180 205 230 NCA Clevis pin and snap ring are shipped together.

CG1

Front trunnion (mm) CA1 126 to 200st ZZ Z Bore size (mm) 1 to 50st 51 to 100st 101 to 125st CS1 20 25 32 40 46 131 156 181 51 136 161 186 211 51 138 163 188 213 62 155 180 205 230 Clevis pins and snap rings are attached.

ISO Standard Hydraulic Cylinder

Auto switch models Bore size (mm) 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W D-Z7/Z80 BS5-125 BMB5-032 BA7-040 BA7-040 BA7-063 CHQ CHK BT-12 BT-03 BT-04 BT-04 BT-06 CHN BS4-125 BMB4-032 BA4-040 BA4-040 BA4-063 Note 1) D-A5/A6/A59W cannot be mounted to 40, 50.

SYJ300/500/700

Example: SS3YJ5-20-03 .1 set (Manifold base) SYJ512-5LZ-M5.2 sets (Valve) SYJ500-10-1A.1 set (Blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (Manifold base) SYJ514R-5G.2 sets (Valve) SYJ500-10-3A .1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

0.55

A B 1/4, 3/8 2(A) port 13.5 28.5 51 2 x 5.2 (For mounting) 1/4, 3/8 3(R) port 47 17.6 23 1/8 12(PA) port NO 2A 42 52 NC 12 12 3R 1P NC (1/8) 12(PA) port 12.6 13.5 83 23 91 74.5 73.5 28.5 X M5 x 0.8 (Breathing hole) 13.5 28.5 57 1/4, 3/8 1(P) port For vacuum/VPA544V-1l 02 03 A B 1/4, 3/8 2(A) port 13.5 28.5 51 2 x 5.2 (For mounting) 47 23 1/4, 3/8 3(R) port 17.6 NO 2A 42 52 NC 12 3R 1P NC

10

Bore size [mm] d H B C D (Drill through) Applicable split pin Clevis Knuckle CD-M03Note 1) 32, 40 10 0.040 0.076 44 36 4 3 3 x 18 l CD-M05Note 1) 50, 63 14 0.050 0.093 60 51 4.5 4 4 x 25 l CD-M08Note 1) 80, 100 22 0.065 0.117 82 72 5 4 4 x 35 l IY-12Note 2) 125 25 0.065 0.117 79.5 69.5 5 4 4 x 40 l CJP NT-03 32 M10 x 1.25 6 17 19.6 16.5 NT-04 40 M14 x 1.5 8 22 25.4 21 NT-05 50, 63 M18 x 1.5

Cylinder with Lock

to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 150 175 40 56 41 23 12.5 25 37.5 50 75 100 125 150 175 200 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 225

Fieldbus System

Note) Without SI Unit, the symbol is nil. 51 5 Port Solenoid Valve Series VQC1000 EX600 How to Order Manifold Assembly Series EX600 Series SY Series SV Series S0700 Series VQC Example (VV5QC11) Digital Output Unit EX600-DYPB Digital Input Unit EX600-DXPD SI Unit Note) 2-position single VQC1100N-51 2-position double VQC1200N-51 EX600-SDN1A End plate Note) EX600-ED2 A B A B A B A B A A A B

Secondary Batteries

Explosion Proof Equipment 5 Intrinsically Safe Explosion-proof System 5 Port Solenoid Valve Series 51-SY Explosion Proof Solenoid Valve Series 50-VFE/VPE Series 51-SY Series 50-VFE/VPE Consult SMC about Material restriction.

OMU0023

Step Request data Response data Operation details 1 01 03 0600 0004 01 03 08 Acquires the alarm history. 2 Alarm history confirmation Confirms the acquired alarm history. (9) Alarm history clearance example E.g) The Alarm History saved in the Card Motor controller (controller ID1) is cleared.