Series VQ1000/2000 10- 21- 5 Port Solenoid Valve N9 Individual EXH spacer VVQ2000-R-1-C8 N9 EXH block plate VVQ2000-19A C8 (EXH port) 8 One-touch fitting C8 (SUP port) 8 One-touch fitting One set includes 2 pcs.
N9 Individual EXH spacer VVQ2000-R-1-C8 N9 EXH block plate VVQ2000-19A C8 (EXH port) 8 One-touch fitting C8 (SUP port) 8 One-touch fitting One set includes 2 pcs.
45 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 L n Dimensions Formula L1 = 22n + 24 n: Station B B B 2 2 2 A A A 1 46 75 85.5 2 68 87.5 98 3 90 112.5 123 4 112 137.5 148 5 134 162.5 173 6 156
-FU] D side n Stations 8 7 6 5 4 3 2 1 U side 55.5 (L plug connector) 1(P) SUP port 2-C8 AC, Latching 50.5 (L plug connector) Indicator light 49 (L plug connector) 50 AC, Latching 40.8 38.3 24.8 22.3 20.3 44 (L plug connector) 12 31 3(R) EXH port 2-C8 2n-C4, C6, C8 12 12 7.5 C4: One-touch fitting for 4 P = 16 28 C6: One-touch fitting for 6 C8: One-touch fitting for 8 115 (L plug connector
0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution
C4: 4 (SMC) C6: 6 (SMC) C8: 8 (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) L: DIN Rail Overall Length n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 148 160.5 185.5 198 210.5 235.5 248 260.5 273 298 310.5 323 335.5 360.5 373 385.5 410.5 423 435.5 137.5 150 175 187.5 200 225 237.5 250 262.5 287.5 300 312.5 325 350 362.5 375 400 412.5 425 120.2 136.2
M12 52 l M12 M12 48 6 6 32.3 28.3 16 M12 31.3 31.3 l 14.9 Terminal no.
plug connector (L) VZ5120-L-01 M plug connector (M) VZ5120-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5120-D-01 Built-in One-touch fittings VZ5120--C6 C8 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 57 Series VZ5000 2 Position
AXT100-DS25015 030 050 L Terminal no.
P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(
P 3 5 1 PE port 2-Rc 1/8 3(R2), 5(R1) port 22.2 die-cast hole (For manifold gasket positioning) Rc 1/4 1(P) port L plug connector (L): VQZ3120 1(R)-L-C6/C8/C10/02 DIN terminal (Y): VQZ3120 1(R)-Y-C6/C8/C10/02 300 108.5 (Lead wire length) 72 Indicator light 111.5 MAX. 10 30.5 <35.5> Applicable cable O.D.
0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution
16A SUP B L O C K P L AT E VVQ2000-10A-1 B L A N K I N G P L AT E A S S E M B LY Direct Exhaust [-S] B U I LT I N S I L E N C E R VVQ2000-P-1-C8 I N D I V I D U A L SUP S PA C E R VVQ2000-19A (Q2000) EXH B L O C K P L AT E KQPB L A N K I N G P L U G 04 06 03 07 AN200-KM10 S I L E N C E R (EXH P O R T) VVQ2000-R-1-C8 I N D I V I D U A L EXH S PA C E R VVQ2000-57A DIN R A I L M O U N T E D
With light/surge voltage suppressor 1.4 1.6 L-type plug connector (L) (B) 2 Non-locking push type (Tool required) 1 (P) 3 (R) VQZ3000 L-type plug connector (L) N.O.
plug connector: L M plug connector: M DIN terminal (D): M8 connector (W0): SY5220-M(-F2) C4, N3 C6, N7 C8, N9 SY5220-L(-F2) C4, N3 C6, N7 C8, N9 SY5220-D(-F2) C4, N3 C6, N7 C8, N9 SY5220-W0(-F2) C4, N3 C6, N7 C8, N9 Applicable cable O.D. 3.5 to 7 (Lead wire length) 127 [131.4] Approx. 300 60.9 12.7 28.1 [35.1] 53.4 Max. 10 42.1 27 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length
C8, C10 S0700 (PE port) VQ VQ4 C8: Max. 6.5 C10: Max. 7 For wiring specifications, refer to page 1326.
) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire length) 300 : With light/surge voltage suppressor Built-in One-touch fittings VZ5 20-DIN terminal (D) VZ5 20-D-01 C6 C8 3 4 5 3 4 5 C6: MAX. 6 C8: MAX. 6.5 2-One-touch fitting (A
plug connector M plug connector One-touch fittings for 6 C6 SX5000 S 5 VDC G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire One-touch fittings for 8 C8 R 3 VDC One-touch fittings for 8 C8 One-touch fitting for 10 C10 SX7000 One-touch fitting (Inch size) Symbol Port size Applicable series Common specifications H: Lead wire
Note 1) Note 2) Note 3) 2-5-19 Base Mounted 20 Series VQ4000 Kit (Lead wire cable) L 2-Rc 1/8 (Pilot EXH port) 38 70 18 18 2-G 3/4 (Electrical entry) 17.5 PE 30 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port 42 Rc 1/4: Rc 1/4 thread R2 R1 5 P 1 3 Rc 3/8: Rc 3/8 thread SMC C8: One-touch fitting for 8 6-Rc 1/2 1(P), 5(R1), 3(R2) port C10: One-touch fitting for 1 C12: One-touch fitting for 12