Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 2-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: One-Touch Plumbing, Connecting Tube Diameter: Ø6, Pressure Rating(MPa):

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 2-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: One-Touch Plumbing, Connecting Tube Diameter: Ø6, Pressure Rating(MPa):

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 2-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: One-Touch Plumbing, Connecting Tube Diameter: Ø6, Pressure Rating(MPa):

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 2-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: One-Touch Plumbing, Connecting Tube Diameter: Ø6, Pressure Rating(MPa):

Series: VQ21, Body Style: Single Unit, Coil Voltage: 24VDC, Lead Wire: DIN Terminal, Voltage Protection: S [Surge Suppressor (DC Voltage)], Manual Override: None, Port Size: ø6 One-touch Fitting, Option: -

Series: VQ21, Body Style: Single Unit, Coil Voltage: 110VAC 50/60HZ, Lead Wire: Grommet, Voltage Protection: S [Surge Suppressor (DC Voltage)], Manual Override: None, Port Size: ø6 One-touch Fitting, Option: -

Series: VQ21, Body Style: Single Unit, Coil Voltage: 24VDC, Lead Wire: Grommet, Voltage Protection: S [Surge Suppressor (DC Voltage)], Manual Override: None, Port Size: ø6 One-touch Fitting, Option: -

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

VZ5000

) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire length) 300 : With light/surge voltage suppressor Built-in One-touch fittings VZ5 20-DIN terminal (D) VZ5 20-D-01 C6 C8 3 4 5 3 4 5 C6: MAX. 6 C8: MAX. 6.5 2-One-touch fitting (A

VZ3000

plug connector (L) VZ3120-L-M5 M plug connector (M) VZ3120-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3120-D-M5 Built-in One-touch fittings VZ3120--C4 C6 MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-21 Series VZ3000 2 Position Double

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

45

AXT100-DS25015 030 050 L Terminal no.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L Elbow (Upward) B Elbow (Downward) Pilot type Nil Internal pilot R External pilot How to Order Valve Manifold Assembly Ordering example (10-SZ3000, Non plug-in) Double solenoid (24 VDC) 10-SZ3260-5MZ-C6 (3 sets) SUP/EXH block (U side mounting) Single solenoid (24 VDC) 10-SZ3160-5MZ-C6 (2 sets) U side D side Stations 3 2 1 10-SS5Z3-60-05U1 set (Manifold part no.) 10-SZ3160-5MZ-C62 sets

SZ3000

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 10 Multi-core vinyl cable 0.3 mm2 x 25C 2-M2.6 x 0.45 Socket side Terminal no.

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

Fieldbus System

C6: 6 (SMC) N7: 1/4" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D. C6: 6 (SMC) N7: 1/4" (SMC) Applicable tube O.D.

VQC

VVQ2000-P-1-C8 Port plug VVQ0-58A (For VQC1000) VVQ1000-58A (For VQC2000) EXH block plate assembly Elbow fitting assembly VVQ1000-F-L VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S C6 (SUP port) D-sub connector Terminal no. 6 One-touch fitting SOL.

42

SYJ SZ VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 Plug lead type Plug-in type VQZ Lead wire length L 0: Approx. 600 mm L 1: Approx. 1500 mm L 2: Approx. 3000 mm 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port SQ 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 106.5 155.4 (Single) 164.4 (Double) 178.5 (3-position) 3.5 VFS 3.5 139.9 (Single) 148.9 (Double) 163 (3-position

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VFR

0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution