CM2

Material: Carbon steel Dd9 d L Part No. m t l 0.040 0.076 CD-S02 CD-S03 20/25 32/40 8 C8 type for pivot 7.6 24.5 19.5 1.6 0.9 0.040 0.076 10 C10 type for pivot 9.6 34 29 1.35 1.15 Applicable bore size 20 25/32 40 Part No.

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

7.5

Caution Single solenoid SJ3000-46-SC-l Double solenoid, 3 position type, 4 position type SJ3000-46-DC-l Connector Assembly Part No.

VZS

Porting specifications Port size A, B Stations Applicable valve model Base model Wiring A, B port P , EA, EB 2 to 16 stations Plug-in type VV5ZS3-51F VV5ZS3-51G With D-sub connector With attachment plug lead wire Rc , VZS350-FZ 1 8 1 4 Side C6 Rc 1 4 Grommet L plug connector M plug connector K plug connector G L M KZ Non plug-in type VV5ZS3-51 2 to 24 stations C8 VZS350VK With attachment

4/5 Port Air Operated Valve Series SYJA3000

0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

(Except L kit.) Note 3) For specifying two or more options, enter them alphabetically.

MGG

Hs Approx. 11.5 16 Auto switch D-C7, C8 D-H7 A 12 Approx. Hs Approx. 14.5 B 24.5 Auto switch D-B5, B6 D-G5, K5 A B 8.5 Approx.

VZ5000

) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire length) 300 : With light/surge voltage suppressor Built-in One-touch fittings VZ5 20-DIN terminal (D) VZ5 20-D-01 C6 C8 3 4 5 3 4 5 C6: MAX. 6 C8: MAX. 6.5 2-One-touch fitting (A

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

L RUN SERIAL UNIT L ERR.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

plug connector with cover (LL) 52-SY5120-LL-01 (-F2) Insulation: Red (+) Insulation: Black () 4.1 0.3 mm2 12 14.7 L 104 (Lead wire length) Cable type (TT) 52-SY5120-TT-01 (-F2) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 L 120.8 (Lead wire length) Max.10 5 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5220-L-01 (-F2) 22.6 16.7

SYJ300/500/700

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol Internal pilot SYJ312 4 SYJ32 2 4 Grommet (G), (H), L plug connector (L), M plug connector (M), M8 connector (W) Electrical entry (A) 2 (A) 2 DC AC 50/60 Hz 24, 12, 6, 5, 3 Coil rated voltage (V) 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation 1 (P) 3 (R) 1 (P) 3 (R) Standard With power saving

Combination Cylinder

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

N L Non-lock type Lock type Lock position H R Head end lock Rod end lock Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

Cylinder with Lock Series CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

CM2

auto switch DM2 C H L 40 F A J H7BW 150 Number of auto switches Bore size Rod boot 2 pcs. 1 pc. n pcs.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Digital Flow Switch (Integrated display type)

PF2M701 (1 L/min) PF2M702 (2 L/min) PF2M705 (5 L/min) PF2M710 (10 L/min) -97No.PF-OMW0007-E PF2M725 (25 L/min) PF2M750 (50 L/min) PF2M711 (100 L/min) PF2M721 (200 L/min) -98No.PF-OMW0007-E Dimensions PF2M7#-C4/C6/C8/N7(-L) (mm) Model A P PF2M701/702/705/710-C4(-L) 59.1 2.8 depth 8.4 PF2M701/702/705/710/725/750-C6(-L) 59.9 2.8 depth 8.4 PF2M725/750-N7(-L) 67.5 2.8 depth 8.4 PF2M711/721-C8(