Magnetically Coupled Rodless Cylinder

G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5

VQ5000

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D

NCG/CG1

CG1 Rod Side Trunnion Style mm TV TV ZZ + Stroke 126 to 200 st ZZ Z Bore size (mm) 1 to 50 st 51 to 100 st 101 to 125 st Clevis pin and snap ring are shipped together. 20 25 32 40 46 131 156 181 Head side trunnion style: NCGTN/CG1TN 51 136 161 186 211 Bracket mounting range 51 138 163 188 213 62 155 180 205 230 2-TD8 (Pin O.D.)

AC Servo Motor Driver

TROUBLESHOOTING Display Name Definition Cause Action (Note 2) Alarm details AL.51 Overload 2 Machine collision or the like caused a continuous maximum current for a few seconds. Change the driver. 1. Driver fault. The servo motor is disconnected on the machine side and then the servo motor is test-operated. The alarm (AL.51) does not occur.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

63 RQ m1: Weight of cylinder operating part kg m2: Load weight kg V: Piston speed m/s 10 50 MU 40 32 5.0 4.0 3.0 (g) Table (2) Weight of Cylinder Movable Parts/Without Built-in Magnet D25 Cylinder stroke (mm) 2.0 Bore size 20 16 (mm) 5 10 15 20 25 30 35 40 45 50 75 100 -X 1.0 5 6 7 8 10 11 12 12 209 11 13 15 17 19 16 0.5 0.4 0.3 15 18 21 24 27 31 34 37 40 44 20 Data 24 28 33 37 42 46 51

Hydraulic

57 104 59 51 93.5 100 63.5 58.5 65 114 70 58.5 104 114 Hydraulic Cylinders Auto Switch Specifications Specific Product Precautions Be sure to read auto switch precautions on pages 139 through 141 before handling auto switches.

SX

Manifold block assembly q (Metric size) SX5000-51-2A (Inch size) SX5000-51-16A R, P port SX3000 (Metric size): With One-touch fittings for 8 (Inch size): With One-touch fittings for 5/16" R, P port SX5000 (Metric size): With One-touch fittings for 10 (Inch size): With One-touch fittings for 3/18" SUP/EXH block assembly (Metric size) SX3000-51-2A (Inch size) SX3000-51-16A w End block assembly

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P (51) (6) 3 3 t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 G P MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.) 10 (Clamp stroke) 0 d0.05 0 d0.05 Z D E E G 6 51 77 67.5 10.5 Diamond type Round type (Guide pin dia.: 17.5 or more) H

Air Cylinder

M8 x 1.25 6 7 7 14 18 18 22 26 11 11 14 17 17 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 11 11 13 16 M10 x 1.25 M12 x 1.75 M12 x 1.75 102 116 10 10 100 Stroke range Bore size Without rod boot With rod boot N MM P S WA (mm) (mm) H ZZ d e f h L ZZ 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 18.5 18.5 51

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D

MB

(mm) l ZZ Note) h Bore (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 1 to 50 51 to 100 51 to 100 101 to 150 101 to 150 151 to 200 151 to 200 201 to 300 201 to 300 301 to 400 301 to 400 401 to 500 401 to 500 501 to 600 501 to 600 601 to 700 601 to 700 701 to 800 701 to 800 801 to 900 801 to

10

to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125

MLGP

100 101 200 200 300 300 4 10 50 51 100 101 Data Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

Cylinder with Lock

to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 150 175 40 56 41 23 12.5 25 37.5 50 75 100 125 150 175 200 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 225

MLGP

100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6 10 25 26 51 50 100 6 10 25 26 51 50 100 200 200 300 300 Stroke (mm) Stroke (mm) Features 12 Series MLGP Horizontal Mounting Ball Bushing 31 l2 = 50mm, V = 400m/s 32 l2 = 100mm, V = 400m/s MLGPL20, 25 MLGPL20

MLGP

100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6 10 25 26 51 50 100 6 10 25 26 51 50 100 200 200 300 300 Stroke (mm) Stroke (mm) Features 12 Series MLGP Horizontal Mounting Ball Bushing 31 l2 = 50mm, V = 400m/s 32 l2 = 100mm, V = 400m/s MLGPL20, 25 MLGPL20

Valve Single Unit

Manifold block assembly q (Metric size) SX5000-51-2A (Inch size) SX5000-51-16A R, P port SX3000 (Metric size): With One-touch fittings for 8 (Inch size): With One-touch fittings for 5/16" R, P port SX5000 (Metric size): With One-touch fittings for 10 (Inch size): With One-touch fittings for 3/18" SUP/EXH block assembly (Metric size) SX3000-51-2A (Inch size) SX3000-51-16A w End block assembly

Fieldbus System

Note) Without SI Unit, the symbol is nil. 51 5 Port Solenoid Valve Series VQC1000 EX600 How to Order Manifold Assembly Series EX600 Series SY Series SV Series S0700 Series VQC Example (VV5QC11) Digital Output Unit EX600-DYPB Digital Input Unit EX600-DXPD SI Unit Note) 2-position single VQC1100N-51 2-position double VQC1200N-51 EX600-SDN1A End plate Note) EX600-ED2 A B A B A B A B A A A B

Hygienic Design Cylinder Series HY

to 100 st Over 101 st 30 st or less 31 to 50 st 51 to 100 st Over 101 st 20 25 78.5 86 88.5 96 108.5 116 128.5 136 52 56.5 62 66.5 82 86.5 102 106.5 36 42 83 93 14 16 30 38 81 91 18 21 54 64 12 16 16 18 10 12 4 4.5 27 32 12.5 13.5 M5 x 0.8 M5 x 0.8 20, 30, 50, 100, 150, 200 SB Bore size QA Over 101 st PB PC PD QB RA RB RC RD RE RF SA TA TB TC TD UA UB UC UD 30 st or less 31 to 50 st 51 to