Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations A, B port side VZ 4 stations 04 M5 C4 M5 X 0.8 Applicable blank plate assembly VF : : 4 One-touch fitting 12 stations 12 SYJ3000-21-3A (With dust cap) P port R port VFR Rc(PT)1/8 Rc(PT)1/8 VP7 VP4 Installation of the SYJ300 Valves on the SY3000 Manifold.

Modular Type Air Filter Series AF

P1 = 0.1MPa 0.04 0.04 0.02 0.02 00 00 500 1000 1500 5000 10 15000 Flow rate L/min (ANR) Flow rate L/min (ANR) AF30 Rc 3/8 AF60 Rc 1 0.10 0.10 P1 = 0.7MPa P1 = 0.5MPa P1 = 0.1MPa 0.08 0.08 P1 = 0.7MPa P1 = 0.3MPa Pressure drop MPa Pressure drop MPa P1 = 0.5MPa P1 = 0.3MPa 0.06 0.06 P1 = 0.1MPa 0.04 0.04 0.02 0.02 00 2000 1000 3000 4000 00 5000 10 15000 Flow rate L/min (ANR) Flow rate L/min

CV/MVGQ

Pilot valve only VO302A-00 1 pc. 1-2. With gasket VO302S-00 1 pc. 2. For double solenoid valve 2-1. Pilot valve only VO302A-00 2 pcs. 2-2. With gasket VO302D-00 2 pcs. Pushing out Steel ball (7) Spool valve (8) Spool spring (2) End cover Fig. 3 (1) Piston cover Fig. 7 At this time, install so that the steel ball of the piston cover faces the surface from which the lead wires protrude.

HRX-OM-M090

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-R016

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-W038

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-O021

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-R005

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

V

14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy of Steven Engineering, Inc. !

HRX-OM-W058

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-X027

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-R039

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

HRX-OM-R026

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

Modular Type Filter Regulator Series AW

0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa Inlet pressure MPa AW40 AW20 0.25 0.25 Outlet pressure MPa Outlet pressure MPa Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa 58 AW10 to 40

JXCx-OMT0023

Setting Control modes (Note 1) P S T CP/CL 00 01 For manufacturer setting (Note 2) 02 SON SON SON SON 03 RES RES RES RES 04 PC PC PC 05 (Note4) EM1 EM1 EM1 EM1 06 CR 07 ST1 RS2 ST1 08 ST2 RS1 ST2 09 TL1 TL1 TL1 0A LSP LSP LSP 0B LSN LSN LSN 0C For manufacturer setting (Note 2) 0D SP1 SP1 0E SP2 SP2 0F SP3 SP3 10 LOP LOP LOP 11 CDP CDP CDP 12 to 1F For manufacturer setting (Note 2) 20 MD0

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

VP4

Model Exhaust specifications P A, B Port size E Applicable valve model Series Common Individual Common Individual VP4154-00 VP4254-00 VP4354-00 VP4454-00 1 , 1 1 3 4 1 2 3 4 3 4 , VVP450 3 4 VVP460 Option Blanking plate assembly XT038N-4A With gaskets and bolts 3-6-9 10 Series VP450/470 Dimensions: VVP450/460 Common EXH: VVP450Station 1Port size VVP460Station 1Port size Grommet Conduit terminal

Vacuum System Peripherals:

-00-2 Polycarbonate Part no: G46-00-00-3 GZ46 GZ46-2 Material Brass (Electroless nickel plated) Brass Precautions Brass With attachment cover assembly Be sure to read before handling.