Table of Contents

FKM/EPDM O-ring e O-ring e 10A to 25A 15A to 25A Diaphragm assembly Diaphragm assembly Stainless steel, Brass, NBR Stainless steel, Brass, NBR r r Stainless steel, Brass FKM/EPDM 32A to 50A 32A to 50A Valve spring Valve spring Stainless steel Stainless steel, Copper Stainless steel, NBR Stainless steel Class B molded Stainless steel Stainless steel, Silver FKM/EPDM, PTFE t t 10A to

Table of Contents

Rc 1 4 VVZS3000-R-02-1 VVZS3000-R-02-2 Body type Plug-in type VVZS3000-10A-1 Non plug-in type VVZS3000-10A-2 Part no. Body type Plug-in type ARBZS3000-00-P-1 Non plug-in type ARBZS3000-00-P-2 Part no. Note) Apply pressure from the P port of the base to operate the interface regulator.

SQ1000/2000

O-ring R R R P R P SUP passage shut off SUP/EXH passages shut off EXH block plate Approx. 10 P R SSQ2000-B-R 9.2 5.2 When the exhaust from a valve interferes with other stations in the circuit, this is used between stations to separate exhausts. Also, it is used with an individual EXH spacer to shut off the exhaust of individual valves.

CC

Move the piston to the stroke end of the side that will be filled with oil, and perform steps q through r in the same sequence as described above. MK/MK2 Environment UAvoid use near fire. UDon't use in the clean room. RSQ/RSG Mounting RSH UInstall the converter vertically. UInstall the converter at a position that is higher than the cylinder.

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3C (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: R, Rc, Packaging: 1 (Standard Packaging Equivalent to Class M5.5

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5E (Tube O.D. 3/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: R, Rc, Packaging: 1 (Standard Packaging Equivalent to Class M5.5

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: R, Rc, Packaging: 1 (Standard Packaging Equivalent to Class

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3C (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 4B (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: Connector, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 1/4", Tubing Size 3/8"x1/4", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: Male, Thread: R, Rc, Packaging: Standard Packaging Equivalent to Class M5.5

Fitting Type: Elbow, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 3/8", Tubing Size 3/8"x1/4", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: Male, Thread: R, Rc, Packaging: Standard Packaging Equivalent to Class M5.5

Fitting Type: Elbow, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 3/4", Tubing Size 3/8"x1/4", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: Male, Thread: R, Rc, Packaging: Standard Packaging Equivalent to Class M5.5

7

Rated voltage Rated voltage Electrical option Electrical option VX2 GDM2A-G-S5 24 VDC 24 VDC 12 VDC 100 VAC VXK 100 VAC 110 VAC 110 VAC 200 VAC VXD VXD 200 VAC 220 VAC None C18312G6GCU GDM2A-R None 220 VAC 230 VAC VXZ 230 VAC 240 VAC 240 VAC 24 VAC VXS 24 VAC 48 VAC GDM2A-G-Z5 GDM2A-R-L1 GDM2A-R-L1 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L5 GDM2A-R-L5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

1

U S Z NS NZ Non-polar r Pilot type Positive common Nil R Internal pilot External pilot !

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.