High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

VS 8-2/VS 8-4

VSR8-2-FDCG-D VSR8-4-FDCG-D VSR8-2-FDBG-D VSR8-4-FDBG-D VSR8-2-FDAG-D VSR8-4-FDAG-D 6 A 4 A 3 A 1 A 5 B 2 B Output COM. 1 2 3 4 5 6 7 8 9 10 IP65 enclosure compliant 4-position dual 3-port valves (Rubber seal only) kit (Terminal block box) L Model A side B side Symbol Connector wiring diagram (Mixed wiring) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4

Compact Cylinder with Air Cushion

Hs A B A B 32 to 100 D-A73C D-A80C D-J79C D-A79W D-F7V D-F7WV D-F7BAVL Approx.

LEC-OM02704CN

(2) (b) (3) (c) 7 8 7MR Configurator (4) (d) (5) (e) 1 (6) (f) (7) (g) Enter (8) (9) (10) (11)(h) 7 9 7MR Configurator 7.6 PD12PD14 (1) 7 10 7MR Configurator (2) (a) DIDO a b d c (a) (b) (c) (d) 7 11 7MR Configurator (b) DIDO a b DIDO ON(a) ON (2)(c) (b) 7 12 7MR Configurator (c) ON DIDOON a b c d e ONONON ON(a) ON ON(b) ON ON(c) ONON ON(d) ON ON(e) 7

NCQ2/CQ2

(High lateral load), CDQ2 R/ V (Water resistant) D-A9 D-M9 D-M9 W D-M9 AL D-A9 V D-M9 V D-M9 WV D-M9 AVL 12 to 25 B A 32 to 200 A B U D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7 WV D-F7 V D-F7BAVL D-A7 D-A80 D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F79F 12 to 25 32 to 160 U U B A B A 32 to 100 D-P3DW A B U 188 Series (N)CQ2 High Lateral Load Water Resistant Standard Single Acting Double

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

2n-Rc 1/4 4(A), 2(B) port VQ0 9 9 73 2-Rc 1/8 (External pilot port) VQ4 12 X n VQ5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B B B B B B B B B A A A A A A A A 8 VQZ SMC SMC SMC SMC SMC SMC SMC 7 VQD 6 5 L2 L1 4 3 2 P = 25 P = 25 1 50.5 44 X Stations 12 38 26.5 Cable length (600 or 1500 mm) D side 37.5 10.2 12 106.5 43.5 178.5 50.5 59 96.5 Dimensions Formula L1 = 25n + 63, L2 = 25n + 76 n: Station (Maximum

LVQ

S) V C A B A B U D (Max.

CQ2

Carbon steel NBR NBR NBR 2.3-122 Compact Cylinder/Anti-lateral Load Series CDQ2 Auto Switch Mounting Position (at Stroke End) and Mounting Height CU CQS CQ2 Auto Switch Mounting Position (mm) MU D-F7W D-F7BAL D-F7F D-J79W D-F7WV D-A7H/A80H D-A73C/A80C D-F7/D-J79 D-F7V/D-J79C D-F9W D-F9WV D-F9BAL Bore size (mm) D-A9 D-A9V D-F D-F9V D-A7/A80 D-A79W A B A B A B A B A B A B A B 18 13 17 12 12.5

Free Mount Cylinder Series CU

D-A9V D-M9V D-M9WV 20 (22) A B W 5.5 (5) ( ): Denotes the values of D-M9V, D-M9WV.

Table of Contents

[V] 100 kPa 100 kPa 100kPa to 100 kPa 1 MPa 0 0 to 1 MPa For positive pressure 500 kPa 0 0 to 500 kPa C D Range Rated differential pressure range 1 4 For low differential pressure 0 to 2 kPa 2 kPa 0 A C B D Pressure Differential pressure Pressure Differential pressure A C B D 16-3-37 6 Series PSE300 Internal Circuit PSE300 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual

Dual Speed Controller with One-touch Fitting Series ASD

ASD430F-02-06ST ASD430F-02-08ST ASD430F-02-10ST ASD530F-02-06ST ASD530F-02-08ST ASD530F-02-10ST ASD530F-02-12ST ASD530F-03-06ST ASD530F-03-08ST ASD530F-03-10ST ASD530F-03-12ST ASD630F-04-10ST ASD630F-04-12ST 12.9 13.7 13.7 18.5 17 18.5 21 17 18.5 21 22 17 18.5 21 22 21 22 17.5 20.6 22.9 28.2 25.2 28.2 31 25.2 28.2 32.6 34.4 25.2 28.2 32.6 34.4 32.6 34.4 29.4 32.5 38.5 44.8 43.5 46.5 49.3

VEX1

T1209 (12) DL12-02 C AS420 AN300 T1209 (12) DL12-03 VEX3 2 3 4 D AS420 AN400 SGP elbow 90 1 2 B SGP B 1 2 E AS420 AN400 90 elbow F G AS500 AN500 AN600 SGP B 90 elbow 90 elbow 90 elbow VEX350 3 4 SGP1B SGP1B AS600 VEX30 Port VEX31 VEX32 External pilot External pilot H AS600 AN600 I VEX370 External pilot Pilot exhaust Pilot exhaust SGP1 B 90 elbow 90 elbow 90 elbow 1 4 SGP1 B SGP2B AS700 AS800

Compact Cylinder with Lock Series CLQ

D-M9W D-M9AL Hs B A 32 to 100 D-A9V D-M9V D-M9WV D-M9AVL B D-A9 D-M9 D-M9W D-M9AL Hs A Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) (mm) Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL Auto switch model D-A9V D-M9V D-M9WV D-M9AVL D-A9 D-A9V Bore size (mm) Hs Hs 20 25 32 40 50 63 80 100 22.5 25 Bore size (mm) A B A B 24.5 27 20 25 32 40 50 63 80 100 27

CLQ

Type A mounting bracket part numberYA-03 JointYU-03 J E Data T1 B 2-D through 2-O counterbore Material: Precision die-casting material equivalent to stainless steel 304 Bore size (mm) O J M D E B Part no.

Booster Regulator/Air Tank

D (A) (B) (B) OUT OUT 305 Tank OUT port Rc1/2 ARM 216 216 180 4 x 13 4 x 13 50 50 ARP Drain valve 100 100 Drain port Rc1/4 IR-A 200 200 400 700 678 IR Booster regulator model A B C D VBA20A 481 394 Rc3/8 VBA40A 520 429.8 Rc1/2 VBA22A 444 394 Rc3/8 469 VBA42A 477 429.8 Rc1/2 493 IRV The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

VQ5000

U D U D 179 106 46.8 59.2 83.5 U side Station number 55.5 M5 ground screw 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC Cable length A B B B B B Manual override B 2 A 4 A B 4 A B 2 A 4 L2 L1 58.5 P = 41 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 Electrical

reduces flow setting time

33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10/32-01 AS131FS1-M5E-03 5/32 8.2 AS131FS1-U10/32-03 AS131FS1-M5E-07 1/4 11.2 18.6 20.9 20.4 36.6 8 AS131FS1-U10/32-07 ASR ASQ M5 x 0.8 10/32UNF 8 593 AS-FS Series Dimensions: Elbow Type Seal method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1

Compact Cylinder with Lock Series CLQ

Hs A B A B 32 to 100 D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V Approx.

Compact Cylinder

A-type mounting bracket YA-03 YA-05 B-type mounting bracket YB-03 YB-05 32, 40 50, 63 YU-03 YU-05 RS M W T2 V K (Width across flats ) H (With locking) Material: Carbon steel (Nickel plated) (mm) 2 x D through 2 x O counterbore T1 B E J d1 d2 Bore size (mm) B D E J M O Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAL D-F7BAVL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-M9 D-M9V D-F9W D-F9WV D-A7 D-A80 D-F7V D-F7WV D-F7BAVL D-A7 D-A80 D-A9 D-A9V D-M9V D-F9WV D-A73C D-A80C Bore size (mm) D-A9V D-J79C D-F9BAL D-P5DWL D-A79W D-A79W D-P5DWL D-F9BAL A B A B A B A B A B A B A B U U U U U U U U U U 32 9.5 10 7 8.5 12.5