VQZ1000/2000/3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series MB/CA1 Body ported Series CJ2 Series CM2 Tube x Length T0604 x 1 m VQZ1151-01 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T0806 x 1 m VQZ2151-02 Speed controller AS3001F-06 AS3001F-08 Silencer AN200-02 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m VQZ3151-03 Speed controller AS3001F

SV

side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

Speed Controller with Indicator

L3 A L4 D1 T L2 L1 M H (Width across flats) Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSl-M5E-02 2 5.8 15.8 20.3 11.9 AS12l1FSl-U10/32E-02 AS12l1FSl-M5E-23 3.2 7.2 17.2 21.7 13.3 16.9 39 36.5 35 33.5 13.6 15.1 5.5 9.6 7 AS12l1FSl-U10/32E-23 AS12l1FSl-M5E-04 4 8.2 AS12l1FSl-U10/32E-04 AS12l1FSl-M5E-06 6 10.4

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

G: Approx. 300 H: Approx. 600 (Lead wire length) 85.2 [87.4] (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 57.5 [64.5] + 54 42.1 25.5 20 12 22 22 11.5 18 1/4 (R1, R2 port) 31.5 34 63 M plug connector (M): 10-SYJ7143-M01 02 DIN terminal (D, Y): 10-SYJ7143D Y01 02 M8 connector (WO): 10-SYJ7143-WO01 02 L plug connector (L): 10-SYJ7143-L01 02 Applicable cable O.D. 3.5 to 7 Approx.

/

terminal U 100.5 E J D I M A C H L B F K N.C.

SYJ3000/5000/7000

M plug connector (M): SYJ7240-M01 02 DIN terminal (D): SYJ7240-D01 02 M8 connector (WO): SYJ7240-WO01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 83.5 57.5 [64.5] 72.2 42.1 M8 x 1 62 57.1 (Lead wire length) Approx. 300 44.5 68.6 [75.6] 20 20 20 20 Pg7 127.2 [131.6] 107.6 [112] 22 22 22 22 147.2 Max. 10 145.4 110.6 125.4 97.6 65.6 63 63 63 63 22 22 22 22 31.5 31.5

Table of Contents

Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) D C d Dd9 H1 B1 t m t l m L Part no.

ZP3

B C D E Y q Pad dia.

Speed Controller with One-touch Fitting

Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X214 Restrictor (Without check valve) 10Clean Series 565 A AS Series Needle Valve/Flow Rate Characteristics AS2201F-G02-m, AS2211F-G02-m AS2301F-G02-m, AS2311F-G02-m AS2201F-02-mPA, AS2211F-02-mPA AS2201F-G01-m, AS2211F-G01-m AS2301F-G01-m, AS2311F-G01-m AS2201F-01-mPA

KG

M H Branch Union Elbow: KGLU D Applicable tubing O.D.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

44

Width across flat Effective area (mm2) Connection thread Rc Weight (g) L1 L2 M d Model H1 H2 H2 H1 I.D. 2.5 3 4 6 7.5 8 9 10 13 4 4 6 8 10 10 12 12 16 KFG2F0425-02 KFG2F0403-02 KFG2F0604-02 KFG2F0806-03 KFG2F1075-03 KFG2F1008-03 KFG2F1209-03 KFG2F1210-03 KFG2F1613-04 1.6 2.6 6 17 30 35 45 57 101 1/4 1/4 1/4 3/8 3/8 3/8 3/8 3/8 1/2 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 d 17 8 25.9 16.4 5 24 17 19

0.4

Lead wire length VVQ1000-84A-6VVQ1000-84A-15VVQ1000-84A-300.6 m 1.5 m 3 m Station number 1 to 8 The total number of stations is tabulated on the D-side.

KQ2

Note) D: Max. diameter P Q2 8 Q1 4.2 2 x applicable tubing L1 M D L2 A L3 D H Connection thread (With sealant) 45 Male Elbow: KQ2K Connection thread R M H (width across flats) Applicable tubing O.D.

Table of Contents

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

VEX1

Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System Solenoid valve Speed controller Tubing diameter x Length Silencer A B C D E F G H I J K 10 x 1 m 12 x 1 m 12 x 1 m SGP15A x 1 m SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m VEX VEX3 2-02 1 2 AS4000-02 AN200-02 AS420-03 AS420-04 AS420-04 AS500-06

0.55

(Values at the initial period) Series VP500 Solenoid Specifications DIN terminal (D) DIN (EN175301-803) terminal (Y) Conduit terminal (T) Grommet (G), (H) L-type plug connector (L) M-type plug connector (M) Electrical entry G, H, L, M D, Y, T DC AC (50/60 Hz) 24, 12 24, 100, 110, 200, 220, 240 10% of rated voltage Coil rated voltage (V) Allowable voltage fluctuation Series VP700 Standard

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

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One-touch fitting Connector entry direction D D side entry U U side entry Cable (Length) 0 Without cable 1 Cable length 1.5 m 2 Cable length 3 m 3 Cable length 5 m Note 1) When multiple symbols are specified, indicate them alphabetically.