125

R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC.

VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula

0.4

VQZ 7 6 5 4 3 2 1 n D side Stations U side SQ VFS D-sub> VFR (DIN rail clamp screw) VQ7 BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 (7.5) 20.5 One-touch fitting 13.4 56.9 [1(P), 3(R) port] Applicable tubing O.D.

44

Width across flat Effective area (mm2) Connection thread R A Weight (g) L M d Model H1 H2 I.D.

Series AS-FM/AS-M/ASD-FM

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32UNF) R NPT N Needle Valve/Flow Rate Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Upstream pressure 0.5MPa Upstream pressure 0.5MPa

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

DIN terminal: VKF334-D-01 Base mounted Grommet: VKF334-G-01 33.5 16.7 26 4 Manual override (Non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 MAX.10 2-4.3 (Mounting hole) Applicable cable O.D. 4 to 6.5 48.5 300 26 4 Pg.7 3 27 (Lead wire length) Manual override (Non-locking) A 20.5 18.5 mPm 3 32 59 68 78 70.5 43.5 12 7.5 P R 7.5 12 43.5 13.5 11 33.5 P R 13.5 11 Refer to grommet type for other

F

D E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I

42

(For input/output type for S kit) 3A 12 * With connector on the SI Unit VQ 1/2 VVQ4000 VQ 4/5 VQ 4/5 D-sub connector assembly VVQ4000 19A VQC 1/2 D-sub connector assembly VQC 4/5 D D side entry U U side entry VQZ Manifold Block Replacement Parts Manifold Block Assembly SQ Replacement Parts 3. Manifold block assembly part no. (Including r, t and y) No. Part no.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

11.7 12.7 17 31.1 27.1 32.1 36.1 14.2 14.3 R 1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 35.4 29.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L3 L2 D1 L1 H T Max.

E-P HYREG

Refer to Specific Product Precautions on page 1006. 990 E-P HYREG VY1 Series R Standard Specifications 0 1 0 1 0 1 VY110 01 02 0 1 0 1 VY140 0 1 VY150 0 1 VY170 0 1 20 VY190 0 1 VY1D00 M5 VY1A0 VY1B0 M5 VY120 01 02 VY130 02 03 Model 10 12 10 04 02 03 04 04 06 14 M5 01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight

Series VQ Metal Seal/Rubber Seal Body Ported

Porting specifications Applicable stations Series Port size P, R Port location A, B C6 C3, C4, M5 VQ0 VQ1000 VQ2000 Side Max. 16 C3, C4, C6, M5 C4, C6, C8 C6 Side Max. 16 C8 Side Max. 16 D-sub connector (25 pin) 015 AXT100-DS25-030 050 Cable Assembly Wire color table by terminal number of D-sub connector cable assembly: ( ) The D-sub connector cable ass'y can be ordered individually or included

VK300

Surge voltage suppressor (Built-in terminal) Marking AC, 12 VDC or less for DC For 24 V or more NL: Neon bulb R: Resister LED: Light emitting diode R: Resister D: Protective diode LED: Light emitting diode R: Resister 4-5-10

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Universal type Port size in the cylinder side 4 6 8 12 10 (1) AS22 1FE-01 AS23 1FE-01 R 1/8 AS22 1FE-02 AS23 1FE-02 R 1/4 AS32 1FE-03 AS33 1FE-03 R 3/8 AS42 1FE-04 AS43 1FE-04 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $enie zsMl-T115/-T121 I 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $eni zsMl-T115/-T121 ) 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?rgts' css"e d;s,x{f,#&fx rfse $.lp&q ssllal e*xec9**i*xa:l {see ?"

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.