E-P HYREG

00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Symbol Base mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 3(R) 1 4 1 1 2 2(A) 1(P) 9 2 2 Note

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

VCC

00 02 04 No 2 port valves used 2 pcs.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

40 AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can

Check Valve Series AK 1

R thread Applicable tubing O.D.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

Suction Guard (Produced upon receipt of order) FHG Series

Port size q Seal order no. r Seal order no. t Seal order no.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

R.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

LEC-OM02704CN

3() PD20 0 S S S S () 0 r / m i n 0 r / m i n 1 S S S S 0 r / m i n 0 r / m i n 2 S S S S S S 0 r / m i n 0 r / m i n 3 S S S S S S S 0 r / m i n 0 r / m i n 6 40 7MR Configurator 7 MR Configurator .2 7.1 .2 7.2 .3 7.3 .5 7.4 .6 7.5 .8 7.6 .10 7.7 .14 7.7.1 JOG .14 7.7.2 .17 7.7.3 .19 7.7.4 (DO) .20 7.7.5 1 .22 7.8 .24 7.8.1 .24 7.8.2 .25

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Note) Type 04 06 08 10 12 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Made to Order (For details, refer to page 659.) Control type Note) For applicable tubing O.D. selection, refer to the Model.

Series AS-FM/AS-M/ASD-FM

Speed Controller for Low Speed Operation Speed controller with One-touch fitting (resin body) Connecting tube Page Port threads AS-FM Elbow type R Metric size P.1 New New NPT Inch size Universal type R Metric size P.1 New New NPT Inch size In-line type New New Metric size Inch size P.9 Speed controller (metal body) Cylinder side Tube side AS-M R R Elbow type P.7 NPT NPT Dual speed controller

PA300/500/700

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 86.3 78.3 2(A) 2(A) 63 19 (A port) Rc 1/2 Individual exhaust: VV3PA7-42Station 3-04 (R port) Rc 1/2 34 3(R) 3(R) PA NO NC 112 (Mounting hole) 2-8.5 40 PA 52 119.5 112.5 86 1(P) 119.5 24 52 PA (P port) Rc 1/2 (Pitch) 41 37 (PA port) Rc 1/8 112.8 8 L2 L1 (PA port) Rc 1/8 PA 86.3 78.3 2(A) 2(A) 63 19 Rc