Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

IR1000/2000/3000

N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

4 Port Direct Operated Poppet Solenoid Valve SeriesVQ D1000 High speed coil with stable response times Compact and lightweight (34g) with large flow capacity SY Body width of 10mm, Cv0.05 2W (Standard) Cv0.08 4W (U type: Large flow) SYJ ON: 4ms, OFF: 2ms, Dispersion accuracy: 1ms (With light and surge voltage suppressor at a supply pressure of 0.5MPa, subject to clean, dry air) SX VK VZ Vacuum

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

/4 ASV410F-N02 14 13.5 NPT 3/8 ASV410F-N03 14 13.5 NPT 1/4 ASV510F-N02 27 23 NPT 3/8 ASV510F-N03 29 27 JIS Symbol NPT 1/2 ASV510F-N04 29 27 Specifications Series ASV120F ASV220F ASV310F/410F ASV510F Air Fluid 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Ambient and fluid temperature Number of needle rotations 10 turns 8 turns 12 turns 15 turns Applicable

1

M5 x 0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 376.

2

, 60C (F and FS type only)] IDF IDU IDF FS Refer to SMC website for details.

V

30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).

Body Option: 1 (External Pilot), Port Size: N02 (NPT1/4), Style: 34 [Twist Selector (2 Position)], Suffix: G (Push Button Selector Color Green)

Number of Ports: 2 Port, Actuator Type: Selector (2 Position), Suffix: Push Button Selector Color Green

Number of Ports: 3 Port, Actuator Type: Selector (2 Position), Suffix: Push Button Selector Color Green

Number of Ports: -, Body Option: -, Port Size: -, Actuator Type: -, Suffix: -, Bracket: -

Body Option: 1 (External Pilot), Port Size: N02 (NPT1/4), Style: 34 [Twist Selector (2 Position)], Suffix: G (Push Button Selector Color Green)

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 34 [Twist Selector (2 Position)], Suffix: G (Push Button Selector Color Green)