Modular Type Regulators Series AR

Ambient and fluid temperature (C) 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25 AR40 AR40-06 AR50 1/4, 3/8 AR30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AR60 Model AR20 AR40 AR40-06 AR50 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AR60 Port size 1 Port size 1 30 AR X430 03 BG 30 AR X425 03 BG For high/low temperature Option/Semi-standard: Select one each

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Control type 04 06 4 6 Port size 0 1 Meter-out Meter-in M3 M5 01 02 M3 x 0.5 M5 x 0.8 R 1/8 R 1/4 With One-touch fitting Fixed orifice Applicable model AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS221F-01-04 AS221F-01-06 AS221F-02-06 Symbol Fixed orifice 1 2 3 4 5 6 7 8 9 10 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 The graph below shows the relationship between orifices for each cylinder bore

Hand Valve Series VH 1

VH421-02 to 06 VH431-02 to 06 3 (Exhaust center) Rc 3/4: 58 2 position 3 position 3 4 2 1 Flow direction 4(B) 90 45 45 Flow direction 2 (A) Flow direction 4(B) Flow direction 2 (A) VH422-02 to 06 VH432-02 to 06 2 (Position) N Rc 3/4: 185 1 2 VH6 VH600-06/10 9.7 3 (Exhaust center) 3/4, 1 Rc 1: 194 3 4 5-8-7 2 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180

Hand Valve Series VH

VH421-02 to 06 VH431-02 to 06 3 (Exhaust center) Rc 3/4: 58 2 position 3 position 3 4 2 1 Flow direction 4(B) 90 45 45 Flow direction 2 (A) Flow direction 4(B) Flow direction 2 (A) VH422-02 to 06 VH432-02 to 06 2 (Position) N Rc 3/4: 185 1 2 VH6 VH600-06/10 9.7 3 (Exhaust center) 3/4, 1 Rc 1: 194 3 4 5-8-7 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180

KQ2

M5 M6 01 02 03 04 00 04 06 08 10 12 16 99 M5 x 0.8 M6 x 1.0 3.2 4 6 8 10 12 16 4 6 8 10 12 16 Thread connection Tubing (Rod) connection 23 04 06 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 R , Rc R , Rc R , Rc R , Rc 08 10 12 16 Same dia. tubing (Reducer) Different dia. tubing Same dia. rod Model Male connector Hexagon socket head universal male elbow Universal male elbow 45 male elbow Branch union elbow

Series VQ Base Mounted Metal Seal/Rubber Seal

Lead wire length (L) VVQ1000-84A-6VVQ1000-84A-15VVQ1000-84A-300.6m 1.5m 3m No.of stations 1 to 8 The total number of stations is tabulated starting from station one on the D side. How to Order Manifold VV5Q 1 06 C6 1 1 N L Option Symbol Option Remarks VQ1000 VQ2000 None Check valve for prevention of back press.

Hand Valve Series VH

center) VH401-02 to 06 VH411-02 to 06 Rc3/8: 49(2.7) Rc1/2: 55(3.1) 2 (Position) VH402-02 to 06 VH412-02 to 06 2 1 1.28 VH4 Handle operation angle and air flow direction 1/4 to 3/4 3 (Closed center) VH420-02 to 06 VH430-02 to 06 (Refer to figures of porting direction in the right.) 3 (Exhaust center) VH421-02 to 06 VH431-02 to 06 Rc3/4: 58(3.2) 2 position 3 position 3 4 2 1 2 (Position)

Compact Manifold Regulator

ARM10F N 06 1 B Z Front Knob Type y w e q r t IN side 1. IN/OUT Piping Position Top Top OUT side Position IN side OUT side Bottom Top Bottom Top Example of panel mounting Symbol 1 2 3 4 IN side Bottom Bottom OUT side 2.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

(Brackets for 6 stations) ZZFA1-06 1 pc.

Pressure Relief 3 Port Valve With Locking Holes

F,N)06A,B(-B,S)(-K,R,Z) VHS5510-(F,N)06~10A,B(-B,S)(-R,Z) Contents PAGE 1.

Table of Contents

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

SX

Speed controller Silencer Tube x Length Speed controller Silencer SX3140-01 SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02

Rotary One-touch Fittings Manifold Series KM

-06-08-01S-3 33 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 76.5 77 78 41 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 44 45 67 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 10 8 KM14-08-10-02S-3 48 88 89 90.5 94 95 98.5 19 71 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

VM

thread) 1 8 Rc Roller lever 01 Black One way roller lever 02 Green SA NPT F01 N01 1 8 G 1 8 Straight plunger 05 Y Yellow Roller plunger 06 VA Cross roller plunger 07 Piping direction and the length of push rod 0 Long Side ported Height of rod push Bottom ported Toggle lever 08 1 Short 2 Long 3 Short SA Push button (Mushroom) 30 Actuator 1 0 Short Long Side ported Push button (Extended) 32

5 Port Solenoid Valve Series VQZ1000/2000/3000

AN120-M5 T0604 x 1m AS3001F-06 INA-25-46 T1075 x 1m AS4001F-10 AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage

Micro Mechanical Valve Series VM1000

N F.O.F. 2 x 1 8 3 x 1 4 P.T.

Prevents Micro-Bubbles

VX3 Valve type Material VXA 0 1 2 N.C. N.O. Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.