Series KP/KPQ/KPG

KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5

Series KP/KPQ/KPG

KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5

SX

port) 3 4 5 02 03 3 4 5 L plug connector (L): SX7 40(R)-LM plug connector (M): SX7 40(R)-M02 03 Manual override (Press and turn for the locking type.)

AS-FG/ASD-FG

41 AS321FG-02-12 AS321FG-N02-09 69 22 32.8 44.3 20.9 12 15.2 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 31.8 43.3 AS321FG-03-06 AS321FG-N02-11 55 17 27.8 39.3 12.8 6 17.9 3/8" 21 67 27.8 39.3 AS321FG-03-08 AS321FG-N03-07 57 18.5 29.5 41 15.2 8 13.2 1/4" 17 55 R(PT) 3/8 23 41.5 46.5 20.9 19 40.2 35.2 NPT 3/8 19 20.9 29.5 41 AS321FG-03-10 AS321FG-N03-09 59 21 31.8 43.3 18.5 10 15.2 5/16" 46.5 41.5

Flow Control Equipment

Controller / 1 4 / 3 8 / 1 2 With One-touch Fittings/Universal / 1 8 20 to 32 20 to 40 40 to 63 63 to 100 AS23l 1FE-01 AS23l 1FE-02 AS33l 1FE-03 AS43l 1FE-04 / 1 4 / 3 8 / 1 2 Port size on piping side Standard/In-line (Metal Body) M3 M5 / 1 8 / 3 4 1 2 1 1 / 1 4 / 1 4 / 1 2 / 3 8 / 1 2 AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 20 to 32 20 to 40 32 to 63

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2

H/DL/L/LL

(mm) Connection threads Rc Model Effective area (mm 2) Mounting Weight (g) Mounting plate M L2 L1 hole thickness 1 4 8 6 DEF06-02 48 19 17 20 11 14 12 16 16 14 12 13 11 6 max. 4 max. 17 15 50.5 46.5 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 19 19 104 34 51 17 19 17 17 17 19 15 17 7 max. 7 max. 17 17 Connection thread Applicable tubing Mounting plate thickness 15-2-63 Series

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 29.5 19.8 19 41 59 21 45.4 31.8 43.3 40.2 40.4 10 18.5 5/16" 15.2

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

VQ4000

(Values at the initial period) Note 3) Values inside ( ) denote the low wattage (0.5 W) specifications. 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position double check (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 2-5-4 5 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit How to Order Valves Body Port size Nil Without sub-plate (For manifold) 0: Plug-in sub-plate 02 03 Rc 1/4 Rc 3/8 Porting specifications

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL

Hydraulic Filters

3 3 0.1 0.05 0.05 0.04 5 4 3 3 3 0.1 0.05 06/08 Pressure drop (MPa) 4 4 0.4 0.3 0.03 0.02 03/04 Precautions 1.

F

5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 Metric Size: 23 3.2mm 04 4mm 06 6mm 08 8mm 10 10mm 12 12mm 16 16mm Imperial 32 UNF 10-32 33 1/16 34 1/8 35 1/4 36 3/8 37 1/2 03 5/32 Dia Reducer 05 3/16 Dia Reducer 07 1/4 Dia Reducer 09 5/16 Dia Reducer 11 3/8 Dia Reducer 13 1/2 Dia Reducer 00 Same Diameter Tubing 99 Plug-In Type ACCESSORIES G A S K E T S F O R UNI ONE TOUCH FITTINGS Applicable

HEC-OM-S008

0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][LF] :

VFA3000

1 4 3 8 1 4 3 8 1 4 3 8 1 4 3 8 1 4 3 8 VFA5120 2 position single 02 03 0.33 1 8 VFA5220 2 position double 0.34 1 8 34.2 (1.9) 45 (2.5) 02 03 Body ported Base mounted (With sub-plate) Base mounted VFA5320 -X1 3 position closed center 0.43 1 8 30.6 (1.7) 36 (2) 02 03 VFA5420 -X1 3 position exhaustcenter 0.43 1 8 32.4 (1.8) 41.4 (2.3) 02 03 VFA5520 -X1 3 position pressuretcenter 0.43 1 8 32

reduces flow setting time

-02-11 (S) 3/8 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FS1-03-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 55.4 54 50.2 48.8 13.3 24.5 19.2 41 AS331FS1-03-09 (S) 5/16 13.2 37.1 23.5 52.2 14.2 42 AS331FS1-03-11 (S) 3/8 15.9 17.4 23 41.2 26.1 54.8 15.6 45 AS431FS1-04-11 (S) 3/8 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 26.1 61.2 64.1 62.5 57 55.4 15.6 26 19 69 AS431FS1-04-13 (S) 1/2 18.5

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5

VM

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

59.9 14.2 50 AS331FSG1-02-11 (S) 3/8 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FSG1-03-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 55.4 54 50.2 48.8 13.3 24.5 19.2 41 AS331FSG1-03-09 (S) 5/16 13.2 37.1 23.5 52.2 14.2 42 AS331FSG1-03-11 (S) 3/8 15.9 17.4 23 41.2 26.1 54.8 15.6 45 AS431FSG1-04-11 (S) 3/8 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 26.1 61.2 64.1 62.5 57 55.4 15.6 26 19 69