SMC Pneumatic Clean Series

H F N1 1.5 Width across flats NA N2 FT Cushion valve (Width across flats 1.5) WB 4-FD S + Stroke Z + Stroke ZZ + Stroke FY 40 (mm) 13 8 AL D K MM NA NN B1 B2 Bore size 6 6 6 6 ZZ Z H H2 H1 S P N1 I F C2 A 52 40 40 34 B FX FZ FY GB FT 4 7 FD E 20-0.033 0 N2 GA GC WA WB WC 42.5 34.5 30 24 8 8 8 47.3 37 37 30 6 6 5 108 82 80 80 11 8 8 8 1/8 36 31 31 31 16 13 13 13 125 46.5 37.5 33.5 28 7 5.5

90

Release at least one side. 2 For port exhaust, air is exhausted from the one-touch fitting. 3 Pilot pressure exhaust is common with ejector exhaust. 4 Refer to page 22 for dimensions with a bracket mounted. 06 08 07 09 06 07 6 1/4" 9.7 12.3 6 8 1/4" 5/16" 8.25 11.4 10.8 11.4 4 6 4.76 6 Metric size Inch size ZK2 LA to J K R A B Manual override (Release valve) Manual override (Supply valve)

VZ3000

Applicable flat ribbon cable connector Internal wiring 1 3 5 6 1 3 5 6 Applicable valve model VZ343MOZ-VZ353MOZ Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note) Withstand voltage specifications of wiring unit part is equivalent to JIS C 0704 class 1.

PFxx-OMO0004CN

55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -65No.PF-OMO0004CN-E PFMB7201 15 V420 mA 1 k 6 24 V 600 12 V 300 7 0.4 V () 30 msec. 8 9 L/mincfm 10 3 Lft -10210 L/min(-11 L/min [ 0]) 0999,999,999 L 1 L/min 1 L LED 3 7 ON (OUT1:OUT2 IP40 AC1000 V 1 50 M (DC500 V )

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: C10 (One-touch fitting for ø10), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: None

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: C8 (One-touch fitting for ø8), Body Material and Coil Insulation Type: A (PPS Body, FKM Seal, Class B Coil), Option: None

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: C8 (One-touch fitting for ø8), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: None

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ8, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ8, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ10, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired

PSxx-OMG0001CN

-22No.PS-OMG0001CN-H , (2030 ) -23No.PS-OMG0001CN-H PSE300 ( ) No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 No.7 -24No.PS-OMG0001CN-H No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 -25No.PS-OMG0001CN-H No.

VCL

2 x M Thread depth N 2 x M Thread depth N L L K K N.C.

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

Rotary Cylinder Series MRQ

6 !7 !8 !

VCW

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

XLA Series

Step 6 3 Bolt b Tightening torque of bolt a Nm Tightening torque of bolt b Nm 1 2 Valve size Tightening torque Valve Tightening All sizes 0.3 size torque 4 XLA-16 0.7 -25 1.5 -40 2.5 -50 6 Bonnet assembly -63 6 -80 15 -100 20 Heater -160 102 Pilot port Bolt a Cover Body Apply 0.4MPa of air pressure to the pilot port.

VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

VCW

Valve model Port size VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 4.5-5 Series VCW Dimensions

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (

High Vacuum L Type Valve

SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.