Parallel Seal Type Slit Valve

Construction/Operation P68 4. Precautions P89 5. Spare Parts List P10 6. Maintenance P10 7. Troubleshooting P11 Attachment: Maintenance Procedure P1216 1 - Slit Valve Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Compact Low Friction Cylinder Compact Low Friction Cylinder Compact Low Friction Cylinder Compact Low Friction Cylinder Metal Seal Type Metal Seal Type Metal Seal Type Metal Seal Type MQ MQ MQ MQ Series Series Series Series (M

Contact SMC beforehand and take special consideration of safety measures if the product is 4. Contact SMC beforehand and take special consideration of safety measures if the product 4. Contact SMC beforehand and take special consideration of safety measures if the product 4. Contact SMC beforehand and take special consideration of safety measures if the product 4.

ITV2-OM00114

Connection to external equipment LED indication Communication wiring diagram Power supply wiring diagram 1:SLD 1:+24V 1:SLD 2:DB Power DC24V 2:F.G. 2:DB 3:DG 3:GND CC-Link OUT CC-Link In 3:DG 4:DA 4:N.C. 4:DA 5:N.C.

FGX-OM-N027

(Figure 4-1) Air release Foundation bolt Fig. 4-1 Example of the circulating filter circuit 9 / 13 FGX-OM-N027-B 5. Assembly, installation and piping 1) Assembly Assemble the product according to the following procedure.

Regulator for 2 MPa ARX 20

01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

ITV2-OM0095

(Tightening torque 0.6 to 0.8Nm) Dipswitch ON 1 2 3 4 5 6 7 8 9 10 Enable or disable of Dip switch MAC ID Baud rate HOLD/CLEAR Setting at the time of shipment 1 2 3 4 5 6 7 8 9 10 Node address: 0 Baud rate: 125kbps Hold/Clear: Clear Dip switch: enable 8 - Setting of MAC ID MAC ID 1 2 3 4 5 6 0 OFF OFF OFF OFF OFF OFF 1 OFF OFF OFF OFF OFF ON 2 OFF OFF OFF OFF ON OFF : : : : : : : 62 ON ON

DIQ-69200-OM002

Lock keys (refer to P9) Minimum pressure (F_1) adjusting range Maximum pressure (F_2) adjusting range 120% 100% 100% 90% 10% 0% 0% 4 0 0 0 12 10 20mA 20mA 4 0 0 0 12 10 20mA 20mA 2.5 5V 2.5 5V 5 10V 5 10V (Note1) F_1 is adjustable in a range from 0% to 90% of the rated value. (Default value : 0%0.00MPa) (Note2) F_2 is adjustable in a range from 10 to 120% of the rated value.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55

SYJ300/500/700

N.O. + P. 4-4-37 SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 2 3 (A R) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P. 4-4-4 SYJ500 Push-turn locking lever type DIN terminal 1.2 2 3 (A R) 1/8 (SYJ500, 700 only) P. 4-4-18 SYJ700 M8 connector 2.7 2 3 (A R) 1/8, 1/4 P. 4-4-37 Note) All AC voltage

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 3) ( ): Without sub-plate Note 4) For DC voltages.

SYJ300/500/700

N.O. + P. 4-4-37 SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 2 3 (A R) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P. 4-4-4 SYJ500 Push-turn locking lever type DIN terminal 1.2 2 3 (A R) 1/8 (SYJ500, 700 only) P. 4-4-18 SYJ700 M8 connector 2.7 2 3 (A R) 1/8, 1/4 P. 4-4-37 Note) All AC voltage

SYJ3000/5000/7000

Refer to page 1-7-4.)

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

(With screws) 30, 40 1/4, 3/8, 1/2 VXZ30S-14A-1 50, 60 3/4, 1 VXZ50S-14A-1 Brass, Stainless steel 1/8, 1/4, 3/8 JSX20-12A-4 30 1/4, 3/8 20 Aluminum 1/8, 1/4, 3/8 VX021N-12A 30 1/4, 3/8 VX022N-12A Stainless steel Piping 2.

VQ5000

(mm) 1in 25.4mm Bottom port diagram 2-G3/4 Conduit port 2n-1/2 (ports A, B) 144.5 143 112.5 83.5 55.5 M5 ground screw 106 59.2 46.8 9 9 34.5 34 n U side 12 X B 2 A 4 6 B A B 2 A 4 5 B A B 2 A 4 SMC SMC SMC SMC 4 B A L2 L1 58.5 P=41 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 48 68.5 P=41 B A 4 1 B A 2 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-1/8 (external pilot port) L n Dimensions

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list

3 Port Air Operated Valve Series SYJA300

4-4-61 for dimensions with connector cable.

4/5 Port Air Operated Valve Series SYJA3000

0.30 0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1/8 1/4 10-SYJ72M 1/8 1/8 1/8 1/8 C6 C8 Type 10-SS3YJ7-40 Type 10-SS3YJ7-41 Base mounted for internal pilot 10-SYJ74M 1/4 1/4 Type 10-SS3YJ7-42-01 Type 10-SS3YJ7-42-C6 1/4 Type 10-SS3YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.