One-touch Fittings

[mm] 1 D Weight [g] Nylon Urethane X 4 M5 x 0.8 KQ2U04-M5G 10 8.2 7.7 33.9 30.9 13.3 8.2 5.7 6 3.2 2.2 2.2 1.8 6.7 6 M5 x 0.8 KQ2U06-M5G 12 10.4 9.7 35 32 13.3 10.4 6.8 6 3.2 2.2 2.2 1.8 10 D Round type 4, 6 M 1: D is maximum diameter. 2 x N Release button dimensions A L 2 x O X D H Connection thread Q Q Branch Y: KQ2U-G (Sealant) Connection thread R Model H (Width across flats) 2 x Applicable

5 Port Solenoid Valve Series VQZ1000/2000/3000

B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 45.5 (For M5) 13 8.5 L4 L3 Grommet (G) 5 L5 Manual override M5 x 0.8 [4(A), 2(B) port] (8) 1/8 [1(P), 5(R1), 3(R2) port] (5.5) 16.5 31.5 44.5 31.5 12 23.5 30 Approx. 300 (Lead wire length) 120.4 R1 5 P 1 R2 3 3 R2 1 P 5 R1 16.5 16.5 B B B B B 107.4 53.7 (35) 47 2 2 2 2 2 4 4 4 4 4 A A A A A (DIN rail) 17.3 4 x 4.5 (For mounting) PE port 33.9

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

0.4

VQ1000/2000 Series VQ1000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P

e

Symbol Description Power supply ON 1 1 1 1 Intermediate 1 q Intermediate 2 q Intermediate 3 q Motor side End side A B C D E MIDDLE Indicator light (Green) q q q 2 MOTOR Indicator light (Green) q q q END Indicator light (Green) q q q q q q q q PWR Indicator light (Green) q ALM Indicator light (Red) q indicates on status, and indicates off status. 1) Displays for the 5-point stoppable type

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 1 2 Note) 2 position single 100 VAC (50/60 Hz) G: Grommet C kit single only.

C85

1 y q r e i !2 o !

C85

1 y q r e i !2 o !

0.4

: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2

Electric Actuator

Applied portion Order no. 22 25 32 LE-D-2-2 LE-D-2-3 GR-S-010 (10 g) GR-S-020 (20 g) Piston rod Apply grease on the piston rod periodically.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Note 2) TF (G thread) for 20 indicates M5 x 0.8.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

cable 6 to 12 D D K F G1/2 Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts C H C J E J E IN IN A A 2 x Port size 1(IN), 2(OUT) port B B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port

ZP

Series M5) c a Hexagon width across flats 7 Hexagon width across flats 7 (Miniature tube fitting Series M5) d b Flat with ribs Hexagon width across flats 7 Applicable Tubing Flat/Flat with Ribs Flat/Flat with Ribs Applicable Tubing G: M5 x 0.8 Y G: M6 x 1 G: M8 x 1.25 G: M4 x 0.7 G: M5 x 0.8 D ZPY02U 2 4 6 8 Applicable tube O.

ZP

flat 7 KJH02-M5 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 M-5AU-4-X83 [Weight: 1.6 g] 2 1 Refer to "ZP3-TB -A10-B5" for dimensions. 2 When calculating the weight, add the weight of the fitting to "ZP3-TB -A10-B5".

15

x M4 x 0.7 8 70 50 4.6 13 60 M3 x 12 M4 x 12 11 NW 2 x M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 M4 x 12 9 NU 2 x M5 x 0.8 8.5 70 50 4.6 10.6 60 M3 x 12 M4 x 12 11 NT 2 x M5 x 0.8 8.5 70 50 4.6 17 60 M3 x 12 M4 x 12 12 NM2 M4 x 0.7 8 50 38.2 11.5 60 7 M3 x 12 M4 x 12 10 32 NZ 4 x M5 x 0.8 8.5 70 50 4.6 11 60 M4 x 12 M4 x 12 14 NY 4 x M4 x 0.7 8 70 50 4.6 11 60 M4 x 12 M4 x

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

VFS

, Grommet terminal, Conduit terminal, DIN terminal 2 Position Double, 3 Position Grommet: VFS2220-G, VFS2320-G, VFS2420-G, VFS2520-G 182 (3 position: 192.5) VK Manual override (Non-locking) 2-3.5 mounting hole (M5: External pilot port Only for external pilot model.)

24

MGPM, MGPL, MGPA Common Dimensions [mm] Bore size [mm] Standard stroke [mm] B C DA G GA GB H J K L MM ML NN P PB PW Q R S Nil N TF 20 25, 50, 75, 100, 125 150, 175, 200, 250 300, 350, 400 78 62 10 36 10.5 8.5 83 18 18 24 M5 x 0.8 13 M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 10.5 25 18 70 30 25 78.5 62.5 12 42 11.5 9 93 21 21 30 M6 x 1.0 15 M6 x 1.0 Rc 1/8 NPT 1/8 G 1/8 13.5 30 26 78 38 Bore size [mm]

Series VQ Base Mounted Metal Seal/Rubber Seal

P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).